Spatial light modulators (SLMs) are devices for modulating amplitude, phase or polarization of a light beam on demand. Such devices have been playing an indispensable inuence in many areas from our daily entertainments to scientific researches. In the past decades, the SLMs have been mainly operated in electrical addressing (EASLM) manner, wherein the writing images are created and loaded via conventional electronic interfaces. However, adoption of pixelated electrodes puts limits on both resolution and efficiency of the EASLMs. Here, we present an optically addressed SLM based on a nonlinear metasurface (MS-OASLM), by which signal light is directly modulated by another writing beam requiring no electrode. The MS-OASLM shows unprecedented compactness and is 400 nm in total thickness benefitting from the outstanding nonlinearity of the metasurface. And their subwavelength feature size enables a high resolution up to 250 line pairs per millimeter, which is more than one order of magnitude better than any currently commercial SLMs. Such MS-OASLMs could provide opportunities to develop the next generation of high resolution displays and all-optical information processing technologies.
Compact, lightweight and high-performance spatial light modulators (SLMs) are crucial for modern optical technologies. The drive for pixel miniaturization, necessary to improve their performance, has led to a promising alternative, active optical metasurfaces, which enable tunable subwavelength wavefront manipulation. Here, we demonstrate an all-solid-state programmable transmissive SLM device based on Huygens dielectric metasurfaces. The metasurface features electrical tunability, provided by mature liquid crystals (LCs) technology. In contrast to conventional LC SLMs, our device enables high…
Rapidly developing augmented reality (AR) and 3D holographic display technologies require spatial light modulators (SLM) with high resolution and viewing angle to be able to satisfy increasing customer demands. Currently available SLMs, as well as their performance, are limited by their large pixel sizes of the order of several micrometres. Further pixel size miniaturization has been stagnant due to the persistent challenge to reduce the inter-pixel crosstalk associated with the liquid crystal (LC) cell thickness, which has to be large enough to accumulate the required 2π phase difference. Her…
We introduce chip-integrated visible light communication-band modulators based on niobium (Nb) metallic plasmonic nano-antenna arrays. Our plasmonic nano-devices provide strong sensitivity to the polarization of the incident visible light and the geometrical parameters of their subwavelength nanoscale building blocks. Moreover, they offer optical modulation properties with modulation depth MD = 60% at resonant wavelength lambda= 716 nm, at room temperature. By engineering the photo response of the Nb nano-device arrays, we observe a maximum extinction A(lambda)= 1- R(lambda}) = 95 % at resonan…
Molding the flow of light at the nanoscale has been a grand challenge of nanophotonics for decades. It is now widely recognized that metasurfaces represent a chip-scale nanophotonics array technology capable of comprehensively controlling the wavefront of light via appropriately configuring subwavelength antenna elements. Here, we demonstrate a reconfigurable metasurface that is universal, i.e., notionally capable of providing diverse optical functions in the telecommunication wavelength regime, using a compact, lightweight, electronically-controlled array with no moving parts. By electro-opti…
Dynamic optical metasurfaces with ultrafast temporal response, i.e., spatiotemporal optical metasurfaces, provide attractive solutions and open fascinating perspectives for modern highly integrated optics and photonics. In this work, electro-optically controlled optical metasurfaces operating in reflection and utilizing resonant waveguide mode excitation are demonstrated from the viewpoint of free-space propagating light modulation. The modulation of reflected light power with superior characteristics in comparison with prior research is achieved by identifying a suitable low-loss waveguide mo…
