利用热激活选择性形貌平衡制作天文X射线反射光栅
Fabrication of astronomical x-ray reflection gratings using thermally activated selective topography equilibration
摘要：
热激活的选择性拓扑平衡（TASTE），使使用灰度电子束光刻，然后通过热处理，以诱导一个选择性的聚合物回流的抗蚀剂中的3D结构的创建。闪耀光栅形貌可以通过将抗蚀剂中的重复阶梯图案回流成楔形结构来创建。受天文应用的启发，已经使用TASTE在130 nm厚的PMMA中制作了周期为840 nm和400 nm的图案，以提供X射线反射光栅的基础。讨论了将这种替代闪耀技术集成到光栅制造配方中的途径。
英文摘要：
Thermally activated selective topography equilibration (TASTE) enables the creation of 3D structures in resist using grayscale electron-beam lithography followed by a thermal treatment to induce a selective polymer reflow. A blazed grating topography can be created by reflowing repeating staircase patterns in resist into wedge-like structures. Motivated by astronomical applications, such patterns with periodicities 840 nm and 400 nm have been fabricated in 130 nm-thick PMMA using TASTE to provide a base for X-ray reflection gratings. A path forward to integrate this alternative blazing technique into grating fabrication recipes is discussed.
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