We demonstrate feedback cooling of a millimeter-scale, 40 kHz SiN membrane from room temperature to 5 mK (3000 phonons) using a Michelson interferometer, and discuss the challenges to ground state cooling without an optical cavity. This advance appears within reach of current membrane technology, positioning it as a compelling alternative to levitated systems for quantum sensing and fundamental weak force measurements.
We report on the optical and mechanical characterization of arrays of parallel micromechanical membranes. Pairs of high-tensile stress, 100 nm-thick silicon nitride membranes are assembled parallel with each other with separations ranging from 8.5 to 200 $μ$m. Their optical properties are accurately determined using a combination of broadband and monochromatic illuminations and the lowest vibrational mode frequencies and mechanical quality factors are determined interferometrically. The results and techniques demonstrated are promising for investigations of collective phenomena in optomechanic…
Quantum backaction disturbs the measurement of the position of a mechanical oscillator by introducing additional fluctuations. In a quantum backaction measurement technique, the backaction can be evaded, although at the cost of losing part of the information. In this work, we carry out such a quantum backaction measurement using a large 0.5 mm diameter silicon nitride membrane oscillator with 707 kHz frequency, via a microwave cavity readout. The measurement shows that quantum backaction noise can be evaded in the quadrature measurement of the motion of a large object.
A robust process for fabricating intrinsic single-photon emitters in silicon nitride has been recently established. These emitters show promise for quantum applications due to room-temperature operation and monolithic integration with the technologically mature silicon nitride photonics platform. Here, the fundamental photophysical properties of these emitters are probed through measurements of optical transition wavelengths, linewidths, and photon antibunching as a function of temperature from 4.2K to 300K. Important insight into the potential for lifetime-limited linewidths is provided throu…
Single-photon emitters are essential for enabling several emerging applications in quantum information technology, quantum sensing and quantum communication. Scalable photonic platforms capable of hosting intrinsic or directly embedded sources of single-photon emission are of particular interest for the realization of integrated quantum photonic circuits. Here, we report on the first-time observation of room-temperature single-photon emitters in silicon nitride (SiN) films grown on silicon dioxide substrates. As SiN has recently emerged as one of the most promising materials for integrated qua…
We realise a circular gray-field polariscope to image stress-induced birefringence in thin (submicron thick) silicon nitride (SiN) membranes and strings. This enables quantitative mapping of the orientation of principal stresses and stress anisotropy, complementary to, and in agreement with, finite element modeling (FEM). Furthermore, using a sample with a well known stress anisotropy, we extract a new value for the photoelastic (Brewster) coefficient of silicon nitride, $C \approx (3.4~\pm~0.1)\times~10^{-6}~\mathrm{MPa}^{-1}$. We explore possible applications of the method to analyse and qua…
In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN$_x$ membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN$_x$ membranes were fabricated and used as optomechanical resonators in a Michelson interferometer and in a Fabry-Pérot cavity. The measurements show that the fabrication process preserves both the optical quality and the mechanical quality factor of the membrane.
We develop a quantum photonic platform that interconnects a high-quality quantum dot single-photon source and a low-loss photonic integrated circuit made in silicon nitride. The platform is characterized and programmed to demonstrate various multiphoton applications, including bosonic suppression laws and photonic entanglement generation. The results show a promising technological route forward to scale-up photonic quantum hardware.
