Thermal Kinetic Inductance Detectors for millimeter-wave detection
Albert Wandui, Jamie Bock, Clifford Frez, Matthew Hollister, Lorenzo Minutolo, Hien Nguyen, Bryan Steinbach, Anthony Turner, Jonas Zmuidzinas, Roger O'Brient
Thermal Kinetic Inductance Detectors (TKIDs) combine the excellent noise performance of traditional bolometers with a radio frequency multiplexing architecture that enables the large detector counts needed for the next generation of millimeter-wave instruments. In this paper, we first discuss the expected noise sources in TKIDs and derive the limits where the phonon noise contribution dominates over the other detector noise terms: generation-recombination, amplifier, and two-level system (TLS) noise. Second, we characterize aluminum TKIDs in a dark environment. We present measurements of TKID resonators with quality factors of about $10^5$ at 80 mK. We also discuss the bolometer thermal conductance, heat capacity, and time constants. These were measured by the use of a resistor on the thermal island to excite the bolometers. These dark aluminum TKIDs demonstrate a noise equivalent power NEP = $2 \times 10^{-17} \mathrm{W}/\mathrm{\sqrt{Hz}} $, with a $1/f$ knee at 0.1 Hz, which provides background noise limited performance for ground-based telescopes observing at 150 GHz.
We present recent developments in Kinetic Inductance Detectors (KID) for large arrays of detectors. The main application is ground-based millimeter wave astronomy. We focus in particular, as a case study, on our own experiment: NIKA (Néel IRAM KID Arrays). NIKA is today the best in-the-field experiment using KID-based instruments, and consists of a dual-band imaging system designed for the IRAM 30 meter telescope at Pico Veleta. We describe in this article, after a general context introduction, the KID working principle and the readout electronics, crucial to take advantage of the intrinsic KI…
In the next decades millimeter and sub-mm astronomy requires large format imaging arrays and broad-band spectrometers to complement the high spatial and spectral resolution of the Atacama Large Millimeter/sub-millimeter Array. The desired sensors for these instruments should have a background limited sensitivity and a high optical efficiency and enable arrays thousands of pixels in size. Hybrid microwave kinetic inductance detectors consisting of NbTiN and Al have shown to satisfy these requirements. We present the second generation hybrid NbTiN-Al MKIDs, which are photon noise limited in both…
The impacts of Cosmic Rays on the detectors are a key problem for space-based missions. We are studying the effects of such interactions on arrays of Kinetic Inductance Detectors (KID), in order to adapt this technology for use on board of satellites. Before proposing a new technology such as the Kinetic Inductance Detectors for a space-based mission, the problem of the Cosmic Rays that hit the detectors during in-flight operation has to be studied in detail. We present here several tests carried out with KID exposed to radioactive sources, which we use to reproduce the physical interactions i…
To use highly resistive material for Kinetic Inductance Detectors (KID), new designs have to be done, in part due to the impedance match needed between the KID chip and the whole 50 ohms readout circuit. Chips from two new hybrid designs, with an aluminum throughline coupled to titanium nitride microresonators, have been measured and compared to a TiN only chip. In the hybrid chips, parasitic temperature dependent box resonances are absent. The dark KID properties have been measured in a large set of resonators. A surprisingly long lifetime, up to 5.6 ms is observed in a few KIDs. For the othe…
We report on the development of Microwave Kinetic Inductance Detectors (MKIDs) using platinum silicide as the sensor material. MKIDs are an emerging superconducting detector technology, capable of measuring the arrival times of single photons to better than two microseconds and their energies to around ten percent. Previously, MKIDs have been fabricated using either sub-stoichiometric titanium nitride or aluminum, but TiN suffers from spatial inhomogeneities in the superconducting critical temperature and Al has a low kinetic inductance fraction, causing low detector sensitivity. To address th…
The kinetic inductance detector (KID) is a versatile and scalable detector technology with a wide range of applications. These superconducting detectors offer significant advantages: simple and robust fabrication, intrinsic multiplexing that will allow thousands of detectors to be read out with a single microwave line, and simple and low cost room temperature electronics. These strengths make KIDs especially attractive for HEP science via mm-wave cosmological studies. Examples of these potential cosmological observations include studying cosmic acceleration (Dark Energy) through measurements o…
