Active metasurfaces, which are arrays of actively tunable resonant elements, can dynamically control the wavefront of the scattered light at a subwavelength scale. To date, most active metasurfaces that enable dynamic wavefront shaping operate in reflection. On the other hand, active metasurfaces operating in transmission are of considerable interest as they can readily be integrated with chip-scale light sources, yielding ultra-compact wavefront shaping devices. Here, we report designs for all-dielectric low-loss active metasurfaces which can dynamically manipulate the transmitted light wavefront in the near-infrared wavelength range. Our active metasurfaces feature an array of amorphous silicon (a-Si) pillars on a silica substate, which support resonances with quality factors (Q-factors) as high as 9800, as well as other lower-Q resonances. First, we demonstrate that high-Q resonance dips observed in transmission can be transformed into a transmission resonance peak by positioning a-Si pillar resonators at a prescribed distance from a crystalline Si substrate, defined by a silica spacer layer. Next, we report the design of metasurface geometry with realistic interconnect architectures that enable thermo-optic dynamic beam switching with switching times as low as 7.3 μs. Beam switching is observed for refractive index differences between neighboring metasurface elements as low as 0.0026. Finally, we demonstrate that metasurface structures with both high-Q and lower-Q modes and realistic interconnect architectures can be used for dynamic beam steering.
Compact, lightweight and high-performance spatial light modulators (SLMs) are crucial for modern optical technologies. The drive for pixel miniaturization, necessary to improve their performance, has led to a promising alternative, active optical metasurfaces, which enable tunable subwavelength wavefront manipulation. Here, we demonstrate an all-solid-state programmable transmissive SLM device based on Huygens dielectric metasurfaces. The metasurface features electrical tunability, provided by mature liquid crystals (LCs) technology. In contrast to conventional LC SLMs, our device enables high…
Rapidly developing augmented reality (AR) and 3D holographic display technologies require spatial light modulators (SLM) with high resolution and viewing angle to be able to satisfy increasing customer demands. Currently available SLMs, as well as their performance, are limited by their large pixel sizes of the order of several micrometres. Further pixel size miniaturization has been stagnant due to the persistent challenge to reduce the inter-pixel crosstalk associated with the liquid crystal (LC) cell thickness, which has to be large enough to accumulate the required 2π phase difference. Her…
With the rapid advances of functional dielectric metasurfaces and their integration on on-chip nanophotonic devices, the necessity of metasurfaces working in different environments, especially in biological applications, arose. However, the metasurfaces' performance is tied to the unit cell's efficiency and ultimately the surrounding environment it was designed for, thus reducing its applicability if exposed to altering refractive index media. Here, we report a method to increase a metasurface's versatility by covering the high-index metasurface with a low index porous SiO$_2$ film, protecting…
This paper presents an end-to-end design method for the synthesis of dielectric metasurfaces with modulated thickness that are able to realize desired radiation patterns in the far-field with high precision. The method relies on integral equations and the Method of Moments to calculate the induced surface and volumetric current densities throughout the metasurface upon a given incident illumination. By avoiding homogenization of the dielectric layer and calculating directly the scattered fields through the Method of Moments, the near-field and far-field response of the metasurface can be accur…
Metasurfaces have attracted a great deal of attention from researchers due to their prominent optical properties. In particular, metasurfaces may consist of structures possessing optical anapole resonances with strong field confinement and substantially suppressed scattering. As a result, such nanostructures display enhanced nonlinear optical properties. In this paper by means of three-dimensional finite-difference time-domain simulations, the ability of anapole modes in high-index dielectric metasurfaces with circular nanopores is shown. In the vicinity of the anapole state, the effective opt…
Effective refractive index of disordered all-dielectric metasurfaces consisting of gallium phosphide (GaP) spheres is studied by means of three-dimensional finite-difference time-domain (FDTD) simulations at the wavelength of 532~nm. It is shown that a mixture of the high index nanoparticles with sizes close to the first magnetic and electric resonances randomly dispersed on metasurface may possess negative refraction. The dependence of the metasurface effective refractive index on the nanoparticle concentration and size is constructed. The feasibility of negative refraction at large concentra…
Dielectric metasurfaces provide a unique platform for efficient harmonic generation and optical wavefront manipulation at the nanoscale. Tailoring phase and amplitude of a nonlinearly generated wave with a high emission efficiency using resonance-based metasurfaces is a challenging task which often requires state-of-the-art numerical methods. Here, we propose a simple yet effective approach combining a sampling method with a Monte Carlo approach to design the third-harmonic wavefront generated by all-dielectric metasurfaces composed of elliptical silicon nanodisks. Using this approach, we demo…
