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arXiv 2002.00705physics.app-ph
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基于CO2和CH4的金属-有机骨架传感层的860 MHz无线声表面波传感器

An 860 MHz Wireless Surface Acoustic Wave Sensor with a Metal-Organic Framework Sensing Layer for CO2 and CH4

Jagannath Devkota, David W. Greve, Tao Hong, Ki-Joong Kim, Paul R. Ohodnicki

备注：
8 pages, accepted to publish in IEEE Sensors Journal
发表信息：
IEEE Sensors Journal, 2020
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摘要：

具有纳米多孔金属有机框架（MOF）传感层的无线和无源表面声波（SAW）器件在诸如能源工业和空气污染控制的许多领域中是有吸引力的气体传感器。在这里，我们报告提高灵敏度和检测限的沸石咪唑骨架-8（ZIF-8）的MOF涂层SAW反射延迟线质量传感器，通过增加工作频率的敏感检测二氧化碳（CO2）和甲烷（CH 4）在环境条件下。特别是，我们显示了至少四倍的灵敏度的860 MHz（4 μm周期）SAW反射延迟线涂有240 nm厚的ZIF-8相比，430 MHz（8 μm周期），否则相同的传感器设备的灵敏度目标气体。高频无线设备对CO2和CH 4的检测限估计分别为0.91 vol-%和7.01 vol-%。更高频率的设备的增强的灵敏度解释的频率相关的声波能量限制。

英文摘要：

Wireless and passive surface acoustic wave (SAW) devices with nanoporous metal-organic framework (MOF) sensing layers are attractive gas sensors for applications in many fields such as energy industries and air pollution control. Here, we report on enhancing the sensitivity and detection limit of zeolitic imidazolate framework-8 (ZIF-8) MOF-coated SAW reflective delay line mass sensors by increasing the operating frequency for sensitive detection of carbon dioxide (CO2) and methane (CH4) at ambient conditions. In particular, we show at least four times higher sensitivity of an 860 MHz (4-μm periodicity) SAW reflective delay line coated with a 240 nm thick ZIF-8 compared to the sensitivity of a 430 MHz (8-μm periodicity) otherwise identical sensor device to the targeted gases. The detection limits of the higher frequency wireless devices for CO2 and CH4 were estimated to be 0.91 vol-% and 7.01 vol-%, respectively. The enhanced sensitivity for higher frequency devices is explained in terms of the frequency dependent acoustic wave energy confinement.

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