arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2004.13837physics.ins-detphysics.app-phphysics.optics
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一种紧凑型高精度无误差外差干涉仪

A compact high-precision periodic-error-free heterodyne interferometer

Ki-Nam Joo, Erin Clark, Yanqi Zhang, Jonathan D. Ellis, Felipe Guzman

摘要:

我们提出了一个紧凑的外差干涉仪,实现皮米级的位移灵敏度在空气中超过100兆赫的频率的设计,台式设置和实验结果。具有空间分离光束的光学配置防止频率和偏振混合,并且因此消除周期性误差。该干涉仪旨在最大化共模光学激光束路径,以获得对环境干扰(如温度波动和声学)的高抑制。我们的实验结果表明,在静态和动态测量系统的短期和长期的稳定性。此外,我们还提供了将我们的干涉仪原型与商业系统进行比较的测量结果,验证了我们的3 μ m的更高灵敏度、两倍的更高热稳定性和无误差性能。

英文摘要:

We present the design, bench-top setup, and experimental results of a compact heterodyne interferometer that achieves picometer-level displacement sensitivities in air over frequencies above 100 mHz. The optical configuration with spatially separated beams prevents frequency and polarization mixing, and therefore eliminates periodic errors. The interferometer is designed to maximize common-mode optical laser beam paths to obtain high rejection of environmental disturbances, such as temperature fluctuations and acoustics. The results of our experiments demonstrate the short- and long-term stabilities of the system during stationary and dynamic measurements. In addition, we provide measurements that compare our interferometer prototype with a commercial system, verifying our higher sensitivity of 3\,pm, higher thermal stability by a factor of two, and periodic-error-free performance.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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