Layered 2D graphene oxide (GO) films are integrated with microring resonators (MRRs) to experimentally demonstrate enhanced nonlinear optics in the form of four wave mixing (FWM). Both uniformly coated and patterned GO films are integrated on CMOS compatible doped silica MRRs using a large area, transfer free, layer by layer GO coating method together with photolithography and lift off processes, yielding precise control of the film thickness, placement, and coating length. The high Kerr nonlinearity and low loss of the GO films combined with the strong light matter interaction within the MRRs results in a significant improvement in the FWM efficiency in the hybrid MRRs. Detailed FWM measurements are performed at different pump powers and resonant wavelengths for the uniformly coated MRRs with 1 to 5 layers of GO as well as the patterned devices with 10 to 50 layers of GO. The experimental results show good agreement with theory, achieving up to 7.6 dB enhancement in the FWM conversion efficiency (CE) for an MRR uniformly coated with 1 layer of GO and 10.3 dB for a patterned device with 50 layers of GO. By fitting the measured CE as a function of pump power for devices with different numbers of GO layers, we also extract the dependence of the third-order nonlinearity on layer number and pump power, revealing interesting physical insights about the evolution of the layered GO films from 2D monolayers to quasi bulk like behavior. These results confirm the high nonlinear optical performance of integrated photonic resonators incorporated with 2D layered GO films.
Silicon photonics promises to alleviate the bandwidth bottleneck of modern day computing systems. But silicon photonic devices have the fundamental problem of being highly sensitive to ambient temperature fluctuations due to the high thermo-optic (TO) coefficient of silicon. Most of the approaches proposed to date to overcome this problem either require significant power consumption or incorporate materials which are not CMOS-compatible. Here we demonstrate a new class of optical devices which are passively temperature compensated, based on tailoring the optical mode confinement in silicon wav…
We demonstrate efficient, low power, continuous-wave four-wave mixing in the C-band, using a high index doped silica glass micro ring resonator having a Q-factor of 1.2 million. A record high conversion efficiency for this kind of device is achieved over a bandwidth of 20nm. We show theoretically that the characteristic low dispersion enables phase-matching over a bandwidth > 160nm.
Photonic systems based on microring resonators have a fundamental constrain given by the strict relationship among free spectral range (FSR), total quality factor (QT) and resonator size, intrinsically making filter spacing, photonic lifetime and footprint interdependent. Here we break this paradigm employing CMOS compatible Silicon-on-Insulator (SOI) photonic molecules based on coupled multiple ring resonators. The resonance wavelengths and their respective linewidths are controlled by the hybridization of the quasi-orthogonal photonic states. We demonstrate photonic molecules with doublet an…
The emerging field of silicon photonics seeks to unify the high bandwidth of optical communications with CMOS microelectronic circuits. Many components have been demonstrated for on-chip optical communications, including those that utilize the nonlinear optical properties of silicon[1, 2], silicon dioxide[3, 4] and silicon nitride[5, 6]. Processes such as second harmonic generation, which are enabled by the second-order susceptibility, have not been developed since the bulk $χ^{(2)}$ vanishes in these centrosymmetric CMOS materials. Generating the lowest-order nonlinearity would open the windo…
We present the first system penalty measurements for all-optical wavelength conversion in an integrated ring resonator. We achieve wavelength conversion over a range of 27.7nm in the C-band at 2.5 Gb/s by exploiting four wave mixing in a CMOS compatible, high index glass ring resonator at ~22 dBm average pump power, obtaining < 0.3 dB system penalty.
