Metasurfaces, a two-dimensional (2D) form of metamaterials constituted by planar meta-atoms, exhibit exotic abilities to freely tailor electromagnetic (EM) waves. Over the past decade, tunable metasurfaces have come to the frontier in the field of nanophotonics, with tremendous effort focused on developing and integrating various active materials into metasurfaces. As a result, tunable/reconfigurable metasurfaces with multi-functionalities triggered by various external stimuli have been successfully demonstrated, openings a new avenue to dynamically manipulate and control EM waves for photonic applications in demand. In this review, we first brief the progress of tunable metasurfaces development in the last decade and highlight representative works from the perspectives of active materials development, design methodologies and application-driven exploration. Then, we elaborate on the active tuning mechanisms and relevant active materials. Next, we discuss recent achievements in theory as well as machine learning (ML) assisted design methodologies to sustain the development of this field. After that, we summarize and describe typical application areas of the tunable metasurfaces. We conclude this review by analyzing existing challenges and presenting our perspectives on future directions and opportunities in this vibrant and fast-developing field.
Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here, we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (abou…
Molding the flow of light at the nanoscale has been a grand challenge of nanophotonics for decades. It is now widely recognized that metasurfaces represent a chip-scale nanophotonics array technology capable of comprehensively controlling the wavefront of light via appropriately configuring subwavelength antenna elements. Here, we demonstrate a reconfigurable metasurface that is universal, i.e., notionally capable of providing diverse optical functions in the telecommunication wavelength regime, using a compact, lightweight, electronically-controlled array with no moving parts. By electro-opti…
The advance in designing arrays of ultrathin two-dimensional optical nano-resonators, known as metasurfaces, is currently enabling a large variety of novel flat optical components. The remarkable control over the electromagnetic fields offered by this technology can be further extended to the active regime in order to manipulate the light characteristics in real-time. In this contribution, we couple the excitonic resonance of atomic thin MoS2 monolayers with gap-surface-plasmon (GSP) metasurfaces, and demonstrate selective enhancement of the exciton-plasmon polariton emissions. We further demo…
Wavelength-tunable vortex fiber lasers that could generate beams carrying orbital angular momentum (OAM) hold great interest in large-capacity optical communications. The wavelength tunability of conventional vortex fiber lasers is however limited by the range of 35 nm due to narrow bandwidth and/or insertion loss of mode conversion components. Optical metasurfaces apart from being compact planar components can flexibly manipulate light with high efficiency in a broad wavelength range. Here, we propose and demonstrate for the first time, to the best of our knowledge, a metasurface-assisted vor…
In this study, we demonstrate first, to the best of our knowledge, robust and dynamically polarization-controlled tunable-high-Q PIT in designed nanostructures metasurface, whose sharp resonance is guaranteed by design and protected against large geometrical imperfections. By employing the explicit analysis of near-field characteristic in the reciprocal-space based on the momentum matching, and the far-field radiation features with point-scattering approach in real-space sparked from Huygens's principles, the physics of interference resonance in the spectra for plane-wave optical transmission …
Tunable metasurfaces have demonstrated the potential for dramatically enhanced functionality for applications including sensing, ranging and imaging. Liquid crystals (LCs) have fast switching speeds, low cost, and mature technological development, offering a versatile platform for electrical tunability. However, to date, electrically tunable metasurfaces are typically designed at a single operational state using physical intuition, without controlling alternate states and thus leading to limited switching efficiencies ($<30\%$) and small angular steering ($<$25$^\circ$). Here, we use large-sca…
Functional tunability, environmental adaptability, and easy fabrication are highly desired properties in metasurfaces. Here we provide a tunable bilayer metasurface composed of two stacked identical dielectric magnetic mirrors, which are excited by the dominant electric dipole and other magnetic multipoles, exhibiting nonlocal electric field enhancement near the interface and high reflection. Differ from the tunability through the direct superposition of two structures with different functionalities, we achieve the reversible conversion between high reflection and high transmission by manipula…
Tunable focusing is a desired property in a wide range of optical imaging and sensing technologies but has tended to require bulky components which cannot be integrated on-chip and have slow actuation speeds. Recently, integration of metasurfaces into electrostatic MEMS architectures has shown potential to overcome these challenges, but has offered limited out of plane displacement range while requiring large voltages. We demonstrate for the first time a movable metasurface lens actuated by integrated thin-film PZT MEMS, which has the advantage of offering large displacements at low voltages. …
