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arXiv 1503.04836cond-mat.mes-hallcond-mat.mtrl-sci
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用弹道电子发射显微术研究W/Si(001)界面肖特基势垒随时间的变化

Time dependent changes in Schottky barrier mapping of the W/Si(001) interface utilizing Ballistic Electron Emission Microscopy

Chris A. Durcan, Robert Balsano, Vincent P. LaBella

摘要:

W/Si(001)肖特基势垒高度被映射到纳米尺度,使用BEEM在21天内观察界面静电的变化。最初,平均光谱拟合到0.71 eV的肖特基势垒高度,并且图是均匀的,其中98%的光谱能够拟合。在21天之后,平均光谱拟合到0.62 eV的肖特基势垒高度,并且空间图急剧变化,只有27%的光谱能够拟合。透射电子显微镜显示在界面处形成超薄硅化钨,其厚度在21天内增加。这种增加归因于电子散射的增加,并且在BEEM测量中观察到变化。有趣的是,在整个21天期间,在I-V测量中观察到很少或没有变化。

英文摘要:

The W/Si(001) Schottky barrier height is mapped to nanoscale dimensions using BEEM over a period of 21 days to observe changes in the interface electrostatics. Initially the average spectrum is fit to a Schottky barrier height of 0.71 eV and the map is uniform with 98% of the spectra able to be fit. After 21 days, the average spectrum is fit to a Schottky barrier height of 0.62 eV and the spatial map changes dramatically with only 27% of the spectra able to be fit. Transmission electron microscopy shows the formation of an ultra-thin tungsten silicide at the interface which increases in thickness over the 21 days. This increase is attributed to an increase in electron scattering and the changes are observed in the BEEM measurements. Interestingly, little to no change is observed in the I-V measurements throughout the 21 day period.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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