The energy resolution of a single photon counting Microwave Kinetic Inductance Detector (MKID) can be degraded by noise coming from the primary low temperature amplifier in the detector's readout system. Until recently, quantum limited amplifiers have been incompatible with these detectors due to dynamic range, power, and bandwidth constraints. However, we show that a kinetic inductance based traveling wave parametric amplifier can be used for this application and reaches the quantum limit. The total system noise for this readout scheme was equal to ~2.1 in units of quanta. For incident photon…
One of the advantages of kinetic inductance detectors is their intrinsic frequency domain multiplexing capability. However, fabrication imperfections usually give rise to resonance frequency deviations, which create frequency collision and limit the array yield. Here we study the resonance frequency deviation of a 4-inch kilo-pixel lumped-element kinetic inductance detector (LEKID) array using optical mapping. Using the measured resonator dimensions and film thickness, the fractional deviation can be explained within $\pm 25\times 10^{-3}$, whereas the residual deviation is due to variation of…
Microwave Kinetic Inductance Detectors (MKIDs) sensitive to light in the ultraviolet to near-infrared wavelengths are superconducting micro-resonators that are capable of measuring photon arrival times to microsecond precision and estimating each photon's energy. The resolving power of non-membrane MKIDs has remained stubbornly around 10 at 1 $μ$m despite significant improvements in the system noise. Here we show that the resolving power can be roughly doubled with a simple bilayer design without needing to place the device on a membrane, avoiding a significant increase in fabrication complexi…
We have developed a passive 350 GHz (850 μm) video-camera to demonstrate lumped element kinetic inductance detectors (LEKIDs) -- designed originally for far-infrared astronomy -- as an option for general purpose terrestrial terahertz imaging applications. The camera currently operates at a quasi-video frame rate of 2 Hz with a noise equivalent temperature difference per frame of $\sim$0.1 K, which is close to the background limit. The 152 element superconducting LEKID array is fabricated from a simple 40 nm aluminum film on a silicon dielectric substrate and is read out through a single microw…
We develop a simple coordinate transformation which can be employed to compensate for the nonlinearity introduced by a Microwave Kinetic Inductance Detector's (MKID) homodyne readout scheme. This coordinate system is compared to the canonically used polar coordinates and is shown to improve the performance of the filtering method often used to estimate a photon's energy. For a detector where the coordinate nonlinearity is primarily responsible for limiting its resolving power, this technique leads to increased dynamic range, which we show by applying the transformation to data from a hafnium M…
We report on the design and performance of Microwave Kinetic Inductance Detectors (MKIDs) sensitive to single photons in the optical to near-infrared range using hafnium as the sensor material. Our test device had a superconducting transition temperature of 395 mK and a room temperature normal state resistivity of 97 $μΩ$ cm with an RRR = 1.6. Resonators on the device displayed internal quality factors of around 200,000. Similar to the analysis of MKIDs made from other highly resistive superconductors, we find that modeling the temperature response of the detector requires an extra broadening …
Context. Millimetre-wave astronomy is an important tool for both general astrophysics studies and cosmology. A large number of unidentified sources are being detected by the large field-of-view continuum instruments operating on large telescopes. Aims. New smart focal planes are needed to bridge the gap between large bandwidth continuum instruments operating on single dish telescopes and the high spectral and angular resolution interferometers (e.g. ALMA in Chile, NOEMA in France). The aim is to perform low-medium spectral resolution observations and select a lower number of potentially intere…
Following optical pulses ($λ=405~\text{nm}$) on titanium nitride (TiN) Microwave Kinetic Inductance Detectors (MKIDs) cooled down at temperatures $T \le T_c / 20$ ($T_c \simeq 4.6~\text{K}$), we observe a large phase-response highlighting two different modes simultaneously that are nevertheless related. The first corresponds to the well-known transition of cooper-pair breaking into quasi-particles which produces a known phase response. This is immediately followed by a large inverse response lasting several hundreds of microseconds to several milliseconds depending on the temperature. We propo…
