Two-dimensional (2D) layered materials possess outstanding mechanical, electronic and optical properties, making them ideal materials for nanoelectromechanical applications. The recent discovery of 2D magnetic materials has promised a new class of magnetically active nanoelectromechanical systems (NEMS). Here we demonstrate resonators made of 2D CrI3, whose mechanical resonances depend on the magnetic state of the material. We quantify the underlining effects of exchange and anisotropy magnetostriction by measuring the field dependence of the resonance frequency under a magnetic field parallel and perpendicular to the easy axis, respectively. Furthermore, we show efficient strain tuning of magnetism in 2D CrI3 as a result of the inverse magnetostrictive effect using the NEMS platform. Our results establish the basis for mechanical detection of magnetism and magnetic phase transitions in 2D layered magnetic materials. The new magnetic NEMS may also find applications in magnetic actuation and sensing.
We have used nanoelectromechanical resonators to probe superfluid $^4$He at different temperature regimes, spanning over four orders of magnitude in damping. These regimes are characterized by the mechanisms which provide the dominant contributions to damping and the shift of the resonance frequency: tunneling two level systems at the lowest temperatures, ballistic phonons and rotons at few hundred mK, and laminar drag in the two-fluid regime below the superfluid transition temperature as well as in the normal fluid. Immersing the nanoelectromechanical resonators in fluid increases their effec…
We report the capacitive spring softening effect observed in single-walled carbon nanotube (SWNT) nanoelectromechanical (NEM) resonators. The nanotube resonators adopt dual-gate configuration with both bottom-gate and side-gate capable of tuning the resonance frequency through capacitive coupling. Interestingly, downward resonance frequency shifting is observed with increasing side-gate voltage, which can be attributed to the capacitive softening of spring constant. Furthermore, in-plane vibrational modes exhibit much stronger spring softening effect than out-of-plan modes. Our dual-gate desig…
Tunneling two level systems affect damping, noise and decoherence in a wide range of devices, including nanoelectromechanical resonators, optomechanical systems, and qubits. Theoretically this interaction is usually described within the tunneling state model. The dimensions of such devices are often small compared to the relevant phonon wavelengths at low temperatures, and extensions of the theoretical description to reduced dimensions have been proposed, but lack conclusive experimental verification. We have measured the intrinsic damping and the frequency shift in magnetomotively driven alum…
The low quality factor (Q) of Single-walled carbon nanotube (SWNT) resonators has limited their sensitivity in sensing application. To this end, we employ the technique of parametric amplification by modulating the spring constant of SWNT resonators at twice the resonant frequency, and achieve 10 times Q enhancement. The highest Q obtained at room temperature is around ~700, which is 3-4 times better than previous Q record reported for doubly-clamped SWNT resonators. Furthermore, efficient parametric amplification is found to only occur in the catenary vibration regime. Our results open up the…
The structural flexibility of low dimensional nanomaterials offers unique opportunities for studying the impact of strain on their physical properties and for developing innovative devices utilizing strain engineering. A key towards such goals is a device platform which allows the independent tuning and reliable calibration of the strain. Here we report the fabrication and characterization of graphene nanoelectromechanical resonators(GNEMRs) on flexible substrates. Combining substrate bending and electrostatic gating, we achieve the independent tuning of the strain and sagging in graphene and …
We report on experimental demonstration of a new type of nanoelectromechanical resonators based on black phosphorus crystals. Facilitated by a highly efficient dry transfer technique, crystalline black phosphorus flakes are harnessed to enable drumhead resonators vibrating at high and very high frequencies (HF and VHF bands, up to ~100MHz). We investigate the resonant vibrational responses from the black phosphorus crystals by devising both electrical and optical excitation schemes, in addition to measuring the undriven thermomechanical motions in these suspended nanostructures. Flakes with th…
