arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 1502.03327cond-mat.mtrl-sci
收藏

局部石墨化金刚石力学变形的解析模型

An analytical model for the mechanical deformation of locally graphitized diamond

Marco Piccardo, Federico Bosia, Paolo Olivero, Nicola Pugno

摘要:

我们提出了一个分析模型来描述的机械变形的单晶金刚石的激光束或MeV离子微束注入获得的局部亚表面石墨化。在这种情况下,局部的质量密度变化产生在特定的深度内的照射微米区域,这又导致膨胀效应和相应的机械应力的发展。我们的模型描述了局部损伤材料的约束膨胀,并正确预测表面变形,通过比较分析结果与实验轮廓数据和有限元模拟验证。该模型可以采用,以方便地评估局部石墨化的金刚石中的应力和应变场的设计涉及使用聚焦离子/激光束的微细加工工艺,例如,预测潜在的裂纹的形成,或评估的影响,应力的光机械设备的性能。

英文摘要:

We propose an analytical model to describe the mechanical deformation of single-crystal diamond following the local sub-superficial graphitization obtained by laser beams or MeV ion microbeam implantation. In this case, a local mass-density variation is generated at specific depths within the irradiated micrometric regions, which in turn leads to swelling effects and the development of corresponding mechanical stresses. Our model describes the constrained expansion of the locally damaged material and correctly predicts the surface deformation, as verified by comparing analytical results with experimental profilometry data and Finite Element simulations. The model can be adopted to easily evaluate the stress and strain fields in locally graphitized diamond in the design of microfabrication processes involving the use of focused ion/laser beams, for example to predict the potential formation of cracks, or to evaluate the influence of stress on the properties of opto mechanical devices.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