光机械质谱
Optomechanical mass spectrometry
摘要：
近年来已经证明，纳米机械质谱法非常适合于分析特定的高质量物种，如病毒。尽管如此，一维设备（如振动梁）的独家使用迫使分析时间（与捕获面积相关）和质量分辨率（与设备质量成反比）之间的权衡。这种装置还需要复杂的读出方案来同时监测多个共振模式，特别是当刚度或形状起作用时，这降低了质量分辨率。这些问题限制了纳米力学MS对具有特定性质的物种的分析。我们在这里报告的第一个演示单粒子质谱与纳米光学机械谐振器制造的超大规模集成过程。光学机械技术的独特运动灵敏度允许使用具有新拓扑结构的谐振器。这里介绍的设备被设计成不受颗粒位置、刚度或形状的影响，为分析具有重要意义的大纵横比生物对象（例如具有尾巴或纤维的病毒）开辟了道路。与具有电读出和最先进的质量分辨率的自上而下的光束谐振器相比，尽管使用了单一的谐振模式，但我们在捕获区域中显示了三倍的改善，而没有分辨率降低。由于光机读出的灵敏度和带宽以及其与电信多路复用技术的兼容性，可以实现短分析时间。
英文摘要：
It has been demonstrated in the recent years that nanomechanical mass spectrometry was well suited for the analysis of specific high mass species such as viruses. Still, the exclusive use of one-dimensional devices such as vibrating beams forces a trade-off between analysis time (related to capture area) and mass resolution (inversely proportional to device mass). Such devices also require complex readout schemes to simultaneously monitor multiple resonance modes, in particular when stiffness or shape come into play, which degrades mass resolution. These issues restrict nanomechanical MS to the analysis of species with specific properties. We report here the first demonstration of single-particle mass spectrometry with nano-optomechanical resonators fabricated with a Very Large Scale Integration process. The unique motion sensitivity of optomechanical techniques allows the use of resonators with new topologies. The device introduced here is designed to be impervious to particle position, stiffness or shape, opening the way to the analysis of large aspect ratio biological objects of great significance such as viruses with a tail or fibrils. Compared to top-down beam resonators with electrical read-out and state-of-the-art mass resolution, we show a three-fold improvement in capture area with no resolution degradation, despite the use of a single resonance mode. Short analysis time is in reach thanks to the sensitivity and bandwidth of optomechanical read-out and its compliance with telecom multiplexing techniques.
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