A $Q$-enhancement strategy for racetrack microresonators is put forward. The design is based on the modification of the resonator geometry in order to mitigate the two main sources of radiation loss in the presence of curved waveguides: the discontinuities at the junctions between straight waveguides and the bent sections, and the continuous loss at the curved waveguide sectors. At the same time, the modifications of the geometry do not affect the versatility of coupling of racetrack resonators in integrated optical circuits, which is their main advantage over ring microresonators. The proposal is applied to the design of high-$Q$ racetrack resonators for the silicon nitride CMOS-compatible platform having bent radii amenable for large-scale photonic integration. Numerical calculations show over $100\%$ improvement of the $Q$ factor in $\text{Si}_3\text{N}_4/\text{SiO}_2$ resonators.
Among various plasmonic waveguides, the metal-insulator-metal (MIM) type is the most promising for true subwavelength photonic integration. To date, many photonic devices based on MIM waveguides have been investigated, including resonators. However, most of the reported MIM ring resonators suffer from low extinction ratios. In this paper, we present a comprehensive analysis of the intrinsic reasons for the low performance of MIM ring resonators, and give the analytical transmission relation for a universal all-pass ring resonator which has coupling loss. Based on the analysis we propose the pl…
Using in-resonator photoconductive heaters to both sense and control the intra-cavity light intensity of microring resonators, automatic tuning of a silicon-on-insulator two-ring Vernier filter is demonstrated across the entire C-band.
In this paper, we propose a novel design of dielectric laser-driven accelerator (DLA) utilizing evanescent electric field of racetrack ring resonator structures. Driven by laser light with the correctly designed optical phase window, sustained acceleration of electrons with controlled deflection is shown. Based on this design, we calculate an acceleration from 30 keV to 148.312 keV in 104.655 μm using a cascaded 11-stage racetrack ring resonators. This new idea poses a solution for on-chip integration of many DLA stages, while maintains high average accelerating gradients, providing a potentia…
Ultra-high-Q resonators are fundamentally important to optics and microwave photonics. Up to now, it is still very challenging to boost the Q factor while maintaining a compact size for a resonator. Herein, we proposed and demonstrated an ultra-high-Q silicon-nitride (Si3N4) racetrack resonator with uniform multi-mode Si3N4 photonic waveguides. It consists of two multi-mode straight waveguides connected by two multi-mode waveguide bends (MWBs). In particular, the MWBs are based on modified Euler curves, and a multi-mode straight waveguide directional coupler is used for the fundamental mode co…
Kerr nonlinearity based frequency combs and solitons have been generated from on-chip optical microresonators with high quality factors and global or local anomalous dispersion. However, fabrication of such resonators usually requires materials and/or processes that are not standard in semiconductor manufacturing facilities. Moreover, in certain frequency regimes such as visible and ultra-violet, the large normal material dispersion makes it extremely difficult to achieve anomalous dispersion. Here we present a concentric racetrack-shaped resonator that achieves anomalous dispersion in a 300 n…
The observation of the electro-optic effect in strained silicon waveguides has been considered as a direct manifestation of an induced $χ^{(2)}$ non-linearity in the material. In this work, we perform high frequency measurements on strained silicon racetrack resonators. Strain is controlled by a mechanical deformation of the waveguide. It is shown that any optical modulation vanishes independently of the applied strain when the applied voltage varies much faster than the carrier effective lifetime, and that the DC modulation is also largely independent of the applied strain. This demonstrates …
Due to their capacity for non-classical light generation, high-efficiency second-order nonlinear parametric processes play an important role in quantum photonic technology, and chip-scale realization of these processes is recognized as the key to building efficient light sources for integrated quantum photonic circuits. To achieve ultra-high nonlinear conversion efficiency, traditional method uses quasi-phase matching (QPM) technology. However, QPM requires electric field poling, which is incompatible with the CMOS fabrication process, and this hinders the wafer-scale production of integrated …
Q-enhanced racetrack micro-resonators for the silicon nitride photonics integration platform have been designed, fabricated and characterized. The proposed geometries permit to mitigate the impact of radiation loss at curved waveguides, one of the major limitations of silicon nitride circuits, therefore providing an increase of the intrinsic Q factor of micro-resonators when compared with the conventional structures with the same bent radii. The schemes put forward in this work permit a reduction of the size of the devices that has a direct impact on the integration scale in this platform. Whe…
We demonstrate waveguide-coupled titanium dioxide (TiO2) racetrack resonators with loaded quality factors of 2x10^4 for the visible wavelengths. The structures were fabricated in sputtered TiO2 thin films on oxidized silicon substrates using standard top-down nanofabrication techniques, and passively probed in transmission measurements using a tunable red laser. Devices based on this material could serve as integrated optical elements as well as passive platforms for coupling to visible quantum emitters.