We describe optimization of a cryogenic magnetometer that uses nonlinear kinetic inductance in superconducting nanowires as the sensitive element instead of a superconducting quantum interference device (SQUID). The circuit design consists of a loop geometry with two nanowires in parallel, serving as the inductive section of a lumped LC resonator similar to a kinetic inductance detector (KID). This device takes advantage of the multiplexing capability of the KID, allowing for a natural frequency multiplexed readout. The Kinetic Inductance Magnetometer (KIM) is biased with a DC magnetic flux th…
We present a design for an array of kinetic inductance detectors (KIDs) integrated with phased array antennas for imaging at 150 GHz under high background conditions. The microstrip geometry KID detectors are projected to achieve photon noise limited sensitivity with larger than 100 pW absorbed optical power. Both the microstrip KIDs and the antenna feed network make use of a low-loss amorphous silicon dielectric. A new aspect of the antenna implementation is the use of a NbTiN microstrip feed network to facilitate impedance matching to the 50 Ohm antenna. The array has 256 pixels on a 6-inch …
We are developing superconducting Microwave Kinetic Inductance Detectors to operate at near infrared and optical wavelengths for astronomy. In order to efficiently meet with the requirements of astronomical applications, we propose to replace the interdigitated capacitor by a metal, insulator, metal capacitor which has the advantage of presenting a larger capacitance value within a much smaller space. The pixel will occupy a space of typically 100 micrometers by 85 micrometers which is nine times less than a typical pixel size using the interdigitated capacitor operating at the same frequency,…
Microwave Kinetic Inductance Detectors (MKIDs) provide highly multiplexed arrays of detectors that can be configured to operate from the sub-millimeter to the X-ray regime. We have examined two tungsten silicide alloys (W5Si3 and WSi2), which are dense alloys that provide a critical temperature tunable with composition, large kinetic inductance fraction, and high normal-state resistivity. We have fabricated superconducting resonators and provide measurement data on critical temperature, surface resistance, quality factor, noise, and quasiparticles lifetime. Tungsten silicide appears to be prom…
Microwave Kinetic Inductance Detectors (MKIDs) are the most attractive radiation detectors for far-infrared and sub-mm astronomy: They combine ultimate sensitivity with the possibility to create very large detector arrays, in excess of 10 000 pixels. This is possible by reading-out the arrays using RF frequency division multiplexing, which allows multiplexing ratios in excess of 1000 pixels per readout line. We describe a novel readout system for large arrays of MKIDs, operating in a 2 GHz band in the 4-8 GHz range. The readout, which is a combination of a digital front- and back-end and an an…
We present the development of a second generation digital readout system for photon counting microwave kinetic inductance detector (MKID) arrays operating in the optical and near-IR wavelength bands. Our system retains much of the core signal processing architecture from the first generation system, but with a significantly higher bandwidth, enabling readout of kilopixel MKID arrays. Each set of readout boards is capable of reading out 1024 MKID pixels multiplexed over 2 GHz of bandwidth; two such units can be placed in parallel to read out a full 2048 pixel microwave feedline over a 4 -- 8 GH…
We demonstrate photon noise limited performance in both phase and amplitude readout in microwave kinetic inductance detectors (MKIDs) consisting of NbTiN and Al, down to 100 fW of optical power. We simulate the far field beam pattern of the lens-antenna system used to couple radiation into the MKID and derive an aperture efficiency of 75%. This is close to the theoretical maximum of 80% for a single-moded detector. The beam patterns are verified by a detailed analysis of the optical coupling within our measurement setup.
Microwave Kinetic Inductance Detectors (MKIDs) are a class of superconducting cryogenic detectors that simultaneously exhibit energy resolution, time resolution and spatial resolution. The pixel yield of MKID arrays is usually a critical figure of merit in the characterisation of an MKIDs array. Currently, for MKIDs intended for the detection of optical and near-infrared photons, only the best arrays exhibit a pixel yield as high as 75-80%. The uniformity of the superconducting film used for the fabrication of MKIDs arrays is often regarded as the main limiting factor to the pixel yield of an …
Hafnium is an elemental superconductor which crystallizes in a hexagonal close packed structure, has a transition temperature $T_{C} \simeq 400 mK$, and has a high normal state resistivity around $90 μΩ. cm$. In Microwave Kinetic Inductance Detectors (MKIDs), these properties are advantageous since they allow for creating detectors sensitive to optical and near infra-red radiation. In this work, we study how sputter conditions and especially the power applied to the target during the deposition, affect the hafnium $T_{C}$, resistivity, stress, texture and preferred crystal orientation. We find…