We present an asymmetric bifacial graphene metasurface to realize tunable and broadband coherent perfect absorption (CPA) at terahertz (THz) frequencies. The proposed design is composed of two dissimilar graphene square patch metasurfaces stacked over an ultrathin dielectric substrate. Nonlinear CPA performance without resorting to optical nonlinearities and amplification are demonstrated based on wave interference phenomena taking place along and inside this subwavelength structure. Broadband asymmetric reflection from opposite directions is obtained in the case of single wave illumination. T…
All-dielectric optical metasurfaces can locally control the amplitude and phase of light at the nanoscale, enabling arbitrary wavefront shaping. However, lack of post-fabrication tunability has limited the true potential of metasurfaces for many applications. Here, we utilize a thin liquid crystal (LC) layer as a tunable medium surrounding the metasurface to achieve a phase-only spatial light modulator (SLM) with high reflection in the visible frequency, exhibiting an active and continuous resonance tuning with associated 2pi phase control and uncoupled amplitude. Dynamic wavefront shaping is …
Hyperbolic metasurfaces based on van der Waals (vdW) materials support propagation of extremely anisotropic polaritons towards nanoscale light compression and manipulation, and thus has great potential in the applications of planar hyperlens, nanolasing, quantum optics and ultrasensitive infrared spectroscopy. Two-dimensional hexagonal boron nitride (h-BN) as a vdW metasurface can manipulate the propagation of hyperbolic polaritons at the level of single atomic layers, possessing higher degree of field confinement and lower losses than the conventional media. However, active manipulation of hy…
An invisible cavity is an open resonant device that confines a localized field without producing any scattering outside of the device volume. By exploiting the scatter-less property of such device, it is possible to nest two invisible cavities, as the outer cavity would simply not notice the presence of the inner one, regardless of their relative position. As a result, the position of the inner cavity becomes a means to easily control the field localized inside the cavity and its quality factor. In this paper, we discuss the properties of nested invisible cavities as a simple method to achieve…
We propose a light emitting device with voltage controlled degree of linear polarization of emission. The device combines the ability of metasurfaces to control light with an energy-tunable light source based on indirect excitons in coupled quantum well heterostructures.
An efficient reflective elastic metasurface with tunable focusing point is proposed. The metasurface is based on electric resonators embedded in a stretchable elastic substrate. The focal length is controlled by mean of the stretching applied applied to the sample. The results predicted by theory and numerical simulations are experimentally verified. Our proposal shows that smart engineering elastic metamaterials are an effective platform for new functional devices based on metamaterials.
As two-dimensional metamaterials, metasurfaces open up new avenues for designing static planar optics. However, the dynamic modulation of metasurfaces in the optical band is required for practical applications. The existing dynamic devices rarely utilized the polarization manipulation capability of metasurfaces. Here, we demonstrate an electrically tunable multifunctional metasurface in the visible range by integrating birefringent liquid crystals (LCs) with all-dielectric metasurfaces based on a novel packaging scheme. By combining the helicity-dependent geometric phase of the metasurface and…
Dielectric metasurfaces are two-dimensional structures composed of nano-scatterers that manipulate phase and polarization of optical waves with subwavelength spatial resolution, enabling ultra-thin components for free-space optics. While high performance devices with various functionalities, including some that are difficult to achieve using conventional optical setups have been shown, most demonstrated components have a fixed functionality. Here we demonstrate highly tunable metasurface devices based on subwavelength thick silicon nano-posts encapsulated in a thin transparent elastic polymer.…
Stacked metasurfaces are being investigated in light of exploring exotic optical effects that cannot be achieved with single-layered metasurfaces. In this Letter, we theoretically demonstrate that stacks of metallic wire-grid metasurfaces possessing specific polarization properties have the ability to induce tunable Fano resonances. The developed original model - combining a circulating field approach together with an extended Jones formalism - reveals the underlying principle that gives rise to the polarization-induced Fano resonances. The theoretical frame is validated in an experimental pro…
Tunable optical devices, in particular, varifocal lenses, have important applications in various fields, including imaging and adaptive vision. Recent advances in metasurfaces, which control the wavefront of light using subwavelength-spaced nanostructures, open up new opportunities to replace bulk optical devices, with thin, flat, lightweight devices. We have demonstrated for the first time an electrically tunable flat lens, based on large area metasurfaces combined with a dielectric elastomer actuator having inline transparent electrodes, that is capable of simultaneously performing focal len…