A linear-to-circular polarization converter with half transmission and half reflection using a single-layered metamaterial is theoretically and numerically demonstrated. The unit cell of the metamaterial consists of two coupled split-ring resonators with identical dimensions. A theoretical analysis based on an electrical circuit model of the coupled split-ring resonators indicates that the linear-to-circular polarization converter is achieved when the magnetic coupling between the split-ring resonators is set to a certain strength. A finite-difference time-domain simulation reveals that the si…
We report enhanced nonlinear optics in complementary metal oxide semiconductor compatible photonic platforms through the use of layered two dimensional (2D) graphene oxide (GO) films. We integrate GO films with silicon on insulator nanowires (SOI), high index doped silica glass (Hydex) and silicon nitride (SiN) waveguides and ring resonators, to demonstrate an enhanced optical nonlinearity including Kerr nonlinearity and four wave mixing (FWM). The GO films are integrated using a large area, transfer free, layer by layer method while the film placement and size are controlled by photolithograp…
While soliton microcombs offer the potential for integration of powerful frequency metrology and precision spectroscopy systems, their operation requires complex startup and feedback protocols that necessitate difficult-to-integrate optical and electrical components. Moreover, CMOS-rate microcombs, required in nearly all comb systems, have resisted integration because of their power requirements. Here, a regime for turnkey operation of soliton microcombs co-integrated with a pump laser is demonstrated and theoretically explained. Significantly, a new operating point is shown to appear from whi…
The wavelength selective linear absorption in communication C-band is investigated in CMOS-processed PECVD silicon nitride rings. In the overcoupled region, the linear absorption loss lowers the on-resonance transmission of a ring resonator and increases its overall quality factor. Both the linear absorption and ring quality factor are maximized near 1520 nm. The direct heating by phonon absorption leads to thermal optical bistable switching in PECVD silicon nitride based microring resonators. We calibrate the linear absorption rate in the microring resonator by measuring its transmission line…
A leaky-wave antenna at optical frequencies is designed and integrated with a ring resonator at 1550 nm wavelength. The leaky wave is generated by using periodic perturbations in the integrated dielectric waveguide that excite the -1 spatial harmonic. The antenna consists of a dielectric waveguides with semiconductor corrugations, and it is compatible with CMOS fabrication technology. We show that integrating the leaky wave antenna in an optical ring resonator that is fed by directional couplers, we can improve the electronic control of the radiation through carrier injection into the semicond…
Integrated photonics operating at visible-near-infrared (VNIR) wavelengths offer scalable platforms for advancing optical systems for addressing atomic clocks, sensors, and quantum computers. The complexity of free-space control optics causes limited addressability of atoms and ions, and this remains an impediment on scalability and cost. Networks of Mach-Zehnder interferometers can overcome challenges in addressing atoms by providing high-bandwidth electro-optic control of multiple output beams. Here, we demonstrate a VNIR Mach-Zehnder interferometer on lithium niobate on sapphire with a CMOS…
A novel method for the calculation of eigenfrequencies of non-uniformly filled spherical cavity resonators is developed. The impact of the system symmetry on the electromagnetic field distribution as well as on its degrees of freedom (the set of resonant modes) is examined. It is shown that in the case of angularly symmetric cavity, regardless of its radial non-uniformity, the set of resonator modes is, as anticipated, a superposition of TE and TM oscillations which can be described in terms of a single scalar function independently of each other. The spectrum is basically determined through t…
Photonic integrated circuits that exploit nonlinear optics in order to generate and process signals all-optically have achieved performance far superior to that possible electronically - particularly with respect to speed. We review the recent achievements based in new CMOS-compatible platforms that are better suited than SOI for nonlinear optics, focusing on radio frequency (RF) and microwave based applications that exploit micro-resonator based frequency combs. We highlight their potential as well as the challenges to achieving practical solutions for many key applications. These material sy…
Narrowband and high-rate entangled photon-pair generation from a high-Q silicon microring resonator
NTT Basic Research Laboratories（NTT基础研究所）；Graduate School of Engineering, Hokkaido University（北海道大学大学院工学研究科）；NTT Device Technology Laboratories（NTT器件技术研究所）；NTT Nanophotonics Center（NTT纳米光子学中心）
As photonics breaks away from today's device level toward large scale of integration and complex systems-on-a-chip, concepts like monitoring, control and stabilization of photonic integrated circuits emerge as new paradigms. Here, we show non-invasive monitoring and feedback control of high quality factor silicon photonics resonators assisted by a transparent light detector directly integrated inside the cavity. Control operations are entirely managed by a CMOS microelectronic circuit, hosting many parallel electronic read-out channels, that is bridged to the silicon photonics chip. Advanced f…
Due to their capacity for non-classical light generation, high-efficiency second-order nonlinear parametric processes play an important role in quantum photonic technology, and chip-scale realization of these processes is recognized as the key to building efficient light sources for integrated quantum photonic circuits. To achieve ultra-high nonlinear conversion efficiency, traditional method uses quasi-phase matching (QPM) technology. However, QPM requires electric field poling, which is incompatible with the CMOS fabrication process, and this hinders the wafer-scale production of integrated …
A $Q$-enhancement strategy for racetrack microresonators is put forward. The design is based on the modification of the resonator geometry in order to mitigate the two main sources of radiation loss in the presence of curved waveguides: the discontinuities at the junctions between straight waveguides and the bent sections, and the continuous loss at the curved waveguide sectors. At the same time, the modifications of the geometry do not affect the versatility of coupling of racetrack resonators in integrated optical circuits, which is their main advantage over ring microresonators. The proposa…
We demonstrate a photonic RF Hilbert transformer for broadband microwave in-phase and quadrature-phase generation based on an integrated frequency optical comb, generated using a nonlinear microring resonator based on a CMOS compatible, high-index contrast, doped-silica glass platform. The high quality and large frequency spacing of the comb enables filters with up to 20 taps, allowing us to demonstrate a quadrature filter with more than a 5-octave (3 dB) bandwidth and an almost uniform phase response.
