掠入射和全反射X射线荧光分析实验室装置的校准
Towards a calibration of laboratory setups for grazing incidence and total-reflection X-ray fluorescence analysis
摘要：
掠入射X射线荧光（GIXRF）分析与全反射XRF密切相关，是一种非常强大的技术，可用于深入分析许多类型的技术相关样品，例如纳米颗粒沉积、浅掺杂剂分布、薄层样品甚至有序纳米结构。然而，基于GIXRF的关于样品的深度相关信息的确定通常基于实验数据的建模。这需要对所采用的设置的几何参数，特别是入射光束轮廓以及检测器孔径参数有深刻的了解。它们一起确定入射角相关的所谓的有效检测立体角，其必须是已知的，以便对任何实验数据集进行建模。在这项工作中，我们演示了如何这些仪器参数，这通常是不知道有足够的准确性，可以使用专门的实验与一个众所周知的校准样品。此外，这为设置的完全校准铺平了道路，因为还获得了关于其他参数的信息，例如入射光子通量。在这里，我们使用Bruker S4 T-STAR仪器进行演示，但该原理也可以应用于其他GIXRF设置。
英文摘要：
Grazing-Incidence X-ray fluorescence (GIXRF) analysis, which is closely related to total-reflection XRF, is a very powerful technique for the in-depth analysis of many types of technologically relevant samples, e.g. nanoparticle depositions, shallow dopant profiles, thin layered samples or even well-ordered nanostructures. However, the GIXRF based determination of the depth-dependent information about the sample is usually based on a modelling of the experimental data. This requires profound knowledge of the geometrical parameters of the setup employed, especially the incident beam profile as well as the detector aperture parameters. Together they determine the incident angle dependent so-called effective solid angle of detection which must be known in order to model any experimental data set. In this work, we demonstrate how these instrumental parameters, which are typically not known with sufficient accuracy, can be determined using dedicated experiments with a well-known calibration sample. In addition, this paves the way for a full calibration of the setup, as also information about other parameters, e.g. the incident photon flux is gained. Here, we are using a Bruker S4 T-STAR instrument for this demonstration but the principle can also be applied for other GIXRF setups.
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