The optical microresonator-based frequency comb (microcomb) provides a versatile platform for nonlinear physics studies and has wide applications ranging from metrology to spectroscopy. Deterministic quantum regime is an unexplored aspect of microcombs, in which unconditional entanglements among hundreds of equidistant frequency modes can serve as critical ingredients to scalable universal quantum computing and quantum networking. Here, we demonstrate a deterministic quantum microcomb in a silica microresonator on a silicon chip. 40 continuous-variable quantum modes, in the form of 20 simultaneously two-mode squeezed comb pairs, are observed within 1 THz optical span at telecommunication wavelengths. A maximum raw squeezing of 1.6 dB is attained. A high-resolution spectroscopy measurement is developed to characterize the frequency equidistance of quantum microcombs. Our demonstration offers the possibility to leverage deterministically generated, frequency multiplexed quantum states and integrated photonics to open up new avenues in fields of spectroscopy, quantum metrology, and scalable quantum information processing.
Photonic chip-based soliton microcombs have shown rapid progress and have already been used in many system-level applications, including coherent communications, astrophysical spectrometer calibration and ultrafast ranging. While there has been substantial progress in realizing soliton microcombs that rely on compact laser diodes, culminating in devices that only utilize a semiconductor amplifier or a self-injection-locked laser as a pump source, accessing and generating single soliton states with electronically detectable line rates from a compact laser module has remained challenging. Here w…
Dissipative solitons formed in Kerr microresonators may enable chip-scale frequency combs for precision optical metrology. Here we explore the creation of an octave-spanning, 15-GHz repetition-rate microcomb suitable for both f-2f self-referencing and optical-frequency comparisons across the near infrared. This is achieved through a simple and reliable approach to deterministically generate, and subsequently frequency stabilize, soliton pulse trains in a silica-disk resonator. Efficient silicon-nitride waveguides provide a supercontinuum spanning 700 to 2100 nm, enabling both offset-frequency …
The generation of dissipative Kerr solitons in optical microresonators has provided a route to compact frequency combs of high repetition rate, which have already been employed for optical frequency synthesizers, ultrafast ranging, coherent telecommunication and dual-comb spectroscopy. Silicon nitride (Si$_3$N$_4$) microresonators are promising for photonic integrated soliton microcombs. Yet to date, soliton formation in Si$_3$N$_4$ microresonators at electronically detectable repetition rates, typically less than 100 GHz, is hindered by the requirement of external power amplifiers, due to the…
We demonstrate polarization multiplexed dissipative Kerr solitons in an on-chip silicon nitride micro-resonator. In our experiment, TE- and TM-polarized soliton can be individually generated and controlled, thanks to their weak mutual interaction as the result of sufficiently different repetition rates and orthogonal polarization states. Furthermore, we find that TE- and TM-polarized solitons usually exhibit uncorrelated time jitters, therefore the frequency and phase coherence between the polarization multiplexed soliton microcombs change dramatically as a function of pump laser parameters, b…
Silicon photonics enables wafer-scale integration of optical functionalities on chip. A silicon-based laser frequency combs could significantly expand the applications of silicon photonics, by providing integrated sources of mutually coherent laser lines for terabit-per-second transceivers, parallel coherent LiDAR, or photonics-assisted signal processing. Here, we report on heterogeneously integrated laser soliton microcombs combining both InP/Si semiconductor lasers and ultralow-loss silicon nitride microresonators on monolithic silicon substrate. Thousands of devices are produced from a sing…
Kerr soliton microcombs have recently emerged as a prominent topic in integrated photonics and enabled new horizons for optical frequency metrology. Kerr soliton microcombs, as its name suggests, are based on the high-order cubic optical nonlinearity. It is desirable to exploit quadratic photonic materials, namely Pockels materials, for soliton generation and on-chip implementation of 1f-2f comb self-referencing. Such quadratically-driven solitons have been theoretically proposed, but have not yet been observed in a nanophotonic platform despite of recent progresses in quadratic comb generatio…
High-speed laser frequency actuation is critical in all applications employing lasers and frequency combs, and is prerequisite for phase locking, frequency stabilization and stability transfer among multiple optical carriers. Soliton microcombs have emerged as chip-scale, broadband and low-power-consumption frequency comb sources.Yet, integrated microcombs relying on thermal heaters for on-chip actuation all exhibit only kilohertz actuation bandwidth. Consequently, high-speed actuation and locking of microcombs have been attained only with off-chip bulk modulators. Here, we present high-speed …
