粒子束显微镜中电流变化的抑制
Mitigating Current Variation in Particle Beam Microscopy
摘要：
粒子束显微镜使用带电粒子的扫描束来创建样品的图像，并且当该束电流随时间变化时，图像重建的质量受到影响。无论是传统的重建方法，也不承认时间分辨传感束电流的变化，虽然通过灵敏度分析，我的项目表明，当束电流的变化是可观的，时间分辨传感有显着的改善相比，传统的方法在图像重建质量，特别是均方误差（MSE）。为了更积极地对抗这种未知的变化的射束电流的影响，我的项目进一步侧重于设计一种算法，该算法使用时间分辨传感，在射束电流变化的情况下获得更好的图像重建质量。该算法的工作原理是同时估计未知的射束电流的变化，除了基本的图像，提供了一种替代更传统的方法，利用统计假设的图像内容，而不明确估计的射束电流。使用由于束流变化而导致的过量MSE的概念，该算法平均提供了7倍的改进，这可能导致未来更便宜的设备。除了改进图像估计之外，该算法还提供了一种新颖的束流估计，可能在制造和制造过程中提供更多的控制。
英文摘要：
Particle beam microscopy uses a scanning beam of charged particles to create images of samples, and the quality of image reconstruction suffers when this beam current varies over time. Neither conventional reconstruction methods nor time-resolved sensing acknowledges beam current variation, although through sensitivity analysis, my project demonstrates that when the beam current variation is appreciable, time-resolved sensing has significant improvement compared to conventional methods in terms of image reconstruction quality, specifically mean-squared error (MSE). To more actively combat this unknown varying beam current's effects, my project further focuses on designing an algorithm that uses time-resolved sensing for even better image reconstruction quality in the presence of beam current variation. This algorithm works by simultaneously estimating the unknown beam current variation in addition to the underlying image, offering an alternative to more conventional methods, which exploit statistical assumptions of the image content without explicitly estimating the beam current. Using a concept of excess MSE due to beam current variation, this algorithm provides a factor of 7 improvement on average, which could lead to less expensive equipment in the future. Beyond improving the image estimation, this algorithm offers a novel estimation of the beam current, potentially providing more control in manufacturing and fabrication processes.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