We demonstrate conversion of up to 4.5 GHz-frequency microwaves to 1500 nm-wavelength light using optomechanical interactions on suspended thin-film lithium niobate. Our method utilizes an interdigital transducer that drives a free-standing 100 $μ$m-long thin-film acoustic resonator to modulate light travelling in a Mach-Zehnder interferometer or racetrack cavity. Owing to the strong microwave-to-acoustic coupling offered by the transducer in conjunction with the strong photoelastic, piezoelectric, and electro-optic effects of lithium niobate, we achieve a half-wave voltage of $V_π$ = 4.6 V an…
We demonstrate efficient second harmonic generation in a quasi-phase-matched, high quality factor ($Q_0 \approx 5.3\times 10^5$) racetrack microresonator. The observed normalized conversion efficiency is about $3.8\%~mW^{-1}$.
We report the first demonstration of integrated electro-optic (EO) phase shifters based on racetrack microresonators on a 3C-silicon-carbide-on-insulator (SiCOI) platform working at near-infrared (NIR) wavelengths. By applying DC voltage in the crystalline axis perpendicular to the waveguide plane, we have observed optical phase shifts from the racetrack microresonators whose loaded quality (Q) factors are ~ 30,000. We show voltage length-product (V$π$${\cdot}$L$π$) of 118 V${\cdot}$cm, which corresponds to an EO coefficient r$_{41}$ of 2.6 pm/V. The SiCOI platform can be used to realize tunab…
We present a novel platform to construct high-performance nanophotonic devices in low refractive index dielectric films at telecoms wavelengths. The formation of horizontal slots by PECVD deposition of high index amorphous silicon provides a convenient and low-cost way to tailor nanophotonic devices to application needs. Low propagation loss of less than 2 dB/cm is obtained allowing us to fabricate optical resonators with measured high optical quality factors exceeding 10^5. We design and experimentally demonstrate on-chip grating couplers to efficiently couple light into integrated circuitry …
Tapered silica fibers are often used to rapidly probe the optical properties of micro-resonators. However, their low refractive index precludes phase-matching when coupling to high-index micro-resonators, reducing efficiency. Here we demonstrate efficient optical coupling from tapered fibers to high-index micro-resonators by loading the fibers with an ancillary adiabatic waveguide-coupler fabricated via angled-etching. We demonstrate greatly enhanced coupling to a silicon multimode micro-resonator when compared to coupling via the bare fiber only. Signatures of resonator optical bistability ar…
An optical resonator is often called fully tunable if its tunable range exceeds the spectral interval that contains the resonances at all the characteristic modes of this resonator. For the high Q-factor spheroidal and toroidal microresonators, this interval coincides with the azimuthal free spectral range. In this Letter, we demonstrate the first mechanically fully tunable spheroidal microresonator created of a silica microbubble having a 100 micron order radius and a micron order wall thickness. The tunable bandwidth of this resonator is more than two times greater than its azimuthal free sp…
An integrated photonic platform is proposed for strong interactions between atomic beams and annealing-free high-quality-factor (Q) microresonators. We fabricated a thin-film, air-clad SiN microresonator with a loaded Q of $1.55\times10^6$ around the optical transition of $^{87}$Rb at $~780$ nm. This Q is achieved without annealing the devices at high temperatures, enabling future fully integrated platforms containing optoelectronic circuitry as well. The estimated single-photon Rabi frequency (2g) is ${2\boldsymbolπ}\times$64 MHz at a height of 100 nm above the resonator. Our simulation resul…
We propose and demonstrate a dispersion control technique by combination of different waveguide cross sections in an aluminum nitride micro-ring resonator. Narrow and wide waveguides with normal and anomalous dispersion, respectively, are linked with tapering waveguides and enclosed in a ring resonator to produce a total dispersion near zero. The mode-coupling in multimoded waveguides is also effectively suppressed. This technique provides new degrees of freedom and enhanced flexibility in engineering the dispersion of microcomb resonators.
