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arXiv 2112.09615cond-mat.softmath.OC
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一种求解嵌段共聚物定向自组装反问题的非参数形状优化方法

A non-parametric shape optimization approach for solving inverse problems in directed self-assembly of block copolymers

Daniil Bochkov, Frederic Gibou

摘要:

在这项工作中,我们考虑的逆问题,找到引导图案的形状,导致所需的自组装形态的嵌段共聚物熔体。具体而言,我们使用自洽场论建模聚合物自组装,并在非参数设置中导出所需和实际形态之间的失配对引导图案形状中的任意扰动的灵敏度。所获得的灵敏度用于优化的限制图案形状,使得期望的和实际的形态之间的失配最小化。所提出的算法的效率和鲁棒性证明了一些例子模板垂直互连访问。

英文摘要:

In this work we consider the inverse problem of finding guiding pattern shapes that result in desired self-assembly morphologies of block copolymer melts. Specifically, we model polymer self-assembly using Self-Consistent Field Theory and derive in a non-parametric setting the sensitivity of the misfit between desired and actual morphologies to arbitrary perturbations in the guiding pattern shape. The obtained sensitivities are used for optimization of the confining pattern shapes such that the misfit between desired and actual morphologies is minimized. The efficiency and robustness of the proposed algorithm is demonstrated on a number of examples related to templating Vertical Interconnect Accesses.

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