溅射非晶态SiC涂层力学和光学性能的测量与模拟
Measurement and simulation of mechanical and optical properties of sputtered amorphous SiC coatings
摘要：
在这项工作中，我们报告了广泛的表征非晶碳化硅（a-SiC）涂层制备的物理沉积方法。我们比较了两种不同的溅射系统（标准RF磁控溅射和离子束辅助溅射）上获得的结果，以抓住两种不同的设置对结果的可重复性的影响。在对所制备样品的结构、形态和组成特征进行彻底表征后，我们重点研究了这些材料的光学和机械损耗。从微观的角度来看，通过比较我们的实验结果与分子动力学模拟的非晶SiC结构的机械损失进一步研究：首先，我们定义了一个协议，以产生一个数值模型的非晶薄膜，捕捉的主要功能的真实系统，然后我们模拟其动态行为变形后，以获得其机械响应。我们的研究结果进行了讨论的应用前景的a-SiC作为一种光学材料的高精度光学实验，特别是在引力波干涉。
英文摘要：
In this work We report on the extensive characterization of amorphous silicon carbide (a-SiC) coatings prepared by physical deposition methods. We compare the results obtained on two different sputtering systems (a standard RF magnetron sputtering and a ion-beam assisted sputtering) to seize the impact of two different setups on the repeatably of the results. After a thorough characterization of structural, morphological, and compositional characteristics of the prepared samples, we focus on a detailed study of the optical and mechanical losses in those materials. Mechanical losses are further investigated from a microscopic point of view by comparing our experimental results with molecular dynamic simulations of the amorphous SiC structure: first we define a protocol to generate a numerical model of the amorphous film, capturing the main features of the real system; then we simulate its dynamical behaviour upon deformation in order to obtain its mechanical response. Our results are discussed within the perspective application of a-SiC as an optical material for high-precision optical experiments and in particular in gravitational wave interferometry.
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