All-dielectric metasurfaces exhibit exotic electromagnetic responses, similar to those obtained with metal-based metamaterials. Research in all-dielectric metasurfaces currently uses relatively simple unit-cell designs, but increased geometrical complexity may yield even greater scattering states. Although machine learning has recently been applied to the design of metasurfaces with impressive results, the much more challenging task of finding a geometry that yields the desired spectra remains largely unsolved. We explore and adapt a recent deep learning approach -- termed neural-adjoint -- an…
We demonstrate a fiber-integrated Fabry-Pérot cavity formed by attaching a pair of dielectric metasurfaces to the ends of a hollow-core photonic-crystal fiber segment. The metasurfaces consist of perforated membranes designed as photonic-crystal slabs that act as planar mirrors but can potentially allow injection of gases through their holes into the hollow core of the fiber. We have so far observed cavities with finesse of ~11 and Q factors of ~$4.5 \times 10^5$, but much higher values should be achievable with improved fabrication procedures. We expect this device to enable development of ne…
Plasmonic nanostructures with large local field enhancement have been extensively investigated for sensing applications. However, the quality factor and thus the sensing figure of merit are limited due to relatively high ohmic loss. Here we propose a novel plasmonic sensor with ultrahigh figure of merit based on super-narrow Rayleigh anomaly (RA) in a mirror-backed dielectric metasurface. Simulation results show that the RA in such a metasurface can have a super-high quality factor of 16000 in the visible regime, which is an order of magnitude larger than the highest value of reported plasmoni…
Hybrid dielectric metasurfaces have emerged as a promising approach to enhancing near field confinement and thus achieving high optical nonlinearity using low loss dielectrics. Additional flexibility in design and fabrication of hybrid metasurfaces allows dynamic control of light, which is value-added for a wider range of applications. Here, we demonstrate a tunable and efficient third harmonic generation (THG) via hybrid metasurfaces with phase change material Ge2Sb2Te5 (GST) deposited on top of amorphous silicon nanostructutes. Fano resonance is excited to confine the incident light inside t…
The optical Kerr effect of material with negative refraction is estimated for the first time. This is done via three-dimensional finite-difference time-domain (FDTD) simulations of disordered bidisperse metasurfaces consisting of high index (GaP) spheres at the wavelength of 532~nm. The metasurfaces comprise spherical particles randomly arranged on plane having two sizes close to the magnetic and electric dipole Mie resonances. The real part of the effective nonlinear refractive index of the metasurfaces is computed in the vicinity of the Mie resonances where the metasurface possesses the nega…
An all-dielectric metasurface featuring resonant conditions of the trapped mode excitation is considered. It is composed of a lattice of subwavelength particles which are made of a high-refractive-index dielectric material structured in the form of disks. Each particle within the lattice behaves as an individual dielectric resonator supporting a set of electric and magnetic (Mie-type) modes. In order to access a trapped mode (which is the TE01 mode of the resonator), a round eccentric penetrating hole is made in the disk. In the lattice, the disks are arranged into clusters (unit super-cells) …
Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here, we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (abou…
In order to construct a dielectric analog of spaser, we study theoretically and experimentally several configurations of cluster-based unit cells for an all-dielectric metasurface characterized by resonant conditions of the trapped mode excitation. Excitation of the trapped mode is realized by either specific displacement of particles in the cluster, or perturbation of the equidistantly spaced particles by off-centered round holes or coaxial-sector notches. It turns out that the latter approach is more advantageous for enhancement of electric near-field with homogeneous distribution in-plane o…
Tunable dielectric meta-surface nanostructures offer incredible performance in optical application due to their extraordinary tunability of the polarization and engineering the dispersion of light with low loss in infrared range. In this article, we designed and experimentally measured the tunability of all-dielectric subwavelength silicon nanoparticles with the help of the temperature-based refractive index of the liquid crystal in the telecom regime. The proposed structure composed of high dielectric nanodisk surrounded by nematic liquid crystal (NLC) is simulated with numerical software, as…
Functional tunability, environmental adaptability, and easy fabrication are highly desired properties in metasurfaces. Here we provide a tunable bilayer metasurface composed of two stacked identical dielectric magnetic mirrors, which are excited by the dominant electric dipole and other magnetic multipoles, exhibiting nonlocal electric field enhancement near the interface and high reflection. Differ from the tunability through the direct superposition of two structures with different functionalities, we achieve the reversible conversion between high reflection and high transmission by manipula…
