掠入射X射线荧光法表征有序纳米结构的尺寸和元素
Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures
摘要：
表面上良好控制的有序纳米结构的重要性日益增加，这对现有的计量技术提出了挑战。为了开发这样的纳米结构和监测复杂的加工约束制造，需要纳米结构的尺寸重建和其组成的表征（理想地是定量表征）两者。在这项工作中，我们提出了一个软X射线荧光为基础的方法，使这两个要求，以解决在同一时间。通过应用掠入射X射线荧光技术并因此利用X射线驻波场效应，可以高灵敏度地研究纳米结构的尺寸和组成特征。通过改变激发辐射的入射角，从纳米物体内部的不同区域发射元素敏感的荧光辐射。通过应用适当的建模方案，这些数据集可用于确定纳米结构特征。我们证明了这些能力，通过执行由Si $_3$ N $_4$，其中GIXRF数据的O-K $α$和N-K $α$荧光发射的层状光栅的元素敏感的重建允许薄氧化物层被重建的光栅结构的表面上。此外，我们还采用该技术的三维纳米结构和定量的方式获得的尺寸和成分参数。
英文摘要：
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional reconstruction of nanostructures and a characterization (ideally a quantitative characterization) of their composition is required. In this work, we present a soft X-ray fluorescence-based methodology that allows both of these requirements to be addressed at the same time. By applying the grazing-incidence X-ray fluorescence technique and thus utilizing the X-ray standing wave field effect, nanostructures can be investigated with a high sensitivity with respect to their dimensional and compositional characteristics. By varying the incident angles of the exciting radiation, element-sensitive fluorescence radiation is emitted from different regions inside the nanoobjects. By applying an adequate modeling scheme, these datasets can be used to determine the nanostructure characteristics. We demonstrate these capabilities by performing an element-sensitive reconstruction of a lamellar grating made of Si$_3$N$_4$, where GIXRF data for the O-K$α$ and N-K$α$ fluorescence emission allows a thin oxide layer to be reconstructed on the surface of the grating structure. In addition, we employ the technique also to three dimensional nanostructures and derive both dimensional and compositional parameters in a quantitative manner.
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