In this report, we present nanoelectromechanical resonators fabricated with thin exfoliated crystals of a high-T$_c$ cuprate superconductor Bi$_2$Sr$_2$Ca$_1$Cu$_2$O$_{8+δ}$. The mechanical readout is performed by capacitively coupling their motion to a coplanar waveguide microwave cavity fabricated with a superconducting alloy of molybdenum-rhenium. We demonstrate mechanical frequency tunability with external dc-bias voltage, and quality factors up to 36600. Our spectroscopic and time-domain measurements show that mechanical dissipation in these systems is limited by the contact resistance ar…
We propose and analyze the detector of modulated terahertz (THz) radiation based on the graphene field-effect transistor with mechanically floating gate made of graphene as well. The THz component of incoming radiation induces resonant excitation of plasma oscillations in graphene layers (GLs). The rectified component of the ponderomotive force between GLs invokes resonant mechanical swinging of top GL, resulting in the drain current oscillations. To estimate the device responsivity, we solve the hydrodynamic equations for the electrons and holes in graphene governing the plasma-wave response,…
Tuning the frequency of a resonant element is of vital importance in both the macroscopic world, such as when tuning a musical instrument, as well as at the nanoscale. In particular, precisely controlling the resonance frequency of isolated nanoelectromechanical resonators (NEMS) has enabled innovations such as tunable mechanical filtering and mixing as well as commercial technologies such as robust timing oscillators. Much like their electronic device counterparts, the potential of NEMS grows when they are built up into large-scale arrays. Such arrays have enabled neutral-particle mass spectr…
We report an actuation/detection scheme with a top-down nano-electromechanical system for frequency shift-based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for in-plane motion transduction. The process fabrication is fully CMOS compatible. The results show a very large dynamic range (DR) of more than 100dB and an unprecedented signal to background ratio (SBR) of 69dB providing an improvement of two orders of magnitude in the detection efficiency presented in the state of the art in NEMS field. Such a dynamic range r…
Nanoelectromechanical systems (NEMS) are nano-to-micrometer scale mechanical resonators coupled to electronic devices of similar dimensions. NEMS show promise for fast, ultrasensitive force microscopy and for deepening our understanding of how classical dynamics arises by approximation to quantum dynamics. This article begins with a survey of NEMS and then describes certain aspects of their classical dynamics. In particular, we show that for weak coupling the action of the electronic device on the mechanical resonator can be effectively that of a thermal bath, this despite the device being a d…
Experiments over the past years have demonstrated that it is possible to bring nanomechanical resonators and superconducting qubits close to the quantum regime and to measure their properties with an accuracy close to the Heisenberg uncertainty limit. Therefore, it is just a question of time before we will routinely see true quantum effects in nanomechanical systems. One of the hallmarks of quantum mechanics is the existence of entangled states. We propose a realistic scenario making it possible to detect entanglement of a mechanical resonator and a qubit in a nanoelectromechanical setup. The …
Atomically thin two dimensional (2D) layered materials have emerged as a new class of material for nanoelectromechanical systems (NEMS) due to their extraordinary mechanical properties and ultralow mass density. Among them, graphene has been the material of choice for nanomechanical resonator. However, recent interest in 2D chalcogenide compounds has also spurred research in using materials such as MoS2 for NEMS applications. As the dimensions of devices fabricated using these materials shrink down to atomically thin membrane, strain and nonlinear effects have become important. A clear underst…
Measuring thermodynamic quantities can be easy or not, depending on the system that is being studied. For a macroscopic object, measuring temperatures can be as simple as measuring how much a column of mercury rises when in contact with the object. At the small scale of quantum electromechanical systems, such simple methods are not available and invariably detection processes disturb the system state. Here we propose a method for measuring the temperature on a suspended semiconductor membrane clamped at both ends. In this method, the membrane is mediating a capacitive coupling between two tran…
We study the electromechanical transduction in nanoelectromechanical actuators and show that the differences in scaling for electrical and mechanical effects lead to an overall non-trivial scaling behavior. In particular, the previously neglected fringing fields considerably increase electrical forces and improve the stability of nanoscale actuators. This shows that electrostatics does not pose any limitations to downscaling of electromechanical systems, in fact in several respects, nanosystems outperform their microscale counterparts. As a specific example, we consider in-plane actuation of u…
