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arXiv 1406.3446cond-mat.mtrl-sci
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掺杂对氮化铁薄膜热稳定性和自扩散的影响

Effect of dopants on thermal stability and self-diffusion in iron nitride thin films

Akhil Tayal, Mukul Gupta, Ajay Gupta, M. Horisberger, Jochen Stahn, Kai Schlage, H. -C. Wille

摘要:

研究了掺杂剂(Al,Ti,Zr)对直流磁控溅射法制备的氮化铁薄膜热稳定性的影响。沉积样品的结构和磁性表征表明,铁氮化物薄膜的热稳定性和软磁性能得到显着改善掺杂。为了理解所观察到的结果,进行了详细的Fe和N自扩散测量。据观察,N自扩散得到抑制与Al掺杂,而Ti或Zr掺杂的结果在一定程度上更快的N扩散。另一方面,Fe自扩散似乎得到抑制与任何掺杂剂的氮化物形成的热量是显着小于氮化铁。重要的是,据观察,N的自扩散只起到微不足道的作用,相比,Fe的自扩散,在影响氮化铁薄膜的热稳定性。在此基础上讨论了掺杂对自扩散过程的影响。

英文摘要:

We studied the effect of dopants (Al, Ti, Zr) on the thermal stability of iron nitride thin films prepared using a dc magnetron sputtering technique. Structure and magnetic characterization of deposited samples reveal that the thermal stability together with soft magnetic properties of iron nitride thin films get significantly improved with doping. To understand the observed results, detailed Fe and N self-diffusion measurements were performed. It was observed that N self-diffusion gets suppressed with Al doping whereas Ti or Zr doping results in somewhat faster N diffusion. On the other hand Fe self-diffusion seems to get suppressed with any dopant of which heat of nitride formation is significantly smaller than that of iron nitride. Importantly, it was observed that N self-diffusion plays only a trivial role, as compared to Fe self-diffusion, in affecting the thermal stability of iron nitride thin films. Based on the obtained results effect of dopants on self-diffusion process is discussed.

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