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arXiv 1702.01768astro-ph.IMastro-ph.CO
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基于金字塔亚波长结构的硅基宽带毫米波增透膜

Broadband Millimeter-Wave Anti-Reflection Coatings on Silicon Using Pyramidal Sub-Wavelength Structures

Karl Young, Qi Wen, Shaul Hanany, Hiroaki Imada, Jürgen Koch, Tomotake Matsumura, Oliver Suttmann, Viktor Schütz

摘要:

我们采用了两种新的方法来生产亚波长结构(SWS)的抗反射膜(ARC)的硅上的毫米和亚毫米(MSM)波段:皮秒激光烧蚀和切割与斜面锯。我们用这两种技术制作了金字塔结构。仅在一侧加工的切割样品具有350 $μ$ m和972 $μ$ m的节距和高度。两个激光烧蚀的样品具有180 $μ$ m的节距和720 $μ$ m和580 $μ$ m的高度;这些样品中只有一个在两侧烧蚀。我们目前的形状和光学性能的测量,以及使用有限元分析和严格的耦合波分析预测的光学性能的比较。通过将单面切割样品的测量性能扩展到双面情况,我们证明了在以170 GHz为中心的97%带宽上,25%的频带平均反射率小于5%。使用双面激光烧蚀样品,我们证明反射率小于5%,超过83%的带宽集中在346 GHz。

英文摘要:

We used two novel approaches to produce sub-wavelength structure (SWS) anti-reflection coatings (ARC) on silicon for the millimeter and sub-millimeter (MSM) wave band: picosecond laser ablation and dicing with beveled saws. We produced pyramidal structures with both techniques. The diced sample, machined on only one side, had pitch and height of 350 $μ$m and 972 $μ$m. The two laser ablated samples had pitch of 180 $μ$m and heights of 720 $μ$m and 580 $μ$m; only one of these samples was ablated on both sides. We present measurements of shape and optical performance as well as comparisons to the optical performance predicted using finite element analysis and rigorous coupled wave analysis. By extending the measured performance of the one-sided diced sample to the two-sided case, we demonstrate 25 % band averaged reflectance of less than 5 % over a bandwidth of 97 % centered on 170 GHz. Using the two-sided laser ablation sample, we demonstrate reflectance less than 5 % over 83 % bandwidth centered on 346 GHz.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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