We characterize niobium nitride (NbN) $λ/2$ coplanar waveguide resonators, which were fabricated from a 10nm thick film on silicon dioxide grown by sputter deposition. For films grown at 120°C we report a superconducting critical temperature of 7.4K associated with a normal square resistance of 1k$Ω$ leading to a kinetic inductance of 192pH/$\Box$. We fabricated resonators with a characteristic impedance up to 4.1k$Ω$ and internal quality factors $Q_\mathrm{i} > 10^4$ in the single photon regime at zero magnetic field. Moreover, in the many photons regime, the resonators present high magnetic field resilience with $Q_\mathrm{i} > 10^4$ in a 6T in-plane magnetic field as well as in a 300mT out-of-plane magnetic field. These findings make such resonators a compelling choice for cQED experiments involving quantum systems with small electric dipole moments operated in finite magnetic fields.
We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature ($9.20 \pm 0.06 \rm ~K$) as well as a residual resistivity ratio of $4.8$. We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fluctuators using microwave measurements. For a coplanar waveguide resonator gap of $2~μ\rm m$, the films exhibit filling-factor-adjusted two-level-system loss tangents as low as $1.5 \times 10^{-7}$ wi…
We demonstrate that a high kinetic inductance disordered superconductor can realize a low microwave loss, non-dissipative circuit element with an impedance greater than the quantum resistance ($R_Q = h/4e^2 \simeq 6.5kΩ$). This element, known as a superinductor, can produce a quantum circuit where charge fluctuations are suppressed. The superinductor consists of a 40 nm wide niobium nitride nanowire and exhibits a single photon quality factor of $2.5 \times 10^4$. Furthermore, by examining loss rates, we demonstrate that the dissipation of our nanowire devices can be fully understood in the fr…
We characterize inductors fabricated from ultra-thin, approximately 100 nm wide strips of niobium (Nb) and niobium nitride (NbN). These nanowires have a large kinetic inductance in the superconducting state. The kinetic inductance scales linearly with the nanowire length, with a typical value of 1 nH/um for NbN and 44 pH/um for Nb at a temperature of 2.5 K. We measure the temperature and current dependence of the kinetic inductance and compare our results to theoretical predictions. We also simulate the self-resonant frequencies of these nanowires in a compact meander geometry. These nanowire …
We experimentally investigated the optical responses of a superconducting niobium resonator. It was found that, with increasing radiation power, the resonance frequency increases monotonically below around 500 mK, decreases monotonically above around 1 K and exhibits a nonmonotonic behavior at around 700 mK. These observations show that one can operate the irradiated resonator in three temperature regimes, depending on whether two-level system (TLS) effects or kinetic inductance effects dominate. Furthermore, we found that the optical responses at ultra-low temperatures can be qualitatively re…
We present superconducting microwave-frequency resonators based on NbTiN nanowires. The small cross section of the nanowires minimizes vortex generation, making the resonators resilient to magnetic fields. Measured intrinsic quality factors exceed $2\times 10^5$ in a $6$ T in-plane magnetic field, and $3\times 10^4$ in a $350$ mT perpendicular magnetic field. Due to their high characteristic impedance, these resonators are expected to develop zero-point voltage fluctuations one order of magnitude larger than in standard coplanar waveguide resonators. These properties make the nanowire resonato…
We present a fabrication method of superconducting quantum interference devices (SQUIDs) based on direct write lithography with an Atomic Force Microscope (AFM). This technique involves maskless local anodization of Nb or NbN ultrathin films using the voltage biased tip of the AFM. The SQUIDs are of weak-link type, for which two geometries have been tested: Dayem and variable thickness nanobridges. The magnetic field dependence of the maximum supercurrent Ic(flux) in resulting SQUIDs is thoroughly measured for different weak link geometries and for both tested materials. It is found that the m…
We evaluate the performance of hybrid microwave resonators made by combining sputtered Nb thin films with Tungsten nanowires grown with a He-beam induced deposition technique. Depending on growth conditions the nanowires have a typical width $w\in[35-75]$~nm and thickness $t\in[5-40]$~nm. We observe a high normal state resistance $R_{sq}\in [65-150]$ $Ω/sq$ which together with a critical temperature $T_c\in[4-6]~K$ ensure a high kinetic inductance making the resonator strongly nonlinear. Both lumped and coplanar waveguide resonators were fabricated and measured at low temperature exhibiting in…
