arXiv 2109.094982021-09-16physics.app-phphysics.optics

微机械谐振器中连续介质中束缚态的观测

Observation of bound states in the continuum in a micromechanical resonator

Yue Yu, Xiang Xi, Xiankai Sun

摘要：

连续束缚态（BIC）是指即使位于连续能谱中，也具有本征零耗散损耗的物理状态。BIC在光学和声学结构中得到了广泛的研究，并在传感和激光方面得到了应用。在微机械结构中实现BIC具有重要的基础研究和工程应用价值。在这里，我们制作，与CMOS兼容的工艺在硅芯片上，一个轮形的微机械谐振器，在其中，我们实验观察到的BIC在微机械域。这种BIC是由于在方位对称性破缺的情况下机械结构的两个耗散模式之间的相消干涉而产生的。这些BIC被发现是强大的对耗散通道的大小变化。所展示的机械BIC可以通过大而坚固的支撑结构获得，这大大降低了器件制造难度，并允许其在更广泛的应用领域的多功能环境中操作。我们的研究结果开辟了一种新的方式，声子捕获在微机械结构的耗散通道，并产生长的声子寿命，在许多机械应用，如机械振荡器，传感器，和量子信息处理器所需的。

英文摘要：

Bound states in the continuum (BICs) refer to physical states that possess intrinsic zero dissipation loss even though they are located in the continuous energy spectrum. BICs have been widely explored in optical and acoustic structures, leading to applications in sensing and lasing. Realizing BICs in micromechanical structures is of significant importance for both fundamental research and engineering applications. Here, we fabricated, with CMOS-compatible processes on a silicon chip, a wheel-shaped micromechanical resonator, in which we experimentally observed the BIC in the micromechanical domain. Such BICs result from destructive interference between two dissipative modes of the mechanical structure under broken azimuthal symmetry. These BICs are found to be robust against size variations of the dissipation channels. The demonstrated mechanical BIC can be obtained with a large and robust supporting structure, which substantially reduces device fabrication difficulty and allows for its operation in versatile environments for broader application areas. Our results open a new way of phonon trapping in micromechanical structures with dissipation channels, and produce long phonon lifetimes that are desired in many mechanical applications such as mechanical oscillators, sensors, and quantum information processors.

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