超导微波谐振器阵列的串扰抑制
Crosstalk Reduction for Superconducting Microwave Resonator Arrays
摘要：
大规模阵列的微波动力学电感探测器（MKID）是有吸引力的候选人，用于成像仪器的下一代亚毫米波望远镜，如CCAT。我们已经设计和制造了紧密包装的250像素MKID阵列，使用集总元件谐振器蚀刻从超导TiNx沉积在硅衬底上的薄层。在我们的初始设计中，高像素封装密度导致谐振器之间的电磁耦合导致大的微波串扰。我们的第二种设计通过添加接地屏蔽并使用曲折电感的双绕组几何结构来消除此问题，以允许具有相反极性的导体非常接近。此外，谐振器频率在整个阵列上以棋盘图案分布。我们提出的两个谐振器和阵列设计的细节，并描述了一个电路模型的全阵列，预测谐振器的频率和串扰水平的分布。我们还展示了一种新的实验技术，方便地测量串扰，而无需光学设置的结果。我们的研究结果表明，在串扰从57%，在初始设计下降到\leq 2%，在第二个设计的改善。在这项工作中的一般程序和设计准则是适用于未来的大型阵列采用微波谐振器。
英文摘要：
Large-scale arrays of Microwave Kinetic Inductance Detectors (MKIDs) are attractive candidates for use in imaging instruments for next generation submillimeter-wave telescopes such as CCAT. We have designed and fabricated tightly packed ~250-pixel MKID arrays using lumped-element resonators etched from a thin layer of superconducting TiNx deposited on a silicon substrate. The high pixel packing density in our initial design resulted in large microwave crosstalk due to electromagnetic coupling between the resonators. Our second design eliminates this problem by adding a grounding shield and using a double-wound geometry for the meander inductor to allow conductors with opposite polarity to be in close proximity. In addition, the resonator frequencies are distributed in a checkerboard pattern across the array. We present details for the two resonator and array designs and describe a circuit model for the full array that predicts the distribution of resonator frequencies and the crosstalk level. We also show results from a new experimental technique that conveniently measures crosstalk without the need for an optical setup. Our results reveal an improvement in crosstalk from 57% in the initial design down to \leq 2% in the second design. The general procedure and design guidelines in this work are applicable to future large arrays employing microwave resonators.
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