Dynamically reconfigurable metasurfaces promise compact and lightweight spatial light modulation for many applications, including LiDAR, AR/VR, and LiFi systems. Here, we design and computationally investigate high quality factor silicon-on-lithium niobate metasurfaces with electrically-driven, independent control of its constituent nanobars for full phase tunability with high tuning efficiency. Free-space light couples to guided modes within each nanobar via periodic perturbations, generating quality factors exceeding 30,000, while maintaining bar spacing <$λ$/1.5. We achieve nearly 2$π$ phas…
The full-dimensional spatial light meta-modulator requires simultaneous, arbitrary and independent manipulation of spatial phase, amplitude, and polarization. It is an essential step towards harnessing complete dimensional resources of light. However, full-dimensional meta-modulation can be challenging due to the need of multiple independent control factors. To address this challenge, here we propose parallel-tasking geometric phase metasurfaces. Indeed, the broadband geometric phase of meta-atoms is divided into several sub-phases, each of which serves as an independent control factor to mani…
Metasurfaces are ultrathin nanostructured surfaces that can allow arbitrary manipulation of light. Implementing dynamic tunability into their design could allow the optical functions of metasurfaces to be rapidly modified at will. The most pronounced and robust tunability of optical properties is provided by phase-change materials such as vanadium dioxide (VO2) and germanium antimony telluride (GST), but their implementations have been limited only to near-infrared wavelengths. Here, we demonstrate that VO2 nanoantennas with widely tunable Mie resonances can be utilized for designing tunable m…
In display technologies or data processing, planar and subwavelength free-space components suited for flat photonic devices are needed. Metasurfaces, which shape the optical wavefront within hundreds of nanometers, can provide a solution for thin and portable photonic devices, e.g. as CMOS-compatible modules. While conventional electro-optic modulators are inconvenient to operate in free space configurations, its principle can largely be applied to the development of active metasurfaces with the prospect of modulation speeds up to the GHz region. Here, we use this concept to realize fast and c…
We present an asymmetric bifacial graphene metasurface to realize tunable and broadband coherent perfect absorption (CPA) at terahertz (THz) frequencies. The proposed design is composed of two dissimilar graphene square patch metasurfaces stacked over an ultrathin dielectric substrate. Nonlinear CPA performance without resorting to optical nonlinearities and amplification are demonstrated based on wave interference phenomena taking place along and inside this subwavelength structure. Broadband asymmetric reflection from opposite directions is obtained in the case of single wave illumination. T…
We report a THz reflectarray metasurface which uses graphene as active element to achieve beam steering, shaping and broadband phase modulation. This is based on the creation of a voltage controlled reconfigurable phase hologram, which can impart different reflection angles and phases to an incident beam, replacing bulky and fragile rotating mirrors used for terahertz imaging. This can also find applications in other regions of the electromagnetic spectrum, paving the way to versatile optical devices including light radars, adaptive optics, electro-optical modulators and screens.
We present a formalism for understanding the elecromagnetism of metasurfaces, optically thin composite films with engineered diffraction. The technique, diffractive interface theory (DIT), takes explicit advantage of the small optical thickness of a metasurface, eliminating the need for solving for light propagation inside the film and providing a direct link between the spatial profile of a metasurface and its diffractive properties. Predictions of DIT are compared with full-wave numerical solutions of Maxwell's equations, demonstrating DIT's validity and computational advantages for opticall…
We present a new formalism for understanding the optical properties of metasurfaces, optically thin composite diffractive devices. The proposed technique, Rigorous Diffraction Interface Theory (R-DIT), provides an analytical framework for understanding the transition between optically thin and optically thick structures. For metasurfaces, R-DIT avoids the calculation of optical propagation through thin layer and provides a direct link between the composition and geometry of a metasurface and its transmission, reflection, and diffraction properties.