We report on the first realization of Nb-based \textit{all-metallic} gated Dayem nano-bridge field-effect transistors (Nb-FETs). These Josephson devices operate up to a temperature of $\sim 3$ K, and exhibit full suppression of the supercurrent thanks to the application of a control gate voltage. The dependence of the kinetic inductance and of the transconductance on gate voltage promises a performance already on par with so far realized metallic Josephson transistors, and let to foresee the implementation of a superconducting digital logic based on Nb-FETs. We conclude by showing the practica…
We report the detection of a gate-tunable kinetic inductance in a hybrid InAs/Al nanowire. For this purpose, we have embedded the nanowire into a quarter-wave coplanar waveguide resonator and measured the resonance frequency of the circuit. We find that the resonance frequency can be changed via the gate voltage that controls the electron density of the proximitized semiconductor and thus the nanowire inductance. Applying Mattis-Bardeen theory, we extract the gate dependence of the normal state conductivity of the nanowire, as well as its superconducting gap. Our measurements complement existi…
We designed and successfully fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a Niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is fabricated as a meandered quarter-wavelength transmission line (one end shorts to the ground and another end is capacitively coupled to a through feedline). With a vector network analyzer we measured the transmissions of the applied microwave through the resonators at ultra-low temperature (e.g., at 20 mK), and found that their loaded quality factors are signif…
We design and fabricate two types of superconducting niobium coplanar waveguide microwave resonators with different coupling capacitors on high purity Si substrates. Their microwave transmissions are measured at the temperatures of 20 mK. It is found that these two types of resonators possess significantly-different loaded quality factors; one is $5.6\times{10}^{3}$, and the other is $4.0\times{10}^{4}$. The measured data are fitted well by classical ABCD matrix approach. We found that the transmission peak deviates from the standard Lorentizian with a frequency broadening.
We investigate the performance of niobium nitride superconducting coplanar waveguide resonators towards hybrid quantum devices with magnon-photon coupling. We find internal quality factors ~ 20000 at 20 mK base temperature, in zero magnetic field. We find that by reducing film thickness below 100 nm internal quality factor greater than 1000 can be maintained up to parallel magnetic field of ~ 1 T and perpendicular magnetic field of ~ 100 mT. We further demonstrate strong coupling of microwave photons in these resonators, with magnons in chromium trichloride, a van der Waals antiferromagnet, wh…
Millimeter-wave superconducting devices offer a platform for quantum experiments at temperatures above 1 K, and new avenues for studying light-matter interactions in the strong coupling regime. Using the intrinsic nonlinearity associated with kinetic inductance of thin film materials, we realize four-wave mixing at millimeter-wave frequencies, demonstrating a key component for superconducting quantum systems. We report on the performance of niobium nitride resonators around 100 GHz, patterned on thin (20-50 nm) films grown by atomic layer deposition, with sheet inductances up to 212 pH/square …
Data are presented on mutual and self-inductance of various inductors used in multilayered superconductor integrated circuits: microstrips and striplines with widths of signal traces from 250 nm to a few micrometers, located on the same circuit layer at various distances from each other (from 250 nm to a few micrometers) and/or on different layers spaced vertically; effect of long slits in the ground plane(s) along the inductors on their mutual inductance; inductance of right-angled bends; inductance of meanders. Simple analytical expressions for mutual and self-inductance of the basic inducto…
Magnetic-field-resilient superconducting coplanar waveguide (SCPW) resonators are essential for developing integrated quantum circuits of various qubits and quantum memory devices. Molybdenum-Rhenium (MoRe), which is a disordered superconducting alloy forming a highly transparent contact to the graphene and carbon nanotubes (CNTs), would be a promising platform for realizing the field-resilient SCPW resonators combined with graphene- and CNT-based nano-hybrid qubits. We fabricated MoRe SCPW resonators and investigated their microwave transmission characteristics with varying temperature and ex…
