在EUV散射测量和掠入射小角X射线散射中重构纳米结构的不确定性
On uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
摘要：
纳米结构的日益小型化和复杂性需要具有高吞吐量的创新计量解决方案，可以以非破坏性的方式评估复杂的3D结构。研究了EUV散射测量在纳米结构表面表征中的应用。重建是基于严格的模拟，使用麦克斯韦求解器的基础上有限元和统计验证马尔可夫链蒙特卡罗抽样方法。在这里，它表明，这种方法是适合的纳米结构的尺寸表征和氧化物或污染层的调查。与掠入射小角X射线散射（GISAXS）相比，EUV允许探测更小的区域。在EUV中，发散对衍射强度的影响远低于GISAXS，这也减少了重建的计算量。
英文摘要：
Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the characterization of nanostructured surfaces. The reconstruction is based on a rigorous simulation using a Maxwell solver based on finite-elements and is statistically validated with a Markov-Chain Monte Carlo sampling method. Here it is shown that this method is suitable for the dimensional characterization of the nanostructures and the investigation of oxide or contamination layers. In comparison to grazing-incidence small-angle X-rayscattering (GISAXS) EUV allows to probe smaller areas. The influence of the divergence on the diffracted intensities in EUV is much lower than in GISAXS, which also reduces the computational effort of the reconstruction.
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