Nanomechanical resonators with increasingly high quality factors are enabled following recent insights into energy storage and loss mechanisms in nanoelectromechanical systems (NEMS). Consequently, efficient, non-dissipative transduction schemes are required to avoid the dominating influence of coupling losses. We present an integrated NEMS transducer based on a microwave cavity dielectrically coupled to an array of doubly-clamped pre-stressed silicon nitride beam resonators. This cavity-enhanced detection scheme allows resolving the resonators' Brownian motion at room temperature while preser…
We study the entangling power of a nanoelectromechanical system (NEMS) simultaneously interacting with two separately trapped ions. To highlight this entangling capability, we consider a special regime where the ion-ion coupling does not generate entanglement in the system, and any resulting entanglement will be the result of the NEMS acting as an entangling device. We study the dynamical behavior of the bipartite NEMS-induced ion-ion entanglement as well as the tripartite entanglement of the whole system (ions+NEMS). We found some quite remarkable phenomena in this hybrid system. For instance…
We investigate dynamical transport properties of interacting electrons moving in a vibrating nanoelectromechanical wire in a magnetic field. We have built an exactly solvable model in which electric current and mechanical oscillation are treated fully quantum mechanically on an equal footing. Quantum mechanically fluctuating Aharonov-Bohm phases obtained by the electrons cause nontrivial contribution to mechanical vibration and electrical conduction of the wire. We demonstrate our theory by calculating the admittance of the wire which are influenced by the multiple interplay between the mechan…
Coupled nanomechanical resonators are interesting for both fundamental studies and practical applications as they offer rich and tunable oscillation dynamics. At present, the mechanical coupling in such systems is often mediated by a fixed geometry, such as a joint clamping point of the resonators or a displacement-dependent force. Here we show a graphene-integrated electromechanical system consisting of two physically separated mechanical resonators -- a comb-drive actuator and a suspended silicon beam -- that are tunably coupled by a graphene membrane. The graphene membrane, moreover, provid…
We present a comprehensive study of thermoelectric transport properties of a quantum nanoelectromechanical system (NEMS) described by a single-electron-transistor (SET) coupled to a quantum nanomechanical resonator (NR). The effects of a quantum NR on the electronic current are investigated with special emphasis on how the SET-NR coupling strength plays a role in such a NEMS. We find that the SET-NR coupling is not only able to suppress or enhance the thermoelectric current but can also switch its direction. The effect of the NR on the thermoelectric coefficients of the SET are studied and we …
Based on a continuum mechanical model for single-layer graphene we propose and analyze a microscopic mechanism for dissipation in nanoelectromechanical graphene resonators. We find that coupling between flexural modes and in-plane phonons leads to linear and nonlinear damping of out-of-plane vibrations. By tuning external parameters such as bias and ac voltages, one can cross over from a linear to a nonlinear-damping dominated regime. We discuss the behavior of the effective quality factor in this context.
We demonstrate that entanglement of two macroscopic nanoelectromechanical resonators -- coupled to each other via a common detector, a tunnel junction -- can be generated by running a current through the device. We introduce a setup that overcomes generic limitations of proposals suggesting to entangle systems via a shared bath. At the heart of the proposal is an Andreev entangler setup, representing an experimentally feasible way of entangling two nanomechanical oscillators. Instead of relying on the coherence of a (fermionic) bath, in the Andreev entangler setup, a split Cooper-pair that coh…
We consider effects of the spin degree of freedom on the nanomechanics of a single-electron transistor (SET) containing a nanometer-sized metallic cluster suspended between two magnetic leads. It is shown that in such a nanoelectromechanical SET(NEM-SET) the onset of an electromechanical instability leading to cluster vibrations and "shuttle" transport of electrons between the leads can be controlled by an external magnetic field. Different stable regimes of this spintronic NEM-SET operation are analyzed. Two different scenarios for the onset of shuttle vibrations are found.
Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapping gas underneath, and electrically integratable. In this letter, we demonstrate fabrication and direct electrical measurement of circular SU-8 polymer-clamped chemical vapor deposition (CVD) graphene drum resonators. The clamping increases device yield and responsivity, while providing a cleaner r…
Graphene nanoribbons provide an opportunity to integrate phase-coherent transport phenomena with nanoelectromechanical systems (NEMS). Due to the strain induced by a deflection in a graphene nanoribbon resonator, coherent electron transport and mechanical deformations couple. As the electrons in graphene have a Fermi wavelength λ~ a_0 = 1.4 Å, this coupling can be used for sensitive displacement detection in both armchair and zigzag graphene nanoribbon NEMS. Here it is shown that for ordered as well as disordered ribbon systems of length L, a strain ε~ (w/L)^2 due to a deflection w leads to a …
We seek the first indications that a nanoelectromechanical system (NEMS) is entering the quantum domain as its mass and temperature are decreased. We find them by studying the transition from classical to quantum behavior of a driven nonlinear Duffing resonator. Numerical solutions of the equations of motion, operating in the bistable regime of the resonator, demonstrate that the quantum Wigner function gradually deviates from the corresponding classical phase-space probability density. These clear differences that develop due to nonlinearity can serve as experimental evidence, in the near fut…
We report the observation of self-oscillations in a bottom-up nanoelectromechanical system (NEMS) during field emission driven by a constant applied voltage. An electromechanical model is explored that explains the phenomenon and that can be directly used to develop integrated devices. In this first study we have already achieved ~50% DC/AC (direct to alternative current) conversion. Electrical self-oscillations in NEMS open up a new path for the development of high speed, autonomous nanoresonators, and signal generators and show that field emission (FE) is a powerful tool for building new nan…
We show that nano-mechanical vibrations in a magnetic shuttle device can be strongly affected by external microwave irradiation through photo-assisted electronic spin-flip transitions. Mechanical consequences of these spin-flips are due to a spin-dependent magnetic force, which may lead to a nano-mechanical instability in the device. We derive a criterion for the instability to actually occur and analyze different regimes of possible nano-mechanical oscillations. Possible experimental realizations of the spin-mediated photo-mechanical instability and detection of the device back action are dis…
Controlling the strain in two-dimensional materials is an interesting avenue to tailor the mechanical properties of nanoelectromechanical systems. Here we demonstrate a technique to fabricate ultrathin tantalum oxide nanomechanical resonators with large stress by laser-oxidation of nano-drumhead resonators made out of tantalum diselenide (TaSe2), a layered 2D material belonging to the metal dichalcogenides. Prior to the study of their mechanical properties with a laser interferometer, we checked the oxidation and crystallinity of the freely-suspended tantalum oxide in a high-resolution electro…
Bloch oscillations were predicted and observed long ago in Josephson junctions, which are thin insulating or conducting layers bridging two superconductors. Here we forward a scheme for utilizing these oscillations to amplify nano-metric mechanical vibrations. Highly coherent non-classical mechanical states can be produced and controlled by simply applying a DC bias current and an in-plane magnetic field. The vibrations induce peaks in the I-V characteristic of the junction and can be detected by simple DC voltage measurements.
Most mechanical resonators are treated as simple linear oscillators. Nonlinearity in the resonance behavior of nanoelectromechanical systems (NEMS) has only lately attracted significant interest. Most recently, cubic-order nonlinearity has been used to explain anomalies in the resonance frequency behaviors in the frequency domain. Particularly, such nonlinearities were explained using cubic nonlinearity in the restoring force (Duffing nonlinearity) or damping (van der Pol nonlinearity). Understanding the limits of linear resonant behavior is particularly important in NEMS, as they are frequent…
Synchronization has been reported for a wide range of self-oscillating systems. However, even though it has been predicted theoretically for several decades, the experimental realization of phase self-oscillation, sometimes called phase trapping, in the high driving regime has been studied only recently. We explored in detail the phase dynamics in a synchronized field emission SiC nanoelectromechanical system with intrinsic feedback. A richer variety of phase behavior has been unambiguously identified, implying phase modulation and inertia. This synchronization regime is expected to have impli…
Suspended aluminium nanoelectromechanical resonators have been fabricated, and the manufacturing process is described in this work. Device motion is driven and detected with a magnetomotive method. The resonance response has been measured at 4.2 K temperature in vacuum and low pressure $^4$He gas. At low oscillation amplitudes the resonance response is linear, producing Lorentzian line shapes, and Q-values up to 4400 have been achieved. At higher oscillation amplitudes the devices show nonlinear Duffing-like behavior. The devices are found to be extremely sensitive to pressure in $^4$He gas. S…
We study nanoelectromechanical resonators fabricated from suspended flakes of NbSe$_2$ (thickness$\sim$30-50 nm) to probe charge density wave (CDW) physics at nanoscale. Variation of elastic and electronic properties accompanying the CDW phase transition (around 30 K) are investigated simultaneously using the devices as self-sensing heterodyne mixers. Elastic modulus is observed to change by 10 per cent, an amount significantly larger than what had been reported earlier in the case of bulk crystals. We also study the modulation of conductance by electric field effect, and examine its relation …
This study demonstrates how the spin quantum dynamics of a single Fe atom adsorbed on Cu(001) can be controlled and manipulated by the vibrations of a nearby copper tip attached to a nano cantilever by virtue of the dynamic magnetic anisotropy. The magnetic properties of the composite system are obtained from \emph{ab initio} calculations in completely relaxed geometries and turned out to be dependent considerably on the tip-iron distance that changes as the vibrations set in. The level populations, the spin dynamics interrelation with the driving frequency, as well as quantum information rela…
We propose a position detection scheme for a nanoelectromechanical resonator based on the ratchet effect. This scheme has an advantage of being a dc measurement. We consider a three-junction SQUID where a part of the superconducting loop can perform mechanical motion. The response of the ratchet to a dc current is sensitive to the position of the resonator and the effect can be further enhanced by biasing the SQUID with an ac current. We discuss the feasibility of the proposed scheme in existing experimental setups.