We present germanium microdisk optical resonators under a large biaxial tensile strain using a CMOS-compatible fabrication process. Biaxial tensile strain of ~0.7% is achieved by means of a stress concentration technique that allows the strain level to be customized by carefully selecting certain lithographic dimensions. The partial strain relaxation at the edges of a patterned germanium microdisk is compensated by depositing compressively stressed silicon nitride layer. Two-dimensional Raman spectroscopy measurements along with finite-element method simulations confirm a relatively homogeneou…
We report a novel geometry for OPOs based on nonlinear microcavity resonators. This approach relies on a self-locked scheme that enables OPO emission without the need for thermal locking of the pump laser to the microcavity resonance. By exploiting a CMOS-compatible microring resonator, we achieve oscillation with a complete absence of shutting down, or self-terminating behavior, a very common occurrence in externally pumped OPOs. Further, this scheme consistently produces very wide bandwidth (>300nm, limited by our experimental set-up) combs that oscillate at a spacing of the FSR of the micro…
We report on the realization and optical characterization of a CMOS-compatible silicon-based microresonator/waveguide coupled system, fully integrated on a silicon chip. The device uses a vertical coupling scheme between the resonator and a buried strip waveguide. We demonstrate that its high optical quality follows from the accurate planarization of the waveguide topography. More importantly, we demonstrate a wafer-scale mass fabrication of freestanding planar resonators suspended in air and coupled to the integrated bus waveguides. A nanometer control of the coupling distances allows for a p…
A simple but efficient approach for the synthesis of transmission-type wideband polarization converters is presented. The proposed configuration comprises multilayer metasurfaces including resonant particles which are progressively rotated layer by layer. The progressive rotation of the particles allows for a polarization conversion over a large frequency band. The polarizing structure is efficiently designed and optimized through a transmission line model approach handling the cascade of anisotropic impedance layers and dielectrics. An optimized 8-layers design based on gradually rotated dipo…
We report enhanced nonlinear optics in nanowires, waveguides, and ring resonators by introducing layered two-dimensional (2D) graphene oxide (GO) films through experimental demonstration. The GO films are integrated on silicon-on-insulator nanowires (SOI), high index doped silica glass, and silicon nitride (SiN) waveguides and microring resonators (MRRs), to demonstrate an improved optical nonlinearity including Kerr nonlinearity and four-wave mixing (FWM). By using a large-area, transfer-free, layer-by-layer GO coating method with photolithography and lift-off processes, we integrate GO films…
All-optical devices are essential for next generation ultrafast, ultralow-power and ultrahigh bandwidth information processing systems. Silicon microring resonators (SiMRR) provide a versatile platform for all-optical switching and CMOS-compatible computing, with added advantages of high Q-factor, tunability, compactness, cascadability and scalability. A detailed theoretical analysis of ultrafast all-optical switching 2 x 2 SiMRRs has been carried out incorporating the effects of two photon absorption induced free-carrier injection and thermo optic effect. The results have been used to design …
Integrated waveguide polarizers and polarization-selective micro-ring resonators (MRRs) incorporated with graphene oxide (GO) films are experimentally demonstrated. CMOS-compatible doped silica waveguides and MRRs with both uniformly coated and patterned GO films are fabricated based on a large-area, transfer-free, layer-by-layer GO coating method that yields precise control of the film thickness. Photolithography and lift-off processes are used to achieve photolithographic patterning of GO films with precise control of the placement and coating length. Detailed measurements are performed to c…
The integration of a leaky-wave antenna with a ring resonator is presented using analytical guided wave models. The device consists of a ring resonator fed by a directional coupler, where the ring resonator path includes a leaky-wave antenna segment. The resonator integration provides two main advantages: the high-quality factor ensures effective control of radiation intensity by controlling the resonance conditions and the efficient radiation from a leaky-wave antenna even when its length is much smaller than the propagation length of the leaky wave. We devise an analytical model of the guide…
A uniaxial chiral metamaterial is constructed by double-layered four "U" split ring resonators mutually twisted by 90 degrees. It shows a giant optical activity and circular dichroism. The retrieval results reveal that a negative refractive index is realized for circularly polarized waves due to the large chirality. The experimental results are in good agreement with the numerical results.