Optical whispering-gallery microresonators are useful tools in microphotonics, and nonlinear optics at very low threshold powers. Here, we present details about the fabrication of ultra-high-Q whispering-gallery-mode resonators made by CO2-laser lathe machining of fused-quartz rods. The resonators can be fabricated in less than one minute and the obtained optical quality factors exceed Q = 10^9. Demonstrated resonator diameters are in the range between 170 μm and 8 mm (free spectral ranges between 390 GHz and 8 GHz). Using these microresonators, a variety of optical nonlinearities are observed…
Owing to their ability to confine electromagnetic energy in ultrasmall dielectric volumes, micro-disk, ring and toroid resonators hold interest for both specific applications and fundamental investigations. Generally, contributions from various loss channels within these devices lead to limited spectral windows (Q-bands) where highest mode Q-factors manifest. Here we describe a strategy for tuning Q-bands using a new class of micro-resonators, named micro-kylix resonators, in which engineered stress within an initially flat disk results in either concave or convex devices. To shift the Q-band …
We report on the design, fabrication and characterization of silica microtoroid based cavity opto-electromechanical systems (COEMS). Electrodes patterned onto the microtoroid resonators allow for rapid capacitive tuning of the optical whispering gallery mode resonances while maintaining their ultrahigh quality factor, enabling applications such as efficient radio to optical frequency conversion, optical routing and switching applications.
We designed an on-chip transformative optic system of a metalens-photonic crystal resonator metasystem on a foundry compatible silicon photonic platform. By adjusting the on-chip metalens' focusing length and mode dimension, the insertion loss between the metalens and the photonic crystal resonator and waveguide structures are minimized through mode-matching. The micro-system does not involve any single mode silicon nanowire waveguide, and thus mechanically robust without any oxide claddings. The proposed microsystem is ideal for miniaturized chemical and biosensors operating in air or solutio…
We present the first observation of optomechanical coupling in ultra-high Q crystalline whispering-gallery-mode (WGM) resonators. The high purity of the crystalline material enables optical quality factors in excess of 10^{10} and finesse exceeding 10^{6}. Simultaneously, mechanical quality factors greater than 10^{5} are obtained, still limited by clamping losses. Compared to previously demonstrated cylindrical resonators, the effective mass of the mechanical modes can be dramatically reduced by the fabrication of CaF2 microdisc resonators. Optical displacement monitoring at the 10^{-18} m/sq…
We report on the efficient design and fabrication of polymeric microracetrack optical resonators for label-free biosensing purposes. Vertically-coupled microresonators immersed in deionised water display high Q-factors (>35000) and finesses up to 25. A surface sensing experiment performed with these microresonators using 5-TAMRA cadaverine as a test molecule demonstrated both the high sensitivity and low detection limit of our device.
Optical microcavities trap light in compact volumes by the mechanisms of almost total internal reflection or distributed Bragg reflection, enable light amplification, and select out specific (resonant) frequencies of light that can be emitted or coupled into optical guides, and lower the thresholds of lasing. Such resonators have radii from 1 to 100 mkm and can be fabricated in a wide range of materials. Devices based on optical resonators are essential for cavity quantum-electro-dynamic experiments, frequency stabilization, optical filtering and switching, light generation, biosensing, and no…
Nonlinear Kerr micro-resonators have enabled fundamental breakthroughs in the understanding of dissipative solitons, as well as in their application to optical frequency comb generation. However, the conversion efficiency of the pump power into a soliton frequency comb typically remains below a few percent. We introduce a hybrid Mach-Zehnder ring resonator geometry, consisting of a micro-ring resonator embedded in an additional cavity with twice the optical path length of the ring. The resulting interferometric back coupling enables to achieve an unprecedented control of the pump depletion: pu…
A liquid filled, low refractive index material inner-coated silica micro-tube has been proposed and studied as a coupled micro-resonator sensor to greatly enhance biochemical sensor sensitivity. Its unique coupling phenomenon has been analyzed and utilized to boost the refractive index sensitivity of the device to 967nm/RIU. Through optimization of the coupling strength between the two microresonators, further improvement in refractive index sensitivity up to 1100nm/RIU has been achieved. This mode coupling strategy allows us to design robust, thick-walled micro-tube sensors with ultra-high se…
We report a novel geometry for OPOs based on nonlinear microcavity resonators. This approach relies on a self-locked scheme that enables OPO emission without the need for thermal locking of the pump laser to the microcavity resonance. By exploiting a CMOS-compatible microring resonator, we achieve oscillation with a complete absence of shutting down, or self-terminating behavior, a very common occurrence in externally pumped OPOs. Further, this scheme consistently produces very wide bandwidth (>300nm, limited by our experimental set-up) combs that oscillate at a spacing of the FSR of the micro…