Integration of single-photon emitters (SPEs) with resonant photonic structures is a promising approach for realizing compact and efficient single-photon sources for quantum communications, computing, and sensing. Efficient interaction between the SPE and the photonic cavity requires that the cavity's resonance matches the SPE emission line. Here we demonstrate a new method for tuning silicon nitride (Si3N4) microring cavities via controlled deposition of the cladding layers. Guided by numerical simulations, we deposit silicon dioxide (SiO2) nanolayers onto Si3N4 ridge structures in steps of 50…
Nanoscale photonic crystal cavity optomechanical devices enable detection of nanomechanical phenomena with a sensitivity sufficient to observe quantum effects. Here we present the design of a one-dimensional air-mode photonic crystal cavity patterned in a silicon nitride nanobeam, and show that it forms the basis for cavity optomechanical split-beam and paddle nanocavity devices useful for force detection and nonlinear quantum sensing. The air-mode of this device is advantageous for optomechanical coupling, while also having ultrahigh optical quality factor $Q_o\sim 10^6$ despite its proximity…
We present a platform based upon silicon nitride nanomembranes for integrating superconducting microwave circuits with planar acoustic and optical devices such as phononic and photonic crystals. Utilizing tensile stress and lithographic patterning of a silicon nitride nanomembrane we are able to reliably realize planar capacitors with vacuum gap sizes down to $s \approx 80$nm. In combination with spiral inductor coils of micron pitch, this yields microwave ($\approx 8$GHz) resonant circuits of high impedance ($Z_{0} \approx 3.4$k$Ω$) suitable for efficient electromechanical coupling to nanosca…
Recently observed quantum emitters in hexagonal boron nitride (hBN) membranes have a potential for achieving high accessibility and controllability thanks to the lower spatial dimension. Moreover, these objects naturally have a high sensitivity to vibrations of the hosting membrane due to its low mass density and high elasticity modulus. Here, we propose and analyze a spin-mechanical system based on color centers in a suspended hBN mechanical resonator. Through group theoretical analyses and ab-initio calculation of the electronic and spin properties of such a system, we identify a spin double…
The development of large-scale optical quantum information processing circuits ground on the stability and reconfigurability enabled by integrated photonics. We demonstrate a reconfigurable 8x8 integrated linear optical network based on silicon nitride waveguides for quantum information processing. Our processor implements a novel optical architecture enabling any arbitrary linear transformation and constitutes the largest programmable circuit reported so far on this platform. We validate a variety of photonic quantum information processing primitives, in the form of Hong-Ou-Mandel interferenc…
We demonstrate continuous tuning of the squeezing level generated in a double-ring optical parametric oscillator by externally controlling the coupling condition using electrically controlled integrated microheaters. We accomplish this by utilizing the avoided crossing exhibited by a pair of coupled silicon nitride microring resonators. We directly detect a change in the squeezing level from 0.5 dB in the undercoupled regime to 2 dB in the overcoupled regime, which corresponds to a change in the generated on-chip squeezing factor from 0.9 dB to 3.9 dB. Such wide tunability in the squeezing lev…
Optically active defects in 2D materials, such as hexagonal boron nitride (hBN) and transition metal dichalcogenides (TMDs), are an attractive class of single-photon emitters with high brightness, room-temperature operation, site-specific engineering of emitter arrays, and tunability with external strain and electric fields. In this work, we demonstrate a novel approach to precisely align and embed hBN and TMDs within background-free silicon nitride microring resonators. Through the Purcell effect, high-purity hBN emitters exhibit a cavity-enhanced spectral coupling efficiency up to $46\%$ at …
CMOS-compatible photonic chips are highly desirable for real-world quantum optics devices due to their scalability, robustness, and integration with electronics. Despite impressive advances using Silicon nanostructures, challenges remain in reducing their linear and nonlinear losses and in creating narrowband photons necessary for interfacing with quantum memories. Here we demonstrate the potential of the silicon nitride (Si3N4) platform by realizing an ultracompact, bright, entangled photon-pair source with selectable photon bandwidths down to 30 MHz, which is unprecedented for an integrated …
Microelectromechanical systems and integrated photonics provide the basis for many reliable and compact circuit elements in modern communication systems. Electro-opto-mechanical devices are currently one of the leading approaches to realize ultra-sensitive, low-loss transducers for an emerging quantum information technology. Here we present an on-chip microwave frequency converter based on a planar aluminum on silicon nitride platform that is compatible with slot-mode coupled photonic crystal cavities. We show efficient frequency conversion between two propagating microwave modes mediated by t…
Frequency entangled photon sources are in high demand in a variety of optical quantum technologies, including quantum key distribution, cluster state quantum computation and quantum metrology. In the recent decade, chip-scale entangled photon sources have been developed using silicon platforms, offering robustness, large scalability and CMOS technology compatibility. Here, we report the generation of frequency correlated photon pairs using a 150-GHz silicon nitride ring cavity. First, the device is characterized for studying the phase matching condition during spontaneous four-wave mixing. Nex…
Photonic chip based time-bin entanglement has attracted significant attention because of its potential for quantum communication and computation. Useful time-bin entanglement systems must be able to generate, manipulate and analyze entangled photons on a photonic chip for stable, scalable and reconfigurable operation. Here we report the first time-bin entanglement photonic chip that integrates time-bin generation, wavelength demultiplexing and entanglement analysis. A two-photon interference fringe with an 88.4% visibility is measured (without subtracting any noise), indicating the high perfor…
