arXiv 1909.014872019-09-03quant-phcond-mat.mes-hallphysics.app-ph

量子器件中基于动力学电感的毫米波四波混频

Millimeter-Wave Four-Wave Mixing via Kinetic Inductance for Quantum Devices

Alexander Anferov, Aziza Suleymanzade, Andrew Oriani, Jonathan Simon, David I. Schuster

备注：: 13 pages, 9 figures including supplementary materials
发表信息：: Phys. Rev. Applied 13, 024056 (2020)
DOI：: 10.1103/PhysRevApplied.13.024056

摘要：

毫米波超导器件为1 K以上温度下的量子实验提供了平台，并为研究强耦合体系中的光-物质相互作用提供了新的途径。利用与薄膜材料的动力学电感相关的本征非线性，我们实现了毫米波频率的四波混频，展示了超导量子系统的关键组成部分。我们报告的性能的氮化铌谐振器约100 GHz的，在薄（20-50 nm）的原子层沉积生长的薄膜，与片电感高达212 pH/平方和临界温度高达13.9 K。对于厚度大于20 nm的薄膜，我们测量品质因数从$1$ - $6\times 10^4$，可能受到两级系统的限制。最后，我们测量了95 GHz器件的简并参数转换，其正向效率高达+16 dB，为毫米波频率下非线性量子器件的发展铺平了道路。

英文摘要：

Millimeter-wave superconducting devices offer a platform for quantum experiments at temperatures above 1 K, and new avenues for studying light-matter interactions in the strong coupling regime. Using the intrinsic nonlinearity associated with kinetic inductance of thin film materials, we realize four-wave mixing at millimeter-wave frequencies, demonstrating a key component for superconducting quantum systems. We report on the performance of niobium nitride resonators around 100 GHz, patterned on thin (20-50 nm) films grown by atomic layer deposition, with sheet inductances up to 212 pH/square and critical temperatures up to 13.9 K. For films thicker than 20 nm, we measure quality factors from $1$-$6\times 10^4$, likely limited by two-level systems. Finally we measure degenerate parametric conversion for a 95 GHz device with a forward efficiency up to +16 dB, paving the way for the development of nonlinear quantum devices at millimeter-wave frequencies.

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