时间分辨聚焦离子束显微术：建模、估计方法与分析
Time-Resolved Focused Ion Beam Microscopy: Modeling, Estimation Methods, and Analyses
AI总结：
本文针对聚焦离子束显微镜中的源散粒噪声问题，建立连续与离散时间测量模型及估计理论框架，提出新型估计器，并通过模拟证明时间分辨测量可显著提升成像质量。
摘要：
在聚焦离子束（FIB）显微镜中，源粒子与样品的一个小体积相互作用，产生二次电子，这些二次电子被逐像素检测以生成显微图像。入射粒子数量的随机性导致显微图像中出现超出底层粒子-样品相互作用本身变化的过量波动。我们最近证明，对来自单个像素的多次时间分辨测量进行联合处理可以减轻氦离子显微镜中这种源散粒噪声的影响。本文致力于建立一个严格的框架，以理解该方法的潜力。本文引入了具有直接电子检测的FIB显微镜的理想化连续时间和离散时间抽象，以及在这些测量模型下成像性能的估计理论极限。介绍并分析了用于连续时间测量的新型估计器，分析了用于离散时间测量的估计器，并证明随着时间分辨率的提高，这些估计器趋近于其连续时间对应物。模拟的FIB显微镜结果与理论分析一致，并证明时间分辨测量使相对于传统FIB显微成像的实质性改进成为可能。
英文摘要：
In a focused ion beam (FIB) microscope, source particles interact with a small volume of a sample to generate secondary electrons that are detected, pixel by pixel, to produce a micrograph. Randomness of the number of incident particles causes excess variation in the micrograph, beyond the variation in the underlying particle-sample interaction. We recently demonstrated that joint processing of multiple time-resolved measurements from a single pixel can mitigate this effect of source shot noise in helium ion microscopy. This paper is focused on establishing a rigorous framework for understanding the potential for this approach. It introduces idealized continuous- and discrete-time abstractions of FIB microscopy with direct electron detection and estimation-theoretic limits of imaging performance under these measurement models. Novel estimators for use with continuous-time measurements are introduced and analyzed, and estimators for use with discrete-time measurements are analyzed and shown to approach their continuous-time counterparts as time resolution is increased. Simulated FIB microscopy results are consistent with theoretical analyses and demonstrate that substantial improvements over conventional FIB microscopy image formation are made possible by time-resolved measurement.
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