We have fabricated an array of subgap kinetic inductance detectors (SKIDs) made of granular aluminum ($T_c\sim$2~K) sensitive in the 80-90 GHz frequency band and operating at 300~mK. We measure a noise equivalent power of $1.3\times10^{-16}$~W/Hz$^{0.5}$ on average and $2.6\times10^{-17}$~W/Hz$^{0.5}$ at best, for an illuminating power of 50~fW per pixel. Even though the circuit design of SKIDs is identical to that of the kinetic inductance detectors (KIDs), the SKIDs operating principle is based on their sensitivity to subgap excitations. This detection scheme is advantageous because it avoid…
Ultrasensitive magnetic field detection is utilized in the fields of science, medicine and industry. We report on a novel magnetometer relying on the kinetic inductance of superconducting material. The kinetic inductance exhibits a non-linear response with respect to DC current, a fact that is exploited by applying magnetic flux through a superconducting loop to generate a shielding current and a change in the inductance of the loop. The magnetometer is arranged into a resonator, allowing readout through a transmission measurement that makes the device compatible with radio frequency multiplex…
Inductance is a key parameter when optimizing the performance of superconducting quantum interference device (SQUID) magnetometers made from the high temperature superconductor YBa$_2$Cu$_3$O$_{7-x}$ (YBCO) because lower SQUID inductance $L$ leads to lower flux noise, but also weaker coupling to the pickup loop. In order to optimize the SQUID design, we combine inductance simulations and measurements to extract the different inductance contributions, and measure the dependence of the transfer function $V_Φ$ and flux noise $S_Φ^{1/2}$ on $L$. A comparison between two samples shows that the kine…
We demonstrate strong negative electrothermal feedback accelerating and linearizing the response of a thermal kinetic inductance detector (TKID). TKIDs are a proposed highly multiplexable replacement to transition-edge sensors and measure power through the temperature-dependent resonant frequency of a superconducting microresonator bolometer. At high readout probe power and probe frequency detuned from the TKID resonant frequency, we observe electrothermal feedback loop gain up to $\mathcal L$ $\approx$ 16 through measuring the reduction of settling time. We also show that the detector respons…
To improve the optical coupling in Microwave Kinetic Inductance Detectors (MKIDs), we investigate the use of a reflective plate beneath the meandered absorber. We designed, fabricated and characterized high-Q factors TiN-based MKIDs on sapphire operating at optical wavelengths with a Au/Nb reflective thin bilayer below the meander. The reflector is set at a quarter-wave distance from the meander using a transparent Al$_2$O$_3$ dielectric layer to reach the peak photon absorption. We expect the plate to recover undetected photons by reflecting them back onto the absorber.
Significant noise improvement in a Kinetic Inductance Phonon-Mediated detector by use of a wideband parametric amplifier
Washington University in St. Louis（圣路易斯华盛顿大学）；SLAC National Accelerator Laboratory（斯坦福直线加速器中心）；California Institute of Technology（加州理工学院）；University of California, Berkeley（加州大学伯克利分校）；Stanford University（斯坦福大学）
Exploring the proximity effect of thin tungsten-aluminum films for phonon-mediated kinetic inductance detectors
INFN - Sezione di Roma（意大利国家核物理研究所罗马分部）；Max-Planck-Institut für Physik（马克斯·普朗克物理研究所）；LIBPhys-UC, Departamento de Fisica, Universidade de Coimbra（科英布拉大学LIBPhys）；Dipartimento di Fisica, Sapienza Università di Roma（罗马第一大学物理系）；Université Grenoble Alpes, CNRS, Grenoble INP, Institut Néel（格勒诺布尔阿尔卑斯大学）
For X-ray imaging spectroscopy, high spatial resolution over a large field of view is often as important as high energy resolution, but current X-ray detectors do not provide both in the same device. Thermal Kinetic Inductance Detectors (TKIDs) are being developed as they offer a feasible way to combine the energy resolution of transition edge sensors with pixel counts approaching CCDs and thus promise significant improvements for many X-ray spectroscopy applications. TKIDs are a variation of Microwave Kinetic Inductance Detectors (MKIDs) and share their multiplexibility: working MKID arrays w…
Context. The Neel IRAM KIDs Array (NIKA) is a fully-integrated measurement system based on kinetic inductance detectors (KIDs) currently being developed for millimeter wave astronomy. In a first technical run, NIKA was successfully tested in 2009 at the Institute for Millimetric Radio Astronomy (IRAM) 30-meter telescope at Pico Veleta, Spain. This prototype consisted of a 27-42 pixel camera imaging at 150 GHz. Subsequently, an improved system has been developed and tested in October 2010 at the Pico Veleta telescope. The instrument upgrades included dual-band optics allowing simultaneous imagi…