Superconducting boron doped silicon is a promising material for integrated silicon quantum devices. In particular, its low electronic density and moderate disorder make it a suitable candidate for the fabrication of large inductances with low losses at microwave frequencies. Here, we study experimentally the electrodynamics of superconducting silicon thin layers patterned in coplanar waveguide resonators, targeting three key properties: kinetic inductance, internal losses, and the variation of these quantities with the read-out power. We report the first observation in a doped semiconductor of…
We study the optical pulse response of a superconducting half-wavelength coplanar waveguide (CPW) resonator. We apply a short optical pulse to the center strip of the CPW resonator, where the current distribution shows antinodes or nodes for different resonance modes, and measure the frequency response. We develop a time-dependent variable inductance circuit model with which we can simulate the optical pulse response of the resonator. By fitting this model to experimental data, we extract the temporal kinetic inductance variations, which directly reflect the quasi-particle recombination with t…
We theoretically study a circuit QED architecture based on a superconducting flux qubit directly coupled to the center conductor of a coplanar waveguide transmission-line resonator. As already shown experimentally [Abdumalikov et al. Phys. Rev. B 78, 180502 (2008)], the strong coupling regime of cavity QED can readily be achieved by optimizing the local inductance of the resonator in the vicinity of the qubit. In addition to yielding stronger coupling with respect to other proposals for flux qubit based circuit QED, this approach leads to a qubit-resonator coupling strength g which does not sc…
The in-place growth of suspended carbon nanotubes facilitates the observation of both unperturbed electronic transport spectra and high-Q vibrational modes. For complex structures integrating, e.g., superconducting rf elements on-chip, selection of a chemically and physically resistant material that survives the chemical vapor deposition (CVD) process provides a challenge. We demonstrate the implementation of molybdenum-rhenium coplanar waveguide resonators that exhibit clear resonant behaviour at cryogenic temperatures even after having been exposed to nanotube growth conditions. The properti…
We study superconducting stripline resonator (SSR) made of Niobium, which is integrated with a superconducting interference device (SQUID). The large nonlinear inductance of the SQUID gives rise to strong Kerr nonlinearity in the response of the SSR, which in turn results in strong coupling between different modes of the SSR. We experimentally demonstrate that such intermode coupling gives rise to dephasing of microwave photons. The dephasing rate depends periodically on the external magnetic flux applied to the SQUID, where the largest rate is obtained at half integer values (in units of the …
We study the microwave impedance of extremely high aspect ratio (length/width ~ 5,000) superconducting niobium nitride nanowires. The nanowires are fabricated in a compact meander geometry that is in series with the center conductor of a 50 ohm coplanar waveguide transmission line. The transmission coefficient of the sample is measured up to 20 GHz. At high frequency, a peak in the transmission coefficient is seen. Numerical simulations show that this is a half-wave resonance along the length of the nanowire, where the nanowire acts as a high impedance, slow wave transmission line. This resona…
We report on the challenges and limitations of direct coupling of the magnetic field from a circuit resonator to an electron spin bound to a donor potential. We propose a device consisting of a trilayer lumped-element superconducting resonator and a single donor implanted in enriched $^{28}$Si. The resonator impedance is significantly smaller than the practically achievable limit using prevalent coplanar resonators. Furthermore, the resonator includes a nano-scale spiral inductor to spatially focus the magnetic field from the photons at the location of the implanted donor. The design promises …
We report on ultrastrong coupling between a superconducting flux qubit and a resonant mode of a system comprised of two superconducting coplanar stripline resonators coupled galvanically to the qubit. With a coupling strength as high as 17% of the mode frequency, exceeding that of previous circuit quantum electrodynamics experiments, we observe a pronounced Bloch-Siegert shift. The spectroscopic response of our multimode system reveals a clear breakdown of the Jaynes-Cummings model. In contrast to earlier experiments, the high coupling strength is achieved without making use of an additional i…
