arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2007.00117cond-mat.mtrl-sci
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ZrS PDMATHAAB Se $_{2-x}$和MoS $_2$晶体的生长动力学和自然氧化的原子机制

Growth kinetics and atomistic mechanisms of native oxidation of ZrS$_x$Se$_{2-x}$ and MoS$_2$ crystals

Seong Soon Jo, Akshay Singh, Liqiu Yang, Subodh C. Tiwari, Sungwook Hong, Aravind Krishnamoorthy, Maria Gabriela Sales, Sean M. Oliver, Joshua Fox, Randal L. Ca… 展开作者

Seong Soon Jo, Akshay Singh, Liqiu Yang, Subodh C. Tiwari, Sungwook Hong, Aravind Krishnamoorthy, Maria Gabriela Sales, Sean M. Oliver, Joshua Fox, Randal L. Cavalero, David W. Snyder, Patrick M. Vora, Stephen J. McDonnell, Priya Vashishta, Rajiv K. Kalia, Aiichiro Nakano, Rafael Jaramillo

摘要:

对自然氧化物的透彻理解对于设计半导体器件是必不可少的。在这里,我们报告的速率和机制的自发氧化大块单晶的ZrS $_x$硒$_{2-x}$合金和二硫化钼$_2$的研究。Zr S $_x$ Se $_{2-x}$合金氧化迅速,氧化速率随Se含量的增加而增加。基底表面的氧化是由有利的O $_2$吸附引发的,并通过Zr-O键切换机制进行,该机制使范德华能隙塌陷,并通过硫族元素的渐进氧化还原转变促进。速率限制过程是SO $_2$的形成和向外扩散。相比之下,MoS $_2$基底表面由于不利的氧吸附而稳定。我们的研究结果为设计和加工基于ZrSPDMATHABMM Se $_{2-x}$和MoS $_2$的半导体器件提供了深入的见解和定量的指导,并确定了具有竞争阴离子的层状材料中的成键和相变的原子尺度机制。

英文摘要:

A thorough understanding of native oxides is essential for designing semiconductor devices. Here we report a study of the rate and mechanisms of spontaneous oxidation of bulk single crystals of ZrS$_x$Se$_{2-x}$ alloys and MoS$_2$. ZrS$_x$Se$_{2-x}$ alloys oxidize rapidly, and the oxidation rate increases with Se content. Oxidation of basal surfaces is initiated by favorable O$_2$ adsorption and proceeds by a mechanism of Zr-O bond switching, that collapses the van der Waals gaps, and is facilitated by progressive redox transitions of the chalcogen. The rate-limiting process is the formation and out-diffusion of SO$_2$. In contrast, MoS$_2$ basal surfaces are stable due to unfavorable oxygen adsorption. Our results provide insight and quantitative guidance for designing and processing semiconductor devices based on ZrS$_x$Se$_{2-x}$ and MoS$_2$, and identify the atomistic-scale mechanisms of bonding and phase transformations in layered materials with competing anions.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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