We present a novel lab-on-chip technique to measure the very low losses in superconducting transmission lines at (sub-) mm wavelengths. The chips consist of a 100 nm thick NbTiN Coplanar Waveguide (CPW) Fabry Perot (FP) resonator, coupled on one side to an antenna and on the other side to a Microwave Kinetic Inductance detector. Using a single frequency radiation source allows us to measure the frequency response of the FP around 350 GHz and deduce its losses. We show that the loss is dominated by radiation loss inside the CPW line that forms the FP and that it decreases with decreasing line w…
Microwave Kinetic Inductance Detector (MKID) arrays are currently being developed and deployed for astronomical applications in the visible and near infrared and for sub-millimetre astronomy. One of the main drawbacks of MKIDs is that large arrays would exhibit a pixel yield, the percentage of individually distinguishable pixels to the total number of pixels, of 75 - 80 %. Imperfections arising during the fabrication can induce an uncontrolled shift in the resonance frequency of individual resonators which can end up resonating at the same frequency of a different resonator. This makes a numbe…
We describe the fabrication of homogeneous sub-stoichiometric titanium nitride films for microwave kinetic inductance detector (mKID) arrays. Using a 6 inch sputtering target and a homogeneous nitrogen inlet, the variation of the critical temperature over a 2 inch wafer was reduced to <25 %. Measurements of a 132-pixel mKID array from these films reveal a sensitivity of 16 kHz/pW in the 100 GHz band, comparable to the best aluminium mKIDs. We measured a noise equivalent power of NEP = 3.6e-15 W/Hz^(1/2). Finally, we describe possible routes to further improve the performance of these TiN mKID …
We investigate the recovery of superconducting NbN-nanowire photon counters after detection of an optical pulse at a wavelength of 1550 nm, and present a model that quantitatively accounts for our observations. The reset time is found to be limited by the large kinetic inductance of these nanowires, which forces a tradeoff between counting rate and either detection efficiency or active area. Devices of usable size and high detection efficiency are found to have reset times orders of magnitude longer than their intrinsic photoresponse time.
We demonstrate position and energy-resolved phonon-mediated detection of particle interactions in a silicon substrate instrumented with an array of microwave kinetic inductance detectors (MKIDs). The relative magnitude and delay of the signal received in each sensor allows the location of the interaction to be determined with < 1 mm precision at 30 keV. Using this position information, variations in the detector response with position can be removed, and an energy resolution of σ_E = 0.55 keV at 30 keV was measured. Since MKIDs can be fabricated from a single deposited film and are naturally m…
We carry out an experimental feasibility study of a magnetic field sensor based on the kinetic inductance of the high-$T_\mathrm{c}$ superconductor yttrium barium copper oxide. We pattern thin superconducting films into radio-frequency resonators that feature a magnetic field pick-up loop. At 77 K and for film thicknesses down to 75 nm, we observe the persistence of screening currents that modulate the loop kinetic inductance. According to the experimental results the device concept appears attractive for sensing applications in ambient magnetic field environments. We report on a device with a…
Providing a background discrimination tool is crucial for enhancing the sensitivity of next-generation experiments searching for neutrinoless double- beta decay. The development of high-sensitivity (< 20 eV RMS) cryogenic light detectors allows simultaneous read-out of the light and heat signals and enables background suppression through particle identification. The Cryogenic wide- Area Light Detector with Excellent Resolution (CALDER) R&D already proved the potential of this technique using the phonon-mediated Kinetic Inductance Detectors (KIDs) approach. The first array prototype with 4 Alum…
Properties of superconducting nanowires set the performance level for Superconducting Nanowire Single Photon Detectors (SNSPD). Reset time in commonly employed large area SNSPDs,5-10ns,is known to be limited by the nanowires kinetic inductance.On the other hand, reduction of the kinetic inductance in small area (waveguide integrated) SNSPDs prevents biasing them close to the critical current due to latching into a permanent resistive state.In order to reduce the reset time in SNSPDs, superconducting nanowires with both low kinetic inductance and fast electron energy relaxation are required. In…
