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arXiv 1912.04090cond-mat.mes-hall
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将石墨烯集成到半导体制造线中

Integrating Graphene into Semiconductor Fabrication Lines

Daniel Neumaier, Stephan Pindl, Max C. Lemme

摘要:

基于二维材料石墨烯的电子和光子器件具有独特的特性,导致出色的性能指标。掌握将这种新的非常规材料集成到现有的半导体生产线中是推动其商业化的关键一步。

英文摘要:

Electronic and photonic devices based on the two-dimensional material graphene have unique properties, leading to outstanding performance figures-of-merit. Mastering the integration of this new and unconventional material into an established semiconductor fabrication line represents a critical step for pushing it forward towards commercialization.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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