Metasurfaces composed of subwavelength unit cells usually require a large number of unit cells which leads to complicated design and optimization. Aggressive discretization in a metasurface can significantly reduce the number of unit cells within a period, resulting in lower requirement for phase and/or surface impedance coverage. Additionally, the enlarged unit cells will encounter negligible mutual couplings when combined together, hence making straightforward the process of metasurface design. These advantages combine to allow the design of a novel class of metasurfaces which support the hi…
Metasurfaces are engineered thin surfaces comprising two dimensional (2D) arrays of sub-wavelength spaced and sub-wavelength sized resonators. Metasurfaces can locally manipulate the amplitude, phase and polarization of light with high spatial resolution. In this study, we report numerical and experimental results of a vortex-beam-generating metasurface fabricated specifically for infrared (IR) and terahertz (THz) wavelengths. The designed metasurface consisted of a 2D array of dielectric cross-shaped resonators with spatially varying length, thereby providing desired spatially varying phase s…
We study the resonant enhancement of linear and nonlinear chiroptical effects in asymmetric silicon metasurfaces supporting multipolar Mie resonances and quasi-bound states in the continuum (quasi-BICs). We demonstrate theoretically and observe in experiment the pronounced linear circular dichroism at the quasi-BIC resonances. We further find that both local field enhancement and third-harmonic signal are large for Mie resonances and some quasi-BIC modes. We explain the selectivity of the nonlinear enhancement by employing the concept of critical coupling being more favorable for the modes wit…
Herein, we discuss the conditions for excitation of symmetry-protected toroidal dipole modes in all-dielectric metasurfaces composed of trimer or twin-trimer clusters of dielectric disks. Such metasurfaces permit enhanced light-matter interaction due to spatially confined light in resonant systems with a high-quality factor. To describe characteristics of toroidal modes existing in the clusters, we use the magnetic dipole moments approximation, group-theoretical methods, group representation theory, symmetry-adapted linear combination method, and circuit theory. To validate the obtained theore…
Tunable focusing is a desired property in a wide range of optical imaging and sensing technologies but has tended to require bulky components which cannot be integrated on-chip and have slow actuation speeds. Recently, integration of metasurfaces into electrostatic MEMS architectures has shown potential to overcome these challenges, but has offered limited out of plane displacement range while requiring large voltages. We demonstrate for the first time a movable metasurface lens actuated by integrated thin-film PZT MEMS, which has the advantage of offering large displacements at low voltages. …
Fingerprint spectral response of several materials with terahertz electromagnetic radiation indicates that terahertz technology is an effective tool for sensing applications. However, sensing few nanometer thin-film of dielectrics with much longer terahertz waves (1 THz = 0.3 mm) is challenging. Here, we demonstrate a quasi-bound state in the continuum (BIC) resonance for sensing of nanometer scale thin analyte deposited on a flexible metasurface. The large sensitivity originates from strong local field confinement of the quasi-BIC Fano resonance state and extremely low absorption loss of a lo…
The strong interaction of light with micro- and nanostructures plays a critical role in optical sensing, nonlinear optics, active optical devices, and quantum optics. However, for wavefront shaping, the required local control over light at a subwavelength scale limits this interaction, typically leading to low-quality-factor optical devices. Here, we demonstrate an avenue towards high-quality-factor wavefront shaping in two spatial dimensions based on all-dielectric Huygens metasurfaces by leveraging higher-order Mie resonances. We design and experimentally realize transmissive band stop filte…
Digital imaging has been steadily improving over the past decades and we are moving towards a wide use of multi- and hyperspectral cameras. A key component of such imaging systems are color filter arrays, which define the spectrum of light detected by each camera pixel. Hence, it is essential to develop a variable, robust and scalable way for controlling the transmission of light. Nanostructured surfaces, also known as metasurfaces, offer a promising solution as their transmission spectra can be controlled by shaping the wavelength-dependent scattering properties of their constituting elements…
Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort ($\leq$ 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface…
Artificial magnetism at optical frequencies can be realized in metamaterials composed of periodic arrays of subwavelength elements, also called "meta-atoms". Optically-induced magnetic moments can be arranged in both unstaggered structures, naturally associated with ferromagnetic (FM) order, or staggered structures, linked correspondingly to antiferromagnetic (AFM) order. Here we demonstrate that such magnetic dipole orders of the lattices of meta-atoms can appear in low-symmetry Mie-resonant metasurfaces where each asymmetric dielectric (non-magnetic) meta-atom supports a localized trapped mo…