Metasurfaces composed of planar arrays of sub-wavelength artificial structures show promise for extraordinary light manipulation; they have yielded novel ultrathin optical components such as flat lenses, wave plates, holographic surfaces and orbital angular momentum manipulation and detection over a broad range of electromagnetic spectrum. However the optical properties of metasurfaces developed to date do not allow for versatile tunability of reflected or transmitted wave amplitude and phase after fabrication, thus limiting their use in a wide range of applications. Here, we experimentally de…
Rapidly developing augmented reality (AR) and 3D holographic display technologies require spatial light modulators (SLM) with high resolution and viewing angle to be able to satisfy increasing customer demands. Currently available SLMs, as well as their performance, are limited by their large pixel sizes of the order of several micrometres. Further pixel size miniaturization has been stagnant due to the persistent challenge to reduce the inter-pixel crosstalk associated with the liquid crystal (LC) cell thickness, which has to be large enough to accumulate the required 2π phase difference. Her…
Efficient hybrid plasmonic-photonic metasurfaces that simultaneously take advantage of the potential of both pure metallic and all-dielectric nanoantennas are identified as an emerging technology in flat optics. Nevertheless, post-fabrication tunable hybrid metasurfaces are still elusive. Here, we present a reconfigurable hybrid metasurface platform by incorporating the phase-change material Ge$_{2}$Sb$_{2}$Te$_{5}$ (GST) into metal-dielectric meta-atoms for active and non-volatile tuning of properties of light. We systematically design a reduced-dimension meta-atom, which selectively controls…
We theoretically demonstrate mechanical tuning of the spectral response of a Mie-like resonant dielectric metasurface consisting of crossed all-dielectric strip gratings. We use two array of parallel dielectric strips superimposed on each other to mechanically alter the crossing angle between them thereby changing the position of the maximum of the spectral response in a wide frequency range. The metasurface structure is considered as a doubly-periodic system in an oblique mesh. This mechanically controllable metasurface can be perspective in developing of a flexible polarization-sensitive opt…
The ability of phase-change materials to reversibly and rapidly switch between two stable phases has driven their use in a number of applications such as data storage and optical modulators. Incorporating such materials into metasurfaces enables new approaches to the control of optical fields. In this article we present the design of novel switchable metasurfaces that enable the control of the nonclassical two-photon quantum interference. These structures require no static power consumption, operate at room temperature, and have high switching speed. For the first adaptive metasurface presente…
Dynamic radiative cooling attracts fast-increasing interest due to its adaptability to changing environment and promises for more energy-savings than the static counterpart. Here we demonstrate enhanced infrared emission by thermally switching the excitation of magnetic polariton with microstructured vanadium dioxide (VO2) metasurfaces fabricated via scalable and etch-free processes. Temperature-dependent infrared spectroscopy clearly shows that the spectral emittance of fabricated tunable metasurfaces at wavelengths from 2 to 6 um is significantly enhanced when heated beyond its phase transit…
Nonlinear light sources are central to a myriad of applications, driving a quest for their miniaturisation down to the nanoscale. In this quest, nonlinear metasurfaces hold a great promise, as they enhance nonlinear effects through their resonant photonic environment and high refractive index, such as in high-index dielectric metasurfaces. However, despite the sub-diffractive operation of dielectric metasurfaces at the fundamental wave, this condition is not fulfilled for the nonlinearly generated harmonic waves, thereby all nonlinear metasurfaces to date emit multiple diffractive beams. Here,…
Metasurfaces are ultrathin nanostructured surfaces that can allow arbitrary manipulation of light. Implementing dynamic tunability into their design could allow the optical functions of metasurfaces to be rapidly modified at will. The most pronounced and robust tunability of optical properties is provided by phase-change materials such as vanadium dioxide (VO2) and germanium antimony telluride (GST), but their implementations have been limited only to near-infrared wavelengths. Here, we demonstrate that VO2 nanoantennas with widely tunable Mie resonances can be utilized for designing tunable m…
Substrate-engineered tunable bound states in the continuum and directional radiation in dielectric metasurfaces
Neijiang Normal University（内江师范学院）；Neijiang Optoelectronic Devices Engineering Research Center（内江光电器件工程研究中心）；Shenzhen University（深圳大学）；Great Bay University（大湾区大学）；Chongqing University（重庆大学）
