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arXiv 1409.5657cond-mat.mtrl-sci
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氟掺杂:提高高阻宽禁带Mg0.51 Zn 0.49 O有源器件导电性的可行途径

Fluorine doping: A feasible solution to enhancing the conductivity of high-resistance wide bandgap Mg0.51Zn0.49O active components

Lishu Liu, Zengxia Mei, Yaonan Hou, Huili Liang, Alexander Azarov, Vishnukanthan Venkatachalapathy, Andrej Kuznetsov, Xiaolong Du

摘要:

高阻宽带隙半导体材料的N型掺杂,例如纤锌矿型高镁含量的MgxZn 1-xO,一直是一个基础性的应用驱动的研究课题。在此,我们报告了一种解决方案,以提高高电阻Mg0.51Zn0.49O活性成分,这已可靠地实现了通过射频等离子体辅助分子束外延生长的氟掺杂的导电性。结果表明,掺氟对Mg0.51Zn0.49O单晶薄膜的载流子浓度(2.85E17 cm-3 vs ~ 10 E6 ohm cm-3)和电阻率(129 ohm.cm vs ~ 10 E6 ohm cm-3)有显著的提高,表明掺氟可以很好地调节半绝缘Mg0.51Zn0.49O薄膜的电学性能.有趣的是,与F相关的两个施主能级(17 meV和74 meV)通过温度依赖性霍尔测量被揭示。肖特基型金属-半导体-金属紫外光电探测器表现出明显增强的光电流,比未掺杂的对应物高两个数量级。在10 V偏压下,响应度从0.34mA/W提高到52 mA/W。室温下,在10 V偏压下,探测率从1.89E9 cm Hz 1/2/W提高到3.58eE10 cm Hz 1/2/W,表明F掺杂是改善高Mg含量MgxZn 1-xO基器件性能的一条有效途径。

英文摘要:

N-type doping of high-resistance wide bandgap semiconductors, wurtzite high-Mg-content MgxZn1-xO for instance, has always been a fundamental application-motivated research issue. Herein, we report a solution to enhancing the conductivity of high-resistance Mg0.51Zn0.49O active components, which has been reliably achieved by fluorine doping via radio-frequency plasma assisted molecular beam epitaxial growth. Fluorine dopants were demonstrated to be effective donors in Mg0.51Zn0.49O single crystal film having a solar-blind 4.43 eV bandgap, with an average concentration of 1.0E19 F/cm3.The dramatically increased carrier concentration (2.85E17 cm-3 vs ~1014 cm-3) and decreased resistivity (129 ohm.cm vs ~10E6 ohm cm) indicate that the electrical properties of semi-insulating Mg0.51Zn0.49O film can be delicately regulated by F doping. Interestingly, two donor levels (17 meV and 74 meV) associated with F were revealed by temperature-dependent Hall measurements. A Schottky type metal-semiconductor-metal ultraviolet photodetector manifests a remarkably enhanced photocurrent, two orders of magnitude higher than that of the undoped counterpart. The responsivity is greatly enhanced from 0.34 mA/W to 52 mA/W under 10 V bias. The detectivity increases from 1.89E9 cm Hz1/2/W to 3.58eE10 cm Hz1/2/W under 10 V bias at room temperature.These results exhibit F doping serves as a promising pathway for improving the performance of high-Mg-content MgxZn1-xO-based devices.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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