We investigate the synchronization of oscillators based on anharmonic nanoelectromechanical resonators. Our experimental implementation allows unprecedented observation and control of parameters governing the dynamics of synchronization. We find close quantitative agreement between experimental data and theory describing reactively coupled Duffing resonators with fully saturated feedback gain. In the synchronized state we demonstrate a significant reduction in the phase noise of the oscillators, which is key for sensor and clock applications. Our work establishes that oscillator networks const…
We present theoretical results for the backaction force noise and damping of a mechanical oscillator whose position is measured by a mesoscopic conductor. Our scattering approach is applicable to a wide class of systems; in particular, it may be used to describe point contact position detectors far from the weak tunneling limit. We find that the backaction depends not only on the mechanical modulation of transmission probabilities but also on the modulation of scattering phases, even in the absence of a magnetic field. We illustrate our general approach with several simple examples, and use it…
The analogy between mechanical and electromagnetic resonators has been a celebrated paradigm of science and engineering. Exploration of this analogy in recent years has resulted in several exciting research directions, including cavity optomechanics[1], phononic bandgap materials[2] and phononic metamaterials[3-5]. In these examples, progress in electromagnetic research has usually led the way for their mechanical counterparts. Here, we contribute to this analogy from a different perspective by adapting a sensing technique originally developed for mechanical devices to increase the capabilitie…
Nanoelectromechanical (NEMS) resonator networks have drawn increasing interest due to their potential applications in emergent behavior, sensing, phononics, and mechanical information processing. A challenge toward realizing these large-scale networks is the ability to controllably tune and reconfigure the collective, macroscopic properties of the network, which relies directly on the development of methods to characterize the constituent NEMS resonator building blocks and their coupling. In this work, we demonstrate a scalable optical technique to spatially map graphene NEMS networks and read…
The development of rotary nanomotors is crucial for further advancing NEMS technology. In this work, we report innovative design, assembly, and rotation of ordered arrays of nanomotors. The nanomotors were bottom-up assembled from nanoscale building blocks with nanowires as rotors, patterned nanomagnets as bearings, and quadrupole microelectrodes as stators. Arrays of nanomotors can be synchronously rotated with controlled angle, speed (to at least 18,000 rpm), and chirality by electric fields. Using analytical modeling, we revealed the fundamental nanoscale electrical, mechanical, and magneti…
Much experimental effort is invested these days in fabricating nanoelectromechanical systems (NEMS) that are sufficiently small, cold, and clean, so as to approach quantum mechanical behavior as their typical quantum energy scale $\hbarΩ$ becomes comparable to that of the ambient thermal energy $k_{B}T$. Such systems will hopefully enable one to observe the quantum behavior of human-made objects, and test some of the basic principles of quantum mechanics. Here we expand and elaborate on our recent suggestion [PRL 99 (2007) 040404] to exploit the nonlinear nature of a nanoresonator in order to …
Nanoelectromechanical systems (NEMS) have generated considerable interest as inertial mass sensors. NEMS resonators have been used to weigh cells, biomolecules, and gas molecules, creating many new possibilities for biological and chemical analysis [1-4]. Recently, NEMS-based mass sensors have been employed as a new tool in surface science in order to study e.g. the phase transitions or the diffusion of adsorbed atoms on nanoscale objects [5-7]. A key point in all these experiments is the ability to resolve small masses. Here we report on mass sensing experiments with a resolution of 1.7 yg (1…
The quantum behaviour of mechanical resonators is a new and emerging field driven by recent experiments reaching the quantum ground state. The high frequency, small mass, and large quality-factor of carbon nanotube resonators make them attractive for quantum nanomechanical applications. A common element in experiments achieving the resonator ground state is a second quantum system, such as coherent photons or superconducting device, coupled to the resonators motion. For nanotubes, however, this is a challenge due to their small size. Here, we couple a carbon nanoelectromechanical (NEMS) device…