All-dielectric optical metasurfaces can locally control the amplitude and phase of light at the nanoscale, enabling arbitrary wavefront shaping. However, lack of post-fabrication tunability has limited the true potential of metasurfaces for many applications. Here, we utilize a thin liquid crystal (LC) layer as a tunable medium surrounding the metasurface to achieve a phase-only spatial light modulator (SLM) with high reflection in the visible frequency, exhibiting an active and continuous resonance tuning with associated 2pi phase control and uncoupled amplitude. Dynamic wavefront shaping is …
Meta-optics based on optically-resonant dielectric nanostructures is a rapidly developing research field with many potential applications. Halide perovskite metasurfaces emerged recently as a novel platform for meta-optics, and they offer unique opportunities for control of light in optoelectronic devices. Here we employ the generalized Kerker conditions to overlap electric and magnetic Mie resonances in each meta-atom of MAPbBr3 perovskite metasurface and demonstrate broadband suppression of reflection down to 4%. We reveal also that metasurface nanostructuring is also beneficial for the enha…
Acquiring precise information about the mode content of a laser is critical for multiplexed optical communications, optical imaging with active wave-front control, and quantum-limited interferometric measurements. Hologram-based mode decomposition devices, such as spatial light modulators, allow a fast, direct measurement of the mode content, but they have limited precision due to cross-coupling between modes. Here we report the first proof-of-principle demonstration of mode decomposition with a metasurface, resulting in significantly enhanced precision. A mode-weight fluctuation of $6\times 1…
Subwavelength Mie resonators have enabled new classes of optical antennas1-4, photodetectors5,6, antireflection coatings7, and magnetic mirrors8 and can act as the basic meta-atoms constituents of low-loss dielectric metasurfaces2-4,8-10. In any application, tunable Mie resonances are key to achieving dynamic and reconfigurable operation11,12. Sub-linewidth tuning has been achieved via coupling to liquid crystals13, ultrafast free-carrier injection14,15,16,17, stretchable substrates18 and with phase change materials19. Here, we demonstrate ultra-wide dynamic tuning of PbTe Mie resonators fabri…
Electro-optically tunable second-harmonic generation in lithium niobate metasurfaces boosted by Brillouin zone folding induced bound states in the continuum
We propose a tunable coherent perfect absorber based on ultrathin nonlinear metasurfaces. The nonlinear metasurface is made of plasmonic nanoantennas coupled to an epsilon-near-zero material with a large optical nonlinearity. The coherent perfect absorption is achieved by controlling the relative phases of the input beams. We show that the optical response of the nonlinear metasurface can be tuned from a complete to a partial absorption by changing the intensity of the pump beam. The proposed nonlinear metasurface can be used to design optically tunable thermal emitters, modulators, and sensor…
Nonlinear spatio-temporal systems are the basis for countless physical phenomena in such diverse fields as ecology, optics, electronics and neuroscience. The canonical approach to unify models originating from different fields is the normal form description, which determines the generic dynamical aspects and different bifurcation scenarios. Realizing different types of dynamical systems via one experimental platform that enables continuous transition between normal forms through tuning accessible system parameters is therefore highly relevant. Here, we show that a transmissive, optically-addre…
It has been recently shown that especially engineered light beams have the remarkable ability to propagate along curved trajectories in vacuum. Current methods for generating accelerating beams use phase modulators and lenses leading to length scales on the order of tens of centimeters or larger. This poses constraints and severely limits their applicability inside materials. Here, we accelerate light inside glass using a metasurface consisting of plasmonic nanoantennas. Highly-bending beams with radii of curvature on the order of a hundred microns were generated, and the imaged intensities ag…
As two-dimensional metamaterials, metasurfaces open up new avenues for designing static planar optics. However, the dynamic modulation of metasurfaces in the optical band is required for practical applications. The existing dynamic devices rarely utilized the polarization manipulation capability of metasurfaces. Here, we demonstrate an electrically tunable multifunctional metasurface in the visible range by integrating birefringent liquid crystals (LCs) with all-dielectric metasurfaces based on a novel packaging scheme. By combining the helicity-dependent geometric phase of the metasurface and…
Spatial light modulators (SLMs) are central to numerous applications ranging from high-speed displays to adaptive optics, structured illumination microscopy, and holography. After decades of advances, SLM arrays based on liquid crystals can now reach large pixel counts exceeding 10^6 with phase-only modulation with a pixel pitch of less than 10 μm and reflectance around 75%. However, the rather slow modulation speed in such SLMs (below hundreds of Hz) presents limitations for many applications. Here we propose an SLM architecture that can achieve high pixel count with high-resolution phase-onl…