In the context of quantum integrated photonics, this work investigates the quantum properties of light generated by silicon and silicon nitride micro-resonators pumped in pulsed regime. The developed theoretical model, performed in terms of the morphing supermodes, provides a comprehensive description of the generated quantum states. Remarkably, it shows that a full measurement of states carrying optimal squeezing levels is not accessible to standard homodyne detection, thus leaving hidden part of generated quantum features. By presenting and discussing this behaviour, as well as possible stra…
We demonstrate that linear absorption coefficient (LAC) of a graphene-silicon hybrid waveguide (GSHW) is determined by the optical transmission spectra of a graphene coated symmetrically coupled add-drop silicon microring resonator (SC-ADSMR), of which the value is around 0.23 dB/um. In contrast to the traditional cut-back method, the measured results are not dependent on the coupling efficiency of the fiber tip and the waveguide. Moreover, precision evaluation of graphene coated silicon microring resonator (SMR) is crucial for the optoelectronic devices targeting for compact footprint and low…
Microcombs -- optical frequency combs generated in coherently-driven nonlinear microresonators -- have attracted significant attention over the last decade. The ability to generate two such combs in a single resonator device has in particular enabled a host of applications from spectroscopy to imaging. Concurrently, novel comb generation techniques such as synchronous pulsed driving have been developed to enhance the efficiency and flexibility of microcomb generation. Here we report on the first experimental demonstration of dual-microcomb generation via synchronous pulsed pumping of a single …
We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q)-factors of the fabricated microresonators are measured to be 4.2x10^4 at wavelengths near 1550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates formation of on-chip microresonators on various kinds of bulk crystalline material…
Optical frequency combs have recently been demonstrated in micro--resonators through nonlinear Kerr processes. Investigations in the past few years provided better understanding of micro--combs and showed that spectral span and mode locking are governed by cavity spectrum and dispersion. While various cavities provide unique advantages, dispersion engineering has been reported only for planar waveguides. In this Letter, we report a resonator design that combines dispersion control, mode crossing free spectrum, and ultra--high quality factor. We experimentally show that as the dispersion of a M…
Highly reproducible manufacturing of organic optical crystals with well-defined geometry and dimension is important to realize industrially relevant all-organic microelectronic and nanophotonic components, and photonic integrated circuits. Here, we demonstrate programmed shape and size alteration of perylene crystal resonators into disk and rectangular geometries using focused-ion beam milling technique. Due to highly reproducible nature of the employed technique, the fabricated smaller sized disk and rectangular crystal resonators displaying shape and size dependent optical modes are suitable…
We report on four-wave mixing in a silicon microring resonator using a self-pumping scheme instead of an external laser. The ring resonator is inserted in an external-loop cavity with a fibered semiconductor amplifier as a source of gain. The silicon microring acts as a filter and we observe lasing in one of the microring's resonances. We study correlations between signal and idler generated beams using a Joint Spectral Density experiment.
We demonstrate an ultralow loss monolithic integrated lithium niobate photonic platform consisting of dry-etched subwavelength waveguides. We show microring resonators with a quality factor of 10$^7$ and waveguides with propagation loss as low as 2.7 dB/m.
In this paper, a new design of optical delay line based on coupled ring resonators in photonic crystals is proposed and analyzed by means of numerical simulation in CST Microwave Studio. The performance of the proposed photonic crystal ring resonator (PhCRR) based coupled resonant optical waveguide (CROW) is compared to: point-defect cavity based coupled cavity waveguides (CCW) in photonic crystal. microring resonator (MRR) based CROW. The suggested design addresses compactness issues of the MRR CROW while offering normalized delay values better than CCW and comparable to MRR CROW. The PhCRR C…
We demonstrate a phase-selective and colorless quantum receiver assisted by a silicon-on-insulator microring, enabling a low 1.3% QBER at 5.3kb/s secure-key rate. No penalty incurs compared to a delay interferometer. BiCMOS 3D-integration is proven feasible.
We present theoretical estimates for a high-speed, low-loss, all-optical transistor using a micro-resonator device, whose fields interact evanescently with Rubidium vapor. We use a four-level electromagnetically induced absorption scheme to couple the light fields of the transistor. We show results indicating that a weak control beam can switch a much stronger signal beam, with contrast of greater than 25 dB and loss less than 0.5 dB. The switching timescale is on the order of 100 ps.
We demonstrate the use of integrated micro-resonator based optical frequency comb sources as the basis for transversal filtering functions for microwave and radio frequency photonic filtering and advanced functions.