Polarizers and polarization selective resonant cavities (e.g., ring resonators, gratings), are key components for applications to photography, coherent optical detection, polarization-division-multiplexing, optical sensing and liquid crystal displays. We demonstrate waveguide polarizers and polarization discriminating micro-ring resonators (MRRs) by integrating them with 2D graphene oxide (GO) layered thin films. We achieve precise control of the thickness, placement, and size of the films integrated onto photonic devices with a solution based, layer-by-layer transfer-free coating method combi…
Electrically tunable devices contribute significantly to key functions of photonics integrated circuits. Here, we demonstrate the tuning of the optical index of refraction based on hybrid integration of multi-layered anisotropic GaGeTe on a silicon micro-ring resonator (Si-MRR). Under static applied (DC) bias and transverse-electric (TE) polarization, the device exhibits a linear resonance shift without any amplitude modulation. However, for the transverse-magnetic (TM) polarization, both amplitude and phase modulation are observed. The corresponding wavelength shift and half-wave voltage leng…
We theoretically investigate and optimize the performance of four-wave mixing (FWM) in microring resonators (MRRs) integrated with two-dimensional (2D) layered graphene oxide (GO) films. Owing to the interaction between the MRRs and the highly nonlinear GO films as well as to the resonant enhancement effect, the FWM efficiency in GO-coated MRRs can be significantly improved. Based on previous experiments, we perform detailed analysis for the influence of the GO film parameters and MRR coupling strength on the FWM conversion efficiency (CE) of the hybrid MRRs. By optimizing the device parameter…
Monolithic Integration of Piezo-Optomechanical Photonics and CMOS Electronics
The MITRE Corporation（MITRE公司）；Electrical, Computer, and Energy Engineering, University of Colorado Boulder（科罗拉多大学博尔德分校电气、计算机和能源工程学院）；Sandia National Laboratories（桑迪亚国家实验室）；Wyant College of Optical Sciences, University of Arizona（亚利桑那大学怀恩特光学科学学院）；Research Laboratory of Electronics, Massachusetts Institute of Technology（麻省理工学院电子研究实验室）
A radial transverse resonance model for two cylindrical concentric layers with different complex dielectric constants is presented. An inverse problem with four unknowns - 3 physical material parameters and one dimensional dielectric layer thickness parameter- is solved by employing TE110 and TE210 modes with different radial field distribution. First a Newton-Raphson algorithm is used to solve a least square problem with a Lorentzian function (as resonance model and "measured" data generator). Then found resonance frequencies and quality factors are used in a second inverse Newton-Raphson alg…
Ultrashort pulsed lasers, operating through the phenomenon of mode-locking, have played a significant role in many facets of our society for 50 years, for example in the way we exchange information, measure and diagnose diseases, process materials and in many other applications. The ability to phase-lock the modes of the high-quality resonators recently exploited to demonstrate optical combs, would allow mode-locked lasers to benefit from their high optical spectral quality in order to realize novel sources such as precision optical clocks for applications to metrology, telecommunications, mic…
We review our recent progresses on frequency conversion in integrated devices, focusing primarily on experiments based on strip-loaded and quantum-well intermixed AlGaAs waveguides, and on CMOS-compatible high-index doped silica glass waveguides. The former includes both second- and third-order interactions, demonstrating wavelength conversion by tunable difference-frequency generation over a bandwidth of more than nm, as well as broadband self-phase modulation and tunable four-wave mixing. The latter includes four-wave mixing using low-power continuous-wave light in microring resonators as we…
It was usually assumed that the resonator based on a waveguide has the eigen oscillations that are formed by interference of two waves which propagate in different directions and have equal amplitudes. These patterns are usually called standing waves. We have shown that the eigen oscillations of a resonator which is filled by a layered dielectric can be base on the evanescent (non-propagating) waves. In some cases we need only one eigen wave to compose the eigen oscillation of a closed cavity.