The addition of nonlinearity to an harmonic resonator provides a route to complex dynamical behaviour of resonant modes, including coupling between them. We present a superconducting device that makes use of the nonlinearity of Josephson junctions to introduce a controlled, tunable, nonlinear inductance to a thin film coplanar waveguide resonator. Considering the device as a potential quantum optical component in the microwave regime, we create a sensitive bifurcation amplifier and then demonstrate spectroscopy of other resonant modes via the intermode coupling. We find that the sensitivity of…
We present a systematic analysis of the internal losses of superconducting coplanar waveguide microwave resonators based on niobium thin films on silicon substrates. In particular, we investigate losses introduced by Nb/Al interfaces in the center conductor, which is important for experiments where Al based Josephson junctions are integrated into Nb based circuits. We find that these interfaces can be a strong source for two-level state (TLS) losses, when the interfaces are not positioned at current nodes of the resonator. In addition to TLS losses, for resonators including Al, quasiparticle l…
We have observed period-tripling subharmonic oscillations, in a superconducting coplanar waveguide resonator operated in the quantum regime, $k_B T \ll \hbarω$. The resonator is terminated by a tunable inductance that provides a Kerr-type nonlinearity. We detected the output field quadratures at frequencies near the fundamental mode, $ω/2π\sim 5\,$GHz, when the resonator was driven by a current at $3ω$ with an amplitude exceeding an instability threshold. The output radiation was red-detuned from the fundamental mode. We observed three stable radiative states with equal amplitudes and phase-sh…
Frequency instability of superconducting resonators and qubits leads to dephasing and time-varying energy-loss and hinders quantum-processor tune-up. Its main source is dielectric noise originating in surface oxides. Thorough noise studies are needed in order to develop a comprehensive understanding and mitigation strategy of these fluctuations. Here we use a frequency-locked loop to track the resonant-frequency jitter of three different resonator types---one niobium-nitride superinductor, one aluminium coplanar waveguide, and one aluminium cavity---and we observe strikingly similar random-tel…
Voltage-tunable superconductor-semiconductor devices offer a unique platform to realize dynamic tunability in superconducting quantum circuits. By galvanically connecting a gated InAs-Al Josephson junction to a coplanar waveguide resonator, we demonstrate the use of a wide-range gate-tunable superconducting element. We show that the resonant frequency is controlled via a gate-tunable Josephson inductance and that the non-linearity of the voltage-controlled InAs-Al junction is non-dissipative as is the case with conventional Al-AlO$_{x}$ junctions. As the gate voltage is decreased, the inductiv…
We have developed and tested a doubly tunable resonator, with the intention to simulate fast motion of the resonator boundaries in real space. Our device is a superconducting coplanar-waveguide half-wavelength microwave resonator, with fundamental resonant frequency ~5 GHz. Both of its ends are terminated by dc-SQUIDs, which serve as magnetic-flux-controlled inductances. Applying a flux to either SQUID allows tuning of the resonant frequency by approximately 700 MHz. By using two separate on-chip magnetic-flux lines, we modulate the SQUIDs with two tones of equal frequency, close to twice that…
Atomic sized two-level systems (TLSs) in amorphous dielectrics are known as a major source of loss in superconducting devices. In addition, individual TLS are known to induce large frequency shifts due to strong coupling to the devices. However, in the presence of a broad ensemble of TLSs these shifts are symmetrically canceled out and not observed in a typical single-tone spectroscopy experiment. We introduce a two-tone spectroscopy on the normal modes of a pair of coupled superconducting coplanar waveguide resonators to reveal this effect. Together with an appropriate saturation model this e…
We demonstrate impedance-matched low-loss transmission lines with a signal wavelength more than 150 times smaller than the free space wavelength using superconducting nanowires on high permittivity substrates. A niobium nitride thin film is patterned in a coplanar waveguide (CPW) transmission line geometry on a bilayer substrate consisting of 100 nm of epitaxial strontium titanate on high-resitivity silicon. The use of strontium titanate on silicon enables wafer-scale fabrication and maximizes process compatibility. It also makes it possible to realize a $50$ $Ω$ characteristic impedance acros…
