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arXiv 1502.01615cond-mat.mes-hall
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多层InSe FET中超过1000 cm $^2$ /Vs的本征电子迁移率

Intrinsic electron mobility exceeding 1000 cm$^2$/Vs in multilayer InSe FETs

Sukrit Sucharitakul, Nicholas J. Goble, U. Rajesh Kumar, Raman Sankar, Zachary A. Bogorad, Fang Cheng Chou, Yit-Tsong Chen, Xuan P. A. Gao

摘要:

石墨烯类二维(2D)材料不仅因其奇异的电子结构和基本的电子输运或光学性质而令人感兴趣,而且还有望将器件小型化到原子厚度。作为这类材料中的一种,InSe不仅是光电子器件的有希望的候选材料,而且在具有高迁移率输运的场效应晶体管(FET)中具有潜在的应用前景。在这项工作中,各种基板,如PMMA,裸露的氧化硅,钝化的氧化硅,和氮化硅被用来制造多层InSe FET器件。通过背栅和四探针霍尔测量,提取了器件在不同温度下的场效应迁移率和本征霍尔迁移率,研究了材料的本征输运行为和介质衬底的影响。样品在77- 300 K范围内的场效应和霍尔迁移率落在0.1-2.0 $\times$ × 10 $^3$ cm $^2$ /Vs的范围内,这与由2D过渡金属-二硫属化物制成的现有技术FET相当或更好。

英文摘要:

Graphene-like two-dimensional (2D) materials, not only are interesting for their exotic electronic structure and fundamental electronic transport or optical properties but also, hold promises for device miniaturization down to atomic thickness. As one material belonging to this category, InSe is not only a promising candidate for optoelectronic devices but also has potential for ultrathin field effect transistor (FET) with high mobility transport. In this work, various substrates such as PMMA, bare silicon oxide, passivated silicon oxide, and silicon nitride were used to fabricate multi-layer InSe FET devices. Through back gating and Hall measurement in four-probe configuration, the devices' field effect mobility and intrinsic Hall mobility were extracted at various temperatures to study the material's intrinsic transport behavior and the effect of dielectric substrate. The sample's field effect and Hall mobilities over the range of 77-300K fall in the range of 0.1-2.0$\times$10$^3$ cm$^2$/Vs, which are comparable or better than the state of the art FETs made of 2D transition metal-dichalcogenides.

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