AI 中文总结
该研究开发混合BaTiO3/TiO2超表面，结合可扩展薄膜生长与纳米加工技术，实现高效千兆赫兹速自由空间电光调制，为激光雷达等领域提供高性能调制器的可扩展方案。
AI 中文摘要
自由空间电光调制器是新兴光子系统的核心，但其性能受限于调制效率、带宽与器件孔径之间的权衡。本文报道了一种混合BaTiO3（BTO）/TiO2超表面，用于大孔径、高效、千兆赫兹速自由空间电光调制。结合射频磁控溅射实现的可扩展BTO薄膜生长与成熟的TiO2纳米加工技术，我们在未刻蚀的BTO层上制备了TiO2型超表面。该器件支持品质因子超过1300的导模共振，光限制因子约为0.8，同时连续BTO层可高效利用施加电压，共同最大化BTO内部光场与驱动场的重叠。具有0.3mm×0.3mm超表面的器件实现了约0.020/伏的透射调制效率和约0.8GHz的-3dB电光带宽，BTO的有效普克尔斯系数约为151pm/V。这为激光雷达、自由空间光通信和可重构光计算提供了高性能自由空间电光调制器的可扩展路线。
英文摘要
Free-space electro-optic modulators are key to emerging photonic systems, yet their performance remains limited by trade-offs between modulation efficiency, bandwidth, and device aperture. Here we report a hybrid BaTiO3 (BTO)/TiO2 metasurface for large-aperture, efficient, gigahertz-speed free-space electro-optic modulation. Combining scalable BTO film growth by radio-frequency magnetron sputtering with mature TiO2 nanofabrication, we pattern the metasurface in TiO2 on an unetched BTO layer. The resulting devices support guided-mode resonances with quality factors exceeding 1300 and an optical confinement factor of ~0.8, while the continuous BTO layer makes efficient use of the applied voltage, together maximizing the overlap between the optical and driving fields within the BTO. A device with a 0.3 mm x 0.3 mm metasurface achieves a transmittance modulation efficiency of ~0.020 per volt and a -3 dB electro-optic bandwidth of ~0.8 GHz, with an effective Pockels coefficient of ~151 pm/V for the BTO. This establishes a scalable route to high-performance free-space electro-optic modulators for LiDAR, free-space optical communication, and reconfigurable optical computing.
Comments21 pages, 4 figures, 1 table. Supplementary Information: 27 pages, 11 figures, 7 supplementary notes
