Electron Beam Formation and its Effect in Novel Plasma-optical Device for Evaporation of Micro-droplets in Cathode ARC Plasma Coating
英文摘要:
The additional pumping of energy into arc plasma flow by the self-consistently formed radially directed beam of high-energy electrons for evaporation of micro-droplets is considered. The radial beam appears near the inner cylindrical surface by secondary ion - electron emission at this surface bombardment by peripheral arc plasma flow ions. The beam is accelerated by electric potential jump, appeared in a cylindrical channel of the plasma-optical system in crossed radial electrical and longitudinal magnetic fields. The high-energy electrons pump, during the time of micro-droplet movement through the system, the energy, which is sufficient for evaporation of micro-droplets.
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