Laser-based range measurement systems (LIDAR) are important in many application areas including autonomous vehicles, robotics, manufacturing, formation-flying of satellites, and basic science. Coherent laser ranging systems using dual frequency combs provide an unprecedented combination of long range, high precision and fast update rate. Here, dual-comb distance measurement using chip-based soliton microcombs is demonstrated. Moreover, the dual frequency combs are generated within a single microresonator as counter-propating solitons using a single pump laser. Time-of-flight measurement with 2…
Spectral domain optical coherence tomography (SD-OCT) is a widely used and minimally invaive technique for bio-medical imaging [1]. SD-OCT typically relies on the use of superluminescent diodes (SLD), which provide a low-noise and broadband optical spectrum. Recent advances in photonic chipscale frequency combs [2, 3] based on soliton formation in photonic integrated microresonators provide an chipscale alternative illumination scheme for SD-OCT. Yet to date, the use of such soliton microcombs in OCT has not yet been analyzed. Here we explore the use of soliton microcombs in spectral domain OC…
Advances in microresonator-based soliton generation promise chip-scale integration of optical frequency comb for applications spanning from time keeping to frequency synthesis. Miniaturized cavities harness Kerr nonlinearity and enable terahertz soliton repetition rates. However, such high repetition rates are not amenable to direct electronic detection. Here, we demonstrate hybrid Kerr and electro-optic microcombs using the lithium niobate thin film that exhibits both Kerr and Pockels nonlinearities. By interleaving the high-repetition-rate Kerr soliton comb with the low-repetition-rate elect…
Squeezed light is a critical resource in quantum sensing and information processing. Due to the inherently weak optical nonlinearity and limited interaction volume, considerable pump power is typically needed to obtain efficient interactions to generate squeezed light in bulk crystals. Integrated photonics offers an elegant way to increase the nonlinearity by confining light strictly inside the waveguide. For the construction of large-scale quantum systems performing many-photon operations, it is essential to integrate various functional modules on a chip. However, fabrication imperfections an…
We demonstrate a scheme incorporating dual coupled microresonators through which mode interactions are intentionally introduced and controlled for Kerr frequency comb (microcomb) generation in the normal dispersion region. Microcomb generation, repetition rate selection, and mode locking are achieved with coupled silicon nitride microrings controlled via an on-chip microheater. Our results show for the first time that mode interactions can be programmably tuned to facilitate broadband normal-dispersion microcombs. The proposed scheme increases freedom in microresonator design and may make it p…
Optical frequency combs have revolutionized frequency metrology and timekeeping, and can be used in a wide range of optical technologies. Advances are under way that allow dramatic miniaturization of optical frequency combs using Kerr nonlinear optical microresonators, where broadband and coherent optical frequency combs can be generated from a continuous wave laser. Such `microcombs', provide a broad bandwidth with low power consumption, unprecedented form factor, wafer scale fabrication compatibility. For future high volume applications, integration and electrical pumping of soliton microcom…
Soliton microcombs provide a versatile platform for realizing fundamental studies and technological applications. To be utilized as frequency rulers for precision metrology, soliton microcombs must display broadband phase coherence, a parameter characterized by the optical phase or frequency noise of the comb lines and their corresponding optical linewidths. Here, we analyse the optical phase-noise dynamics in soliton microcombs generated in silicon nitride high-Q microresonators and show that, because of the Raman self-frequency shift or dispersive-wave recoil, the Lorentzian linewidth of som…
Squeezed states are a primary resource for continuous-variable (CV) quantum information processing. To implement CV protocols in a scalable and robust way, it is desirable to generate and manipulate squeezed states using an integrated photonics platform. In this Letter, we demonstrate the generation of quadrature-phase squeezed states in the radio-frequency carrier sideband using a small-footprint silicon-nitride microresonator with a dual-pumped four-wave-mixing process. We record a squeezed noise level of 1.34 dB ($\pm$0.16 dB) below the photocurrent shot noise, which corresponds to 3.09 dB …
Microcombs have sparked a surge of applications over the last decade, ranging from optical communications to metrology. Despite their diverse deployment, most microcomb-based systems rely on a tremendous amount of bulk equipment to fulfill their desired functions, which is rather complicated, expensive and power-consuming. On the other hand, foundry-based silicon photonics (SiPh) has had remarkable success in providing versatile functionality in a scalable and low-cost manner, but its available chip-based light sources lack the capacity for parallelization, which limits the scope of SiPh appli…