Enhancing absorption in optically thin semiconductors is the key in the development of high-performance optical and optoelectronic devices. In this paper, we resort to the concept of degenerate critical coupling and design an ultra-thin semiconductor absorber composed of free-standing GaAs nanocylinder metasurfaces in the near infrared. The numerical results show that perfect absorption can be achieved through overlapping two Mie modes with opposite symmetry, with each mode contributing a theoretical maximum of 50% in their respective critical coupling state. The absorption also shows the pola…
Nonlinear topological photonics has been attracting increasing research interest, as it provides an exciting photonic platform that combines the advantages of active all-optical control offered by nonlinear optics with the unique features of topological photonic systems, such as topologically-protected defect-immune light propagation. In this paper, we demonstrate that topological interface modes and trivial edge modes of a specially designed graphene metasurface can be coupled in a tunable and optically controllable manner, thus providing an efficient approach to transfer optical power to top…
Over the past years, photonic metasurfaces have demonstrated their remarkable and diverse capabilities for achieving advanced control over light propagation by confining electromagnetic radiation within the deeply subwavelength thickness of these artificial films. Here, we demonstrate that metasurfaces also offer new unparalleled capabilities for decreasing the overall dimensions of integrated optical components and systems. We propose an original approach of embedding a metasurface inside one of the most fundamental optical elements -an optical cavity- to drastically scale-down the thickness …
We demonstrate that the influence of Kerr effect on valley-Hall topological transport in graphene metasurfaces can be used to implement an all-optical switch. In particular, by taking advantage of the large Kerr coefficient of graphene, the index of refraction of a topologically-protected graphene metasurface can be tuned via a pump beam, which results in an optically controllable frequency shift of the photonic bands of the metasurface. This spectral variation can in turn be readily employed to control and switch the propagation of an optical signal in certain waveguide modes of the graphene …
Plasmonic metasurfaces represent a promising platform for enhancing light-matter interaction. Active control of the optical response of metasurfaces is desirable for applications such as beam-steering, modulators and switches, biochemical sensors, and compact optoelectronic devices. Here we use a plasmonic metasurface with two Fano resonances to enhance the interaction of infrared light with electrically controllable single layer graphene. It is experimentally shown that the narrow spectral width of these resonances, combined with strong light/graphene coupling, enables reflectivity modulation…
Motivated by the recent renewed interest in compact analog computing using light and metasurfaces (Silva, A. et al., Science 2014, 343, 160-163), we suggest a practical approach to its realization that involves reflective metasurfaces consisting of arrayed gold nanobricks atop a subwavelength-thin dielectric spacer and optically-thick gold film, a configuration that supports gap-surface plasmon resonances. Using well established numerical routines, we demonstrate that these metasurfaces enable independent control of the light phase and amplitude, and design differentiator and integrator metasu…
Electromagnetic fields coupled with mechanical degrees of freedom have recently shown exceptional and innovative applications, ultimately leading to mesoscopic optomechanical devices operating in the quantum regime of motion. Simultaneously, micromechanical elements have provided new ways to enhance and manipulate the optical properties of passive photonic elements. Following this concept, in this article we show how combining a chiral metasurface with a GaAs suspended micromembrane can offer new scenarios for controlling the polarization state of near-infrared light beams. Starting from the u…
Spatial light modulators (SLMs) are the most relevant technology for dynamic wavefront manipulation. They find diverse applications ranging from novel displays to optical and quantum communications. Among commercial SLMs for phase modulation, Liquid Crystal on Silicon (LCoS) offers the smallest pixel size and, thus, the most precise phase mapping and largest field of view (FOV). Further pixel miniaturization, however, is not possible in these devices due to inter-pixel cross-talks, which follow from the high driving voltages needed to modulate the thick liquid crystal (LC) cells that are neces…
Hybrid BaTiO3/TiO2 Metasurface for Efficient Gigahertz-Speed Free-Space Electro-Optic Modulation
Harvard John A. Paulson School of Engineering and Applied Sciences, Harvard University（哈佛大学约翰·A·保尔森工程与应用科学学院）；Department of Chemistry and Chemical Biology, Harvard University（哈佛大学化学与化学生物学系）；La Luce Cristallina, Inc.（La Luce Cristallina 公司）；Institute of Experimental Physics, Graz University of Technology（格拉茨工业大学实验物理研究所）；Institute of Nanotechnology, Karlsruhe Institute of Technology（卡尔斯鲁厄理工学院纳米技术研究所）；Department of Materials Science and Engineering, University of California, Irvine（加州大学欧文分校材料科学与工程系）
All-dielectric metasurfaces provide unique solutions for advanced wavefront manipulation of light with complete control of amplitude and phase at sub-wavelength scales. One limitation, however, for most of these devices is the lack of any post-fabrication tunability of their response. To break this limit, a promising approach is employing phase-change-materials (PCM), which provide a fast, low energy and non-volatile means to endow metasurfaces with a switching mechanism. In this regard, great advancements have been done in the mid infrared and near infrared spectrum using different chalcogeni…