The breaking of Lorentz reciprocity law is a non-trivial task, since it usually requires bulky magnets or complicated time-modulation dynamic techniques to be accomplished. In this work, we present a simple and compact design of a nonlinear bifacial dielectric metasurface to achieve strong self-induced passive nonreciprocal transmission without the use of external biases. The proposed design is ideal for free space optics applications, can operate under both incident polarizations, and require very low input excitation power to reach the nonreciprocal regime. It is composed of two passive sili…
Electromagnetic waves carrying orbital angular momentum (OAM) have found many applications. This work reports a broadband millimeter wave OAM generator applying a dielectric metasurface with high-refractive-index dielectric elements distributed on a low-refractive-index substrate. Proper adjustment of the dimensions of the dielectric elements can make a broadband OAM generator from 53 to 70 GHz. OAM generators with different mode numbers are designed and validated by simulation. Such structures can find potential applications in high-capacity communications and imaging.
We propose a novel class of ultrathin high Q passband filters designed by properly combining different multipolar resonances sustained by an all dielectric metasurface. A rigorous analytical model, based on surface impedance homogenization and accounting for the effects of both dipolar and the quadrupolar contributions to the overall scattering response, is derived and verified through numerical simulations. Then, it is described how it is possible to engineer the interactions between dipoles and quadrupoles in a metasurface made by core shell spherical elements to design ultrathin and broadba…
We present the study of bound surface modes sustained at the termination of truncated bulk dielectric photonic crystals and isolated metasurfaces of dielectric meta-atoms. We discuss the origins of bound modes in the two systems and their relation. For both systems, we theoretically study and experimentally demonstrate wavefront manipulation, in particular directional emission, frequency splitting and beam collimation achieved by coupling of the bound states to radiation modes through leaky wave radiation mechanism using properly designed scattering gratings.
Metasurfaces possess the outstanding ability to tailor phase, amplitude and even spectral responses of light with an unprecedented ultrahigh resolution, thus have attracted significant interests. Here, we propose and experimentally demonstrate a novel meta-device that integrates color printing and computer-generated holograms within a single-layer dielectric metasurface by modulating spectral and spatial responses at subwavelength scale, simultaneously. In our design, such metasurface appears as a microscopic color image under white light illumination, while encrypting two different holographi…
Printed circuit metasurfaces have attracted significant attention in the microwave community for their versatile wavefront manipulation capability. Despite their promising potential in telecommunications and radar applications, few transmissive metasurfaces have been reported operating at millimeter-wave frequencies. Several secondary effects including fabrication tolerances, interlayer near-field coupling and the roughness of conductors are more severe at such high frequencies and can cause significant performance degradation. Additionally, very accurate experimental techniques are required i…
The polarization state of light is a key parameter in many imaging systems. For example, it can image mechanical stress and other physical properties that are not seen with conventional imaging, and can also play a central role in quantum sensing. However, polarization is more difficult to image and polarimetry typically involves several independent measurements with moving parts in the measurement device. Metasurfaces with interleaved designs have demonstrated sensitivity to either linear or circular/elliptical polarization states. Here we present an all-dielectric meta-polarimeter for direct…
A new class of phenomena stemming from topological states of quantum matter has recently found a variety of analogies in classical systems. Spin-locking and one-way propagation have been shown to drastically alter our view on scattering of electromagnetic waves, thus offering an unprecedented robustness to defects and disorder. Despite these successes, bringing these new ideas to practical grounds meets a number of serious limitations. In photonics, when it is crucial to implement topological photonic devices on a chip, two major challenges are associated with electromagnetic dissipation into …
Machine learning methods have found novel application areas in various disciplines as they offer low-computational cost solutions to complex problems. Recently, metasurface design has joined among these applications, and neural networks enabled significant improvements within a short period of time. However, there are still outstanding challenges that needs to be overcome. Here, we propose a data pre-processing approach based on the governing laws of the physical problem to eliminate dimensional mismatch between high dimensional optical response and low dimensional feature space of metasurface…