Graphene and carbon nanotubes represent the ultimate size limit of one and two-dimensional nanoelectromechanical resonators. Because of their reduced dimensionality, graphene and carbon nanotubes display unusual mechanical behavior; in particular, their dynamics is highly nonlinear. Here, we review several types of nonlinear behavior in resonators made from nanotubes and graphene. We first discuss an unprecedented scenario where damping is described by a nonlinear force. This scenario is supported by several experimental facts: (i) the quality factor varies with the amplitude of the motion as …
The motion of micro- and nanomechanical resonators can be coupled to electromagnetic fields. This allows to explore the mutual interaction and introduces new means to manipulate and control both light and mechanical motion. Such optomechanical systems have recently been implemented in nanoelectromechanical systems involving a nanomechanical beam coupled to a superconducting microwave resonator. Here, we propose optomechanical systems that involve multiple, coupled microwave resonators. In contrast to similar systems in the optical realm, the coupling frequency governing photon exchange between…
Atomically thin layers of two-dimensional (2D) materials such as graphene, MoS2 and h-BN have immense potential as sensors and electronic devices thanks to their highly desirable electronic, mechanical, optical and heat transport properties. In particular their extreme stiffness, tensile strength and low density allows for high frequency electronic devices, resonators and ultra-sensitive detectors providing realistic avenues for down-scaling electronic devices and nanoelectromechanical systems (NEMS). Whilst nanoscale morphology and electronic properties of 2D materials can be studied using ex…
Low-cost spintronic devices functioning in zero applied magnetic field are required for bringing the idea of spin-based electronics into the real-world industrial applications. Here we present first microwave measurements performed on nanomagnet devices fabricated by electrodeposition inside porous membranes. In the paper, we discuss in details a microwave resonator consisting of three nanomagnets, which functions in zero external magnetic field. By applying a microwave signal at a particular frequency, the magnetization of the middle nanomagnet experiences the ferromagnetic resonance (FMR), a…
Negative differential conductance (NDC), characterized by the decreasing current with increasing voltage, has attracted continuous attention for its various novel applications. The NDC typically exists in a certain range of bias voltages for a selected system and controlling the regions of NDC in curves of current versus voltage (I-V) is experimentally challenging. Here, we demonstrate an unusual magnetic-field-controlled NDC in graphene npn junction resonators. The magnetic field not only can switch on and off the NDC, but also can continuously tune the regions of the NDC in the I-V curves. I…
Emerging applications in nanoelectromechanical systems (NEMS) made from two-dimensional (2D) materials demand simultaneous imaging and selective actuation of the mechanical modes. Focused optical probes to measure and actuate motion offer a possible solution, but their lateral spatial resolution must be better than the size of the resonator. While optical interferometry is known to have excellent spatial resolution, the spatial resolution of the focused, laser-based optical driving is not currently known. Here, we combine separately scanned interferometry and optical drive probes to map the mo…
Nanoelectromechanical systems (NEMS), utilising localised mechanical vibrations, were pioneered for sensors, signal processors and to study macroscopic quantum mechanics. Increasingly the concept of integrating multiple mechanical elements via electrical/optical means has emerged as a challenge towards NEMS circuits. Here we develop phononic crystal waveguides (PnC WGs), using a 1-dimensional array of suspended membranes, that offer purely mechanical means to integrate isolated NEMS resonators. In the first steps to this objective, we demonstrate the PnC WG can support and guide mechanical vib…
We present superconducting microwave-frequency resonators based on NbTiN nanowires. The small cross section of the nanowires minimizes vortex generation, making the resonators resilient to magnetic fields. Measured intrinsic quality factors exceed $2\times 10^5$ in a $6$ T in-plane magnetic field, and $3\times 10^4$ in a $350$ mT perpendicular magnetic field. Due to their high characteristic impedance, these resonators are expected to develop zero-point voltage fluctuations one order of magnitude larger than in standard coplanar waveguide resonators. These properties make the nanowire resonato…
We characterize niobium nitride (NbN) $λ/2$ coplanar waveguide resonators, which were fabricated from a 10nm thick film on silicon dioxide grown by sputter deposition. For films grown at 120°C we report a superconducting critical temperature of 7.4K associated with a normal square resistance of 1k$Ω$ leading to a kinetic inductance of 192pH/$\Box$. We fabricated resonators with a characteristic impedance up to 4.1k$Ω$ and internal quality factors $Q_\mathrm{i} > 10^4$ in the single photon regime at zero magnetic field. Moreover, in the many photons regime, the resonators present high magnetic …
