基于芯片级孤子微梳的纳米精度距离计量
Nanometric precision distance metrology via chip-scale soliton microcombs
AI总结：
本文利用芯片级孤子微梳结合光谱分辨与零差干涉测量，实现了纳米级精度距离计量，重复性达3纳米，并具备千秒级长期稳定性。
摘要：
激光干涉测量在科学和技术中发挥着基础作用，助力精密计量和尺寸长度测量。在过去十年中，激光频率梳——一种在宽光谱范围内具有可追溯至时频标准的相干光-微波频率尺——在激光尺寸计量中发挥了关键作用，且对测量精度的需求日益增长。本文报道了通过孤子频率微梳实现的光谱分辨激光尺寸计量，精度达到纳米级。光谱干涉测量提供了光学飞行时间特征信息，而微梳的大自由光谱范围和高相干性使得能够实现可分辨梳齿且高可见度的干涉图，这些干涉图可直接通过光谱仪器读取。我们采用了来自梳齿零差干涉测量和微梳光谱分辨干涉测量的混合定时信号——全部来自同一光谱干涉图。我们的孤子与零差组合架构通过零差干涉测量实现了3纳米的重复性，并在白噪声极限下实现了超过1000秒的长期精密计量稳定性。
英文摘要：
Laser interferometry serves a fundamental role in science and technology, assisting precision metrology and dimensional length measurement. During the past decade, laser frequency combs - a coherent optical-microwave frequency ruler over a broad spectral range with traceability to time-frequency standards - have contributed pivotal roles in laser dimensional metrology with ever-growing demands in measurement precision. Here we report spectrally-resolved laser dimensional metrology via a soliton frequency microcomb, with nanometric-scale precision. Spectral interferometry provides information on the optical time-of-flight signature, and the large free-spectral range and high-coherence of the microcomb enables tooth-resolved and high-visibility interferograms that can be directly readout with optical spectrum instrumentation. We employ a hybrid timing signal from comb-line homodyne interferometry and microcomb spectrally-resolved interferometry - all from the same spectral interferogram. Our combined soliton and homodyne architecture demonstrates a 3-nm repeatability achieved via homodyne interferometry, and over 1,000-seconds stability in the long-term precision metrology at the white noise limits.
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