We present a graphene-based metasurface that can be actively tuned between different regimes of operation, such as anomalous beam steering and focusing, cloaking and illusion optics, by applying electrostatic gating without modifying the geometry of the metasurface. The metasurface is designed by placing graphene nano-ribbons (GNRs) on a dielectric cavity resonator, where interplay between geometric plasmon resonances in the ribbons and Fabry-Perot resonances in the cavity is used to achieve 2$π$ phase shift. As a proof of the concept, we demonstrate that wavefront of the field reflected from …
Metasurfaces with tunable spatial phase functions could benefit numerous applications. Currently, most approaches to tuning rely on mechanical stretching which cannot control phase locally, or by modulating the refractive index to exploit rapid phase changes with the drawback of also modulating amplitude. Here, we propose a method to realize phase modulation at subwavelength length scales while maintaining unity amplitude. Our device is inspired by an asymmetric Fabry-Perot resonator, with pixels comprising a scattering nanopost on top of a distributed Bragg reflector, capable of providing a n…
Dynamically Tunable Membrane Metasurfaces for Infrared Spectroscopy
University of Wisconsin-Madison（威斯康星大学麦迪逊分校）；Istanbul University（伊斯坦布尔大学）；Argonne National Laboratory（阿贡国家实验室）；Australian National University（澳大利亚国立大学）
Achieving an electrically tunable phased array optical antenna surface has been a principal challenge in the field of metasurfaces. In this letter, we demonstrate a device platform for achieving reconfigurable control over the resonant wavelength of a subwavelength optical antenna through free-carrier injection. We engineer and grow, using molecular beam epitaxy, a heterostructure of In1-xAlxAs/InAs/AlyGa1-ySb layers designed to achieve large amplitude and phase modulation of light by maximizing the refractive index change in regions of resonant field enhancement The p-i-n layers are grown on …
Emerging immersive visual communication technologies require light sources with complex functionality for dynamic control of polarization, directivity, wavefront, spectrum, and intensity of light. Currently, this is mostly achieved by free space bulk optic elements, limiting the adoption of these technologies. Flat optics based on artificially structured metasurfaces that operate at the sub-wavelength scale are a viable solution, however their integration into electrically driven devices remains challenging. Here we demonstrate a radically new approach of monolithic integration of a dielectric…
All-dielectric metasurfaces provide unique solutions for advanced wavefront manipulation of light with complete control of amplitude and phase at sub-wavelength scales. One limitation, however, for most of these devices is the lack of any post-fabrication tunability of their response. To break this limit, a promising approach is employing phase-change-materials (PCM), which provide a fast, low energy and non-volatile means to endow metasurfaces with a switching mechanism. In this regard, great advancements have been done in the mid infrared and near infrared spectrum using different chalcogeni…
Second harmonic generation (SHG) is a coherent nonlinear phenomenon that plays an important role in laser color conversion. Lithium niobate (LN), which features both a large band gap and outstanding second-order nonlinearities, acts as an important optical material for nonlinear frequency conversion covering a wide spectral range from ultraviolet to mid-infrared. Here we experimentally demonstrate LN metasurfaces with controllable SHG properties. Distinct enhancements for the SHG efficiency are observed at Mie-resonances. And by changing the geometric parameters thus the resonances of the meta…
Optical metasurfaces with high-Q chiral resonances can boost light-matter interaction for various applications of chiral response for ultrathin, active, and nonlinear metadevices. Usually, such metasurfaces require sophisticated depth-resolved nanofabrication to realize subwavelength stereo-nanostructures, posing overwhelming challenges, especially in the short-wavelength range. Here, we suggest a novel planar design for chiral metasurfaces supporting bound states in the continuum (BICs) and demonstrate experimentally chiroptical responses with record-high Q-factors (Q=390) and near-perfect ci…
We experimentally demonstrate fabrication of tunable high contrast periodic fishnet metasurfaces with 3 um period on 200 nm thick Ge2Sb2Te5 films sputted onto glass and sapphire substrates using direct laser writing technique. We find that the use of sapphire substrate provides better accuracy of metasurface segments due to high thermal conductivity. The advantages of the demonstrated method consist in its simplicity, rapidity, robustness, and the ability of tuning of fabricated structures. This is of crucial importance for the creation of robust and tunable metasurfaces for applications in th…
Controlling the phase and amplitude of light emitted by the elements (i.e., pixels) of an optical phased array is of paramount importance to realizing dynamic beam steering for LIDAR applications. In this paper, we propose a plasmonic pixel composed of a metallic nanoantenna covered by a thin oxide layer, and a conductive oxide, e.g., ITO, for use in a reflectarray metasurface. By considering voltage biasing of the nanoantenna via metallic connectors, and exploiting the carrier refraction effect in the metal-oxide-semiconductor capacitor in the accumulation and depletion regions, our simulatio…
