一种测定薄膜介质材料宽带复介电常数的方法
A Method to Determine Broadband Complex Permittivity of Thin Film Dielectric Materials up to 60 GHz
摘要：
本文介绍了一种由有限元分析和微带线测量确定介质薄膜复介电常数的方法。两种传输线的等效电路模型的情况下，填充线和无损耗线，其分布元素可以从全波有限元模拟计算。利用这些计算的分布单元和微带线测量，提取复介电常数。该技术利用一种简单的方法来分离的介电损耗从测量的总损耗和复介电常数提取使用测量的传播常数。采用合理的介电模型对提取的复介电常数进行拟合，保证了最终解的因果性。通过此过程获得的最佳拟合结果被视为最终介电常数结果，其显示出与数据手册值的出色匹配。此外，模拟使用拟合的介电常数表现出良好的协议与实验的微带线的传播常数数据高达60 GHz。该方法在聚酰亚胺薄膜上得到了验证，并可应用于其他薄膜材料。
英文摘要：
This paper describes a method to determine the complex permittivity of a thin dielectric film from finite element analysis and microstrip line measurements. Two transmission line equivalent circuit models were used for the cases of an air-filled line and a lossless line, whose distributed elements can be calculated from full wave finite element simulations. With these calculated distributed elements and microstrip line measurements, the complex permittivity was extracted. The technique utilizes a simple way to separate the dielectric loss from the measured total loss and the complex permittivity was extracted using the measured propagation constant. A rational dielectric model was employed to fit the extracted complex permittivity, which ensures causality of the final solution. The best fitting results obtained through this procedure are considered as the final permittivity results, which have shown excellent match to the data sheet values. Moreover, simulations using the fitted permittivity exhibit good agreement with the experimental propagation constant data of microstrip lines up to 60 GHz. The proposed method was demonstrated on polyimide, and it can be applied to other thin film materials.
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