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arXiv 1408.4347cond-mat.supr-con
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超导高动态电感电路用氧化物细丝

Aluminium-oxide wires for superconducting high kinetic inductance circuits

H. Rotzinger, S. T. Skacel, M. Pfirrmann, J. N. Voss, J. Münzberg, S. Probst, P. Bushev, M. P. Weides, A. V. Ustinov, J. E. Mooij

摘要:

我们研究导电氧化铝薄膜,也被称为粒状铝,作为超导高品质,高动态电感电路的材料。薄膜沉积的优化反应直流磁控溅射工艺和其特征在于使用微波测量技术在毫开尔文温度。我们表明,通过精确控制反应溅射条件,可以获得高的室温薄层电阻,因此在低温下的高动力学电感。对于$Ω$薄层电阻为1.5 k,且动电感分数接近1的共面波导谐振器,我们在20,mK下测得品质因数约为700,000。此外,我们观察到通过在空气中温和热处理的薄层电阻降低。利用共面波导谐振器的微波响应研究动态电感的变化。我们发现的动力学电感和薄层电阻之间的相关性是在良好的协议与理论预期。

英文摘要:

We investigate thin films of conducting aluminium-oxide, also known as granular aluminium, as a material for superconducting high quality, high kinetic inductance circuits. The films are deposited by an optimised reactive DC magnetron sputter process and characterised using microwave measurement techniques at milli-Kelvin temperatures. We show that, by precise control of the reactive sputter conditions, a high room temperature sheet resistance and therefore high kinetic inductance at low temperatures can be obtained. For a coplanar waveguide resonator with 1.5\,k$Ω$ sheet resistance and a kinetic inductance fraction close to unity, we measure a quality factor in the order of 700\,000 at 20\,mK. Furthermore, we observe a sheet resistance reduction by gentle heat treatment in air. This behaviour is exploited to study the kinetic inductance change using the microwave response of a coplanar wave guide resonator. We find the correlation between the kinetic inductance and the sheet resistance to be in good agreement with theoretical expectations.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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