研究等离子体-表面相互作用的粒子束实验：应用于磁控溅射和聚合物处理
Particle beam experiments for the investigation of plasma-surface interactions: application to magnetron sputtering and polymer treatment
摘要：
介绍了一种研究等离子体与表面相互作用的非均相反应的束流实验。原子和离子束聚焦到样品上，使其暴露于氧气、氮气、氢气、稀有气体离子和金属蒸气的量化束。通过石英晶体微天平（QCM）和傅里叶变换红外光谱（FTIR）原位和实时监测的非均匀表面过程。两个例子说明了粒子束设置的能力：铝的氧化和氮化作为反应磁控溅射过程中的目标中毒模型，和聚合物（PET，PP）的等离子体处理。
英文摘要：
A beam experiment is presented to study heterogeneous reactions relevant to plasma-surface interactions. Atom and ion beams are focused onto the sample to expose it to quantified beams of oxygen, nitrogen, hydrogen, noble gas ions and metal vapor. The heterogeneous surface processes are monitored in-situ and in real time by means of a quartz crystal microbalance (QCM) and Fourier transform infrared spectroscopy (FTIR). Two examples illustrate the capabilities of the particle beam setup: oxidation and nitriding of aluminum as a model of target poisoning during reactive magnetron sputtering, and plasma treatment of polymers (PET, PP).
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