利用格栅能量分析仪研究等离子体能量分布，考虑等离子体接触材料相关过程
Investigation of glow discharge plasma energy distribution using a gridded energy analyzer considering plasma-facing materials related processes
AI总结：
本研究通过格栅能量分析仪研究直流等离子体放电中离子的能量分布，发现不同离子组处于局部热平衡状态。
摘要：
考虑到等离子体放电对等离子体接触材料的影响以及如涂覆、清洁和表面处理等应用，本研究旨在调查直流等离子体放电中的离子能量。为此，通过COMSOL Multiphysics软件模拟了等离子体腔体。然后设计并模拟了格栅能量分析仪。下一步，构建并测试了该分析仪以测量等离子体离子的能量。该装置包含一个负偏压的格栅，其电位与等离子体放电阴极电极相同。该分析仪根据离子的能量区分它们，这些能量在碰撞阴极前由于鞘层电位降而被加速。通过实验获得的能量分布函数与模拟等离子体的能量分布函数进行了比较。实验结果表明，在直流等离子体放电中存在不同组的离子，每组处于局部热平衡状态。
英文摘要：
Considering the effects of glow discharge plasmas on plasma-facing materials and the applications such as coating, cleaning and surface treating, this work has been done to investigate the energy of ions of dc glow discharge plasmas. On the way towards this goal, a plasma chamber has been simulated via COMSOL Multiphysics software. Then, a gridded energy analyzer has been simulated and designed. In the next step, the analyzer has been constructed and tested to measure the energy of plasma ions. The devise contains a grid which is negatively biased to the same potential as the glow discharge cathode electrode. It discriminates plasma ions based on their energies, which are accelerated due to sheath potential drop before colliding with the cathode. The obtained energy distribution function from experiments has been compared to that of simulated plasma. The experimental results show that there are different groups of ions each in local thermal equilibrium in dc glow discharge plasmas.
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