The nonlinear interaction of waves in PT-symmetric periodic stacks with an embedded nonlinear anisotropic dielectric layer illuminated by plane waves of two tones is examined. The three-wave interaction technique is applied to study the nonlinear processes. It is shown that the intensity of the three-wave mixing process can be significantly enhanced in resonant cavities based on PT-symmetric periodic structures, especially as the pumping wave frequency is near the coherent perfect absorber-lasing resonances. The main mechanisms and properties of the combinatorial frequency generation and emiss…
Up-to-date network telemetry is the key enabler for resource optimization by capacity scaling, fault recovery, and network reconfiguration among other means. Reliable optical performance monitoring in general and, specifically, the monitoring of the spectral profile of WDM signals in fixed- and flex- grid architectures across the entire C-band, remains challenging. This article describes a two-stage spectrometer architecture amenable to integration on a single chip that can measure quantitatively the spectrum across the entire C-band with a resolution of 1 GHz approximately. The first stage co…
Laser stabilization sits at the heart of many precision scientific experiments and applications, including quantum information science, metrology and atomic timekeeping. These systems narrow the laser linewidth and stabilize the carrier by use of Pound-Drever-Hall (PDH) locking to a table-scale, ultra-high quality factor (Q), vacuum spaced Fabry-Perot reference cavity. Integrating these cavities, to bring characteristics of PDH stabilization to the chip-scale, is critical to reduce their size, cost, and weight, and enable a wide range of portable and system-on-chip applications. We report a si…
We demonstrate a stable CMOS-compatible on-chip multiple-wavelength source by filtering and modulating individual lines from a frequency comb generated by a microring resonator optical parametric oscillator.. We show comb operation in a low-noise state that is stable and usable for many hours. Bit-error rate measurements demonstrate negligible power penalty from six independent frequencies when compared to a tunable diode laser baseline. Open eye diagrams confirm the fidelity of the 10 Gb/s data transmitted at the comb frequencies and the suitability of this device for use as a fully integrate…
We demonstrate on chip generation of correlated pairs of photons in the near-visible spectrum using a CMOS compatible PECVD Silicon Nitride photonic device. Photons are generated via spontaneous four wave mixing enhanced by a ring resonator with high quality Q-factor of 320,000 resulting in a generation rate of 950,000 $\frac{pairs}{mW}$. The high brightness of this source offers the opportunity to expand photonic quantum technologies over a broad wavelength range and provides a path to develop fully integrated quantum chips working at room temperature.
Chip-Scale, Sub-Hz Fundamental Sub-kHz Integral Linewidth 780 nm Laser through Self-Injection-Locking a Fabry-Pérot laser to an Ultra-High Q Integrated Resonator
We demonstrate heralded single photon generation in a CMOS-compatible silicon nanophotonic device. The strong modal confinement and slow group velocity provided by a coupled resonator optical waveguide (CROW) produced a large four-wave-mixing nonlinearity coefficient gamma_eff ~4100 W^-1 m^-1 at telecommunications wavelengths. Spontaneous four-wave-mixing using a degenerate pump beam at 1549.6 nm created photon pairs at 1529.5 nm and 1570.5 nm with a coincidence-to-accidental ratio exceeding 20. A photon correlation measurement of the signal (1529.5 nm) photons heralded by the detection of the…
Blue to Near-IR Integrated PZT Silicon Nitride Modulators for Quantum and Atomic Applications
University of California Santa Barbara（加州大学圣塔芭芭拉分校）；National Institute of Standards and Technology（美国国家标准与技术研究院）；University of Colorado, Boulder（科罗拉多大学博尔德分校）；Lightmatter, Inc.（光启有限公司）；U.S. Army Combat Capabilities Development Command Army Research Laboratory（美国陆军作战能力发展司令部陆军研究实验室）；DRS Daylight Solutions（DRS日光解决方案公司）
Silicon nitride (SiN) photonics platform has attributes of ultra-low linear and nonlinear propagation losses and CMOS-compatible fabrication process, promising large-scale multifunctional photonic circuits. However, the centrosymmetric nature of SiN inhibits second-order nonlinear optical responses in its photonics platform, which is desirable for developing efficient nonlinear active devices. Here, we demonstrate high-efficiency second-order nonlinear processes in SiN photonics platform by integrating a few-layer GaSe flake on a SiN microring resonator. With the pump of microwatts continuous-…
We consider transmission band edge resonance in periodic layered structures involving birefringent layers. Previously we have shown that the presence of birefringent layers with misaligned in-plane anisotropy can dramatically enhance the performance of the photonic-crystal Fabry-Perot resonator. It allows to reduce its size by an order of magnitude without compromising on its performance. The key characteristic of the enhanced photonic-crystal cavity is that its Bloch dispersion relation displays a degenerate photonic band edge, rather than only regular ones. This can be realized in specially …
Optically active defects in 2D materials, such as hexagonal boron nitride (hBN) and transition metal dichalcogenides (TMDs), are an attractive class of single-photon emitters with high brightness, room-temperature operation, site-specific engineering of emitter arrays, and tunability with external strain and electric fields. In this work, we demonstrate a novel approach to precisely align and embed hBN and TMDs within background-free silicon nitride microring resonators. Through the Purcell effect, high-purity hBN emitters exhibit a cavity-enhanced spectral coupling efficiency up to $46\%$ at …