Photonic integrated microcombs have enabled advanced applications in optical communication, microwave synthesis, and optical metrology, which in nature unveil an optical dissipative soliton pattern under cavity-enhanced nonlinear processes. The most decisive factor of microcombs lies in the photonic material platforms, where materials with high nonlinearity and in capacity of high-quality chip integration are highly demanded. In this work, we present a home-developed chalcogenide glasses-Ge25Sb10S65 (GeSbS) for the nonlinear photonic integration and for the dissipative soliton microcomb genera…
Frequency microcombs, successors to mode-locked laser and fiber combs, enable miniature rulers of light for applications including precision metrology, molecular fingerprinting, and exoplanet discoveries. To enable the frequency ruling function, microcombs must be stabilized by locking their carrier-envelop offset frequency. So far, the microcomb stabilization remains compounded by the elaborate optics external to the chip, thus evading its scaling benefit. To address this challenge, here we demonstrate a nanophotonic chip solution based on aluminum nitride thin films, which simultaneously off…
Microcombs - optical frequency combs generated in microresonators - have advanced tremendously in the last decade, and are advantageous for applications in frequency metrology, navigation, spectroscopy, telecommunications, and microwave photonics. Crucially, microcombs offer the prospect of fully integrated miniaturized optical systems with unprecedented reductions in cost, size, weight, and power. However, this goal has been consistently hindered by the use of bulk free-space and fiber-optic components to process microcombs, limiting form factors to the table-top. Here, we address this challe…
Optical frequency combs based on mode-locked lasers have proven to be invaluable tools for a wide range of applications in precision spectroscopy and metrology. A novel principle of optical frequency comb generation in whispering-gallery mode microresonators ("microcombs") has been developed recently, which represents a promising route towards chip-level integration and out-of-the-lab use of these devices. Presently, two families of microcombs have been demonstrated: combs with electronically detectable mode spacing that can be directly stabilized, and broadband combs with up to octave-spannin…
Frequency combs have applications that extend from the ultra-violet into the mid-infrared bands. Microcombs, a miniature and often semiconductor-chip-based device, can potentially access most of these applications, but are currently more limited in spectral reach. Here, we demonstrate mode-locked silica microcombs with emission near the edge of the visible spectrum. By using both geometrical and mode-hybridization dispersion control, devices are engineered for soliton generation while also maintaining optical $Q$ factors as high as 80 million. Electronics-bandwidth-compatible (20 GHz) soliton …
The Terahertz or millimeter wave frequency band (300 GHz - 3 THz) is spectrally located between microwaves and infrared light and has attracted significant interest for applications in broadband wireless communications, space-borne radiometers for Earth remote sensing, astrophysics, and imaging. In particular optically generated THz waves are of high interest for low-noise signal generation. In particular optically generated THz waves are of high interest for low-noise signal generation. Here, we propose and demonstrate stabilized terahertz wave generation using a microresonator-based frequenc…
University of Science and Technology of China（中国科学技术大学）；Xi’an Institute of Optics and Precision Mechanics（西安光学精密机械研究所）；University of Chinese Academy of Sciences（中国科学院大学）
Optical frequency combs enable state-of-the-art applications including frequency metrology, optical clocks, astronomical measurements, and sensing. Recent demonstrations of microresonator-based Kerr frequency combs or microcombs pave the way to scalable and stable comb sources on a photonic chip. Generating microcombs in the visible wavelength range, however, has been limited by large material dispersion and optical loss. Here we demonstrate a scheme for efficiently generating visible microcomb in a high Q aluminum nitride microring resonator. Enhanced Pockels effect strongly couples infrared …
Soliton microcombs constitute chip-scale optical frequency combs, and have the potential to impact a myriad of applications from frequency synthesis and telecommunications to astronomy. The requirement on external driving lasers has been significantly relaxed with the demonstration of soliton formation via self-injection locking of the pump laser to the microresonator. Yet to date, the dynamics of this process has not been fully understood. Prior models of self-injection locking were not able to explain sufficiently large detunings, crucial for soliton formation. Here we develop a theoretical …
