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arXiv 2201.07551cond-mat.mes-hallphysics.app-ph
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用于超高压传感的弹道石墨烯阵列

Ballistic graphene array for ultra-high pressure sensing

Abhinaba Sinha, Pankaj Priyadarshi, Bhaskaran Muralidharan

AI总结:

针对石墨烯压阻效应限制压力灵敏度的问题,本研究通过薄膜理论证实微型化可提升性能,提出的弹道石墨烯传感器阵列可测10^9Pa超高压,单位面积灵敏度更高,可用于下一代NEMS压力传感器。

摘要:

原子级薄的二维材料(如石墨烯)因具有高表体比和优异的力学性能,与商用压力传感器相比展现出极高的压力灵敏度。但与其他二维材料相比,石墨烯在不同输运机制下的压阻效应更小,限制了其压力灵敏度。我们利用薄膜理论和薄膜粘附模型,证明微型化是提升石墨烯压力传感器整体性能的有效途径。研究结果表明,弹道石墨烯可用于测量10^9 Pa的超高压,其单位面积灵敏度比准弹道石墨烯、扩散型石墨烯以及过渡金属二硫化物薄层高出数倍。基于这些发现,我们提出了一种具有极高压力灵敏度和超高压测量范围的弹道石墨烯传感器阵列,将在下一代NEMS(纳机电系统)压力传感器中得到应用。通过减小石墨烯薄膜的尺寸并增加阵列中的传感器数量,可进一步提升阵列传感器的性能参数。本文提出的方法可用于探索其他二维材料的类似应用。

英文摘要:

Atomically thin two-dimensional materials such as graphene exhibit extremely high-pressure sensitivity compared to the commercially used pressure sensors due to their high surface-to-volume ratio and excellent mechanical properties. The smaller piezoresistance of graphene across different transport regimes limits its pressure sensitivity compared to other two-dimensional materials. Using membrane theory and thin-film adhesivity model, we show miniaturization as means to enhance theoverall performance of graphene pressure sensors. Our findings reveal that ballistic graphene canbe configured to measure ultra-high pressure (10^9 Pa) with many-fold higher sensitivity per unit area than quasi-ballistic graphene, diffusive graphene, and thin layers of transition metal dichalcogenides. Based on these findings, we propose an array of ballistic graphene sensors with extremely high-pressure sensitivity and ultra high-pressure range that will find applications in next-generation NEMS pressure sensors. The performance parameters of the array sensors can be further enhancedby reducing the size of graphene membranes and increasing the number of sensors in the array. The methodology developed in this paper can be used to explore similar applications using other two-dimensional materials.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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