Si中0.3 - 1.2 MeV/u质子和α粒子的阻止
Stopping of 0.3 - 1.2 MeV/u protons and alpha particles in Si
摘要：
用卢瑟福背散射谱仪（RBS）测量了SIMOX靶在0.3- 1.2MeV/u速度范围内质子和α粒子对硅的阻止截面S（E），着重于实验方面。使用同时耦合两个固态Si检测器的检测几何结构来测量散射离子的能量并确定其在停止介质内的能量损失，所述两个固态Si检测器相对于入射束方向的每一侧以165度和150度放置。以这种方式，对于给定入射能量E0，在Si-SiO2界面处的基本能量参数Ex对于在两个方向上从Si和O靶元素背散射的离子是相同的，并且主要源自靶厚度的S（E）数据中的系统不确定性被显著地最小化。一个强大的计算机代码已经制定了提取相关的S（E）的实验数据和相关的总体不确定度，总额小于3%。测量的S（E）数据集与H。保罗汇编并用SRIM 06计算数值的计算机代码.在4 He+离子的情况下，γ-有效电荷参数的实验数据已经推导出通过缩放测量的停止截面的质子以相同的速度穿过相同的目标，并比较SRIM 06代码的预测。据发现，由后者代码产生的伽马参数值略有偏离实验的速度区域周围的停止截面最大的地方，通常发生强电荷交换。
英文摘要：
The stopping cross sections S (E) of silicon for protons and alpha particles have been measured over the velocity range 0.3-1.2 MeV/u from a SIMOX target using the Rutherford Backscattering Spectrometry (RBS) with special emphasis put on experimental aspects. A detection geometry coupling simultaneously two solid-state Si detectors placed at 165 degrees and 150 degrees relative to each side of the incident beam direction was used to measure the energies of the scattered ions and determine their energy losses within the stopping medium. In this way, the basic energy parameter, Ex, at the Si-SiO2 interface for a given incident energy E0 is the same for ions backscattered in the two directions off both the Si and O target elements, and systematic uncertainties in the S (E) data mainly originating from the target thickness are significantly minimized. A powerful computer code has been elaborated for extracting the relevant S (E) experimental data and the associated overall uncertainty that amounts to less than 3%. The measured S (E) data sets were found to be in fair agreement with H. Paul compilation and with values calculated by the SRIM 06 computer code. In the case of 4He+ ions, experimental data for the gamma-effective charge parameter have been deduced via scaling the measured stopping cross sections to those for protons crossing the same target at the same velocity and compared to the predictions of the SRIM 06 code. It is found that the gamma-parameter values generated by the latter code slightly deviate from experiment over the velocity region around the stopping cross section maximum where strong charge exchanges usually occur.
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