The next generation of bolometric experiments searching for rave events, in particular for the neutrino-less double beta decay, needs fast, high-sensitivity and easy-to-scale cryogenic light detectors. The CALDER project (2014-2020) developed a new technology for light detection at cryogenic temperature. In this paper we describe the achievements and the final prototype of this project, consisting of a $5\times5$ cm$^2$, 650 $μ$m thick silicon substrate coupled to a single kinetic inductance detector made of a three-layer aluminum-titanium-aluminum. The baseline energy resolution is 34$\pm$1(s…
The non-homogeneity in the critical temperature $T_{c}$ of an Microwave Kinetic Inductance Detector (MKID) could be caused by non-uniformity in the deposition process of the thin superconducting film. This produces low percent yield and frequency collision in the readout of the MKIDs. Here, we show the homogeneity that offers Atomic Layer Deposition (ALD). We report an improvement of up to a factor of 50 in the fractional variation of the $T_{c}$ for TiN MKIDs fabricated with Atomic Layer Deposition in comparison with MKIDs fabricated with sputtering. We measured the critical temperature of 48…
We have measured and compared the response of hybrid NbTiN-Al Microwave Kinetic Inductance Detectors (MKIDs) to changes in bath temperature and illumination by sub-mm radiation. We show that these two stimulants have an equivalent effect on the resonance feature of hybrid MKIDs. We determine an electrical NEP from the measured temperature responsivity, quasiparticle recombination time, superconducting transition temperature and noise spectrum, all of which can be measured in a dark environment. For the two hybrid NbTiN-Al MKIDs studied in detail the electrical NEP is within a factor of two of …
A nanoscale phononic crystal filter (reflector) is designed for a kinetic inductance detector where the reflection band is matched to the quasiparticle recombination phonons with the aim to increase quasiparticle lifetime in the superconducting resonator. The inductor is enclosed by a 1 um wide phononic crystal membrane section with two simple hole patterns that each contain a partial spectral gap for various high frequency phonon modes. The phononic crystal is narrow enough for low frequency thermal phonons to propagate unimpeded. With 3D phonon scattering simulations over a 40 dB attenuation…
We report on the development of Thermal Kinetic Inductance Detectors (TKIDs) suitable to perform X-ray spectroscopy measurements. The aim is to implement MKIDs sensors working in thermal quasi-equilibrium mode to detect X-ray photons as pure calorimeters. The thermal mode is a variation on the MKID classical way of operation that has generated interest in recent years. TKIDs can offer the MKIDs inherent multiplexibility in the frequency domain, a high spatial resolution comparable with CCDs, and an energy resolution theoretically limited only by thermodynamic fluctuations across the thermal we…
Kinetic inductance bolometer (KIB) technology is a candidate for passive sub-millimeter wave and terahertz imaging systems. Its benefits include scalability into large 2D arrays and operation with intermediate cryogenics in the temperature range of 5 -- 10 K. We have previously demonstrated the scalability in terms of device fabrication, optics integration, and cryogenics. In this article, we address the last missing ingredient, the readout. The concept, serial addressed frequency excitation (SAFE), is an alternative to full frequency-division multiplexing at microwave frequencies conventional…
Low temperature Kinetic Inductance Detectors (KIDs) are attractive candidates for producing quantumsensitive, arrayable sensors for astrophysical and other precision measurement applications. The readout uses a low frequency probe signal with quanta of energy well-below the threshold for pair-breaking in the superconductor. We have calculated the detailed non-equilibrium quasiparticle and phonon energy spectra generated by the probe signal of the KID when operating well-below its superconducting transition temperature Tc within the framework of the coupled kinetic equations described by Chang …
We describe sensitive magnetometry using lumped-element resonators fabricated from a superconducting thin film of NbTiN. Taking advantage of the large kinetic inductance of the superconductor, we demonstrate a continuous resonance frequency shift of $27$ MHz for a change in magnetic field of $1.8~μ$T within a perpendicular background field of 60 mT. By using phase-sensitive readout of microwaves transmitted through the sensors, we measure phase shifts in real time with a sensitivity of $1$ degree/nT. We present measurements of the noise spectral density of the sensors, and find their field sen…
We present a measurement of phonon propagation in a silicon wafer utilizing an array of frequency-multiplexed superconducting resonators coupled to a single transmission line. The electronic readout permits fully synchronous array sampling with a per-resonator bandwidth of 1.2 MHz, allowing sub-$μ$s array imaging. This technological achievement is potentially vital in a variety of low-temperature applications, including single-photon counting, quantum-computing and dark-matter searches.
