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arXiv 2111.00366cond-mat.mtrl-sci
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成分梯度和均匀Fe-Pt薄膜的高放热研究

A High Throughput Study of both Compositionally Graded and Homogeneous Fe-Pt Thin Films

Yuan Hong, Isabelle de Moraes, Gabriel Gomez Eslava, Stephane Grenier, Edith Bellet-Amalric, Andre Dias, Marlio Bonfim, Laurent Ranno, Thibaut Devillers, Nora M. Dempsey

摘要:

用磁控溅射法在100 mm厚的Si基片上制备了成分梯度的Fe-Pt薄膜。能量色散X射线分析被用来映射在整个基板上的膜组成的变化,作为Pt片的大小的函数。利用扫描极化磁光克尔效应系统研究了薄膜的组成和沉积后退火条件(温度和时间)对薄膜磁性的影响。以这种方式,可以以高产量的方式建立所使用的溅射系统可实现的最大介电常数。的演变与组成的结晶度与形成的L10 FePt和其晶格参数的变化,通过扫描X-射线衍射测定。然后对不同退火条件下处理的不同组分的均匀Fe-Pt薄膜进行高通量的磁性映射。这项研究作为一个步骤的强制性FePt膜集成到集体制造的设备。

英文摘要:

Compositionally graded Fe-Pt thin films were prepared on stationary 100 mm Si substrates by magnetron sputtering a base target of Fe on which a piece of Pt is asymmetrically positioned. Energy Dispersive X-Ray analysis was used to map the variation in film composition across the substrate, as a function of the size of the Pt piece. A scanning polar Magneto-Optical-Kerr-Effect system was used to probe the influence of composition and post-deposition annealing conditions (temperature and time) on coercivity. In this way the maximum coercivity achievable for the sputtering system used could be established in a high throughput fashion. The evolution in coercivity with composition was correlated with the formation of L10 FePt and changes in its lattice parameters, as determined by scanning X-ray diffraction. High throughput coercivity mapping was then carried out on homogeneous Fe-Pt thin films of different composition treated to different annealing conditions. This study serves as a step towards the integration of coercive FePt films into collectively fabricated devices.

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