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arXiv 1605.07697physics.ins-detcond-mat.mtrl-sci
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低温下涂层机械损耗测试的新方法

A new method of probing mechanical losses of coatings at cryogenic temperatures

Serge Galliou, Samuel Deléglise, Maxim Goryachev, Leonhard Neuhaus, Gianpietro Cagnoli, Salim Zerkani, Vincent Dolique, Xavier Vacheret, Philippe Abbé, Laurent … 展开作者

Serge Galliou, Samuel Deléglise, Maxim Goryachev, Leonhard Neuhaus, Gianpietro Cagnoli, Salim Zerkani, Vincent Dolique, Xavier Vacheret, Philippe Abbé, Laurent Pinard, Christophe Michel, Thibaut Karassouloff, Tristan Briant, Pierre-François Cohadon, Antoine Heidmann, Michael E. Tobar, Roger Bourquin

摘要:

提出了一种在1-100 MHz频率范围和低温下探测金属和电介质涂层的机械损耗并比较相应沉积过程的新方法。该方法基于使用极高质量的石英声学腔,其内部损耗比当今任何可用的涂层都低几个数量级。该方法被证明为铬,铬/金和多层钽/二氧化硅涂层。已发现${\rm Ta}_2{\rm O}_5/{\rm Si}{\rm O}_2$涂层在4 { \rm K}下接近30 { \rm MHz}时表现出比$1.6\times10^{-5}$低的损耗角。将结果与先前的测量结果进行比较。

英文摘要:

A new method of probing mechanical losses and comparing the corresponding deposition processes of metallic and dielectric coatings in 1-100 MHz frequency range and cryogenic temperatures is presented. The method is based on the use of extremely high-quality quartz acoustic cavities whose internal losses are orders of magnitude lower than any available coatings nowadays. The approach is demonstrated for Chromium, Chromium/Gold and a multilayer tantala/silica coatings. The ${\rm Ta}_2{\rm O}_5/{\rm Si}{\rm O}_2$ coating has been found to exhibit a loss angle lower than $1.6\times10^{-5}$ near 30 {\rm MHz} at 4 {\rm K}. The results are compared to the previous measurements.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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