正交各向异性超材料薄膜的机械模式工程
Mechanical mode engineering with orthotropic metamaterial membranes
AI总结：
本文通过纳米图案化在氮化硅薄膜中引入人工各向异性弹性，实现机械模式分裂，各向异性达1.568，可用于基础研究和改进传感器。
摘要：
超材料是在与它们相互作用的激发波长相比的小尺度上设计的结构。这些结构表现为人工材料，其性质可以通过设计来选择，模仿甚至超越天然材料，使其成为操纵波系统的典型工具。在这封信中，我们展示了氮化硅薄膜的声学性质如何受到纳米图案化的影响。图案几何形状的不对称程度诱导了人工各向异性弹性，导致原本简并的机械模式分裂。我们引入的人工材料具有最大1.568的Ledbetter-Migliori各向异性，与大多数块体天然晶体相比具有优势。通过图案旋转定义任意不对称轴的额外自由度，我们的方法可用于材料性质的基础研究以及设计基于微机械谐振器的改进型光、质量或加速度传感器。
英文摘要：
Metamaterials are structures engineered at a small scale with respect to the wavelength of the excitations they interact with. These structures behave as artificial materials whose properties can be chosen by design, mocking and even outperforming natural materials and making them the quintessential tool for manipulation of wave systems. In this Letter we show how the acoustic properties of a silicon nitride membrane can be affected by nanopatterning. The degree of asymmetry in the pattern geometry induces an artificial anisotropic elasticity, resulting in the splitting of otherwise degenerate mechanical modes. The artificial material we introduce has a maximum Ledbetter-Migliori anisotropy of 1.568, favorably comparing to most bulk natural crystals. With an additional freedom in defining arbitrary asymmetry axes by pattern rotation, our approach can be useful for fundamental investigation of material properties as well as for devising improved sensors of light, mass or acceleration based on micromechanical resonators.
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