发表机构
Institut de Jean Lamour, Université de Nancy（让·拉穆尔研究所, 南锡大学）
机构由 AI 辅助整理，请以论文原文为准。AI 中文总结
针对磁控溅射电离控制难题，提出新型FHiVI²瞬态电机制，通过施加特定短高压脉冲提升电离率，仅增1.2 W功率即可使电离率较HiPIMS提升2.7倍，为等离子体辅助工艺提供新途径。
AI 中文摘要
电离控制仍是等离子体辅助工艺，尤其是磁控溅射中的关键挑战，它直接决定物种输运和薄膜性能。尽管高功率脉冲磁控溅射（HiPIMS）大幅提高了溅射物种的电离率，但其性能受溅射与电离耦合的限制，制约了放电可调性。本文提出快速高压电离改进技术（FHiVI²），这是一种新型瞬态电机制，无需额外元件即可提高电离率。通过在等离子体溅射过程中施加特定的极短高压脉冲，FHiVI²机制有望产生强各向异性电场脉冲，在增强溅射金属物种电离的同时，减少反向吸引损失和溅射。为评估该机制的电离潜力，开展了光学发射光谱和质谱测量；其中，质谱测量显示，在使用2英寸钨靶、施加2 kV电压且仅额外消耗1.2 W平均功率的条件下，与HiPIMS机制相比，电离率提升了2.7倍。这些结果表明，FHiVI²为磁控溅射中改进电离控制提供了灵活途径，为等离子体辅助工艺开辟了新视角。
英文摘要
Ionisation control remains a key challenge in plasma-assisted processes and more particularly in magnetron sputtering. In this context, the former directly governs species transport and thin-film properties. Although HiPIMS substantially enhances the ionisation rate of sputtered species, its performance remains constrained by the coupling between sputtering and ionisation, which limits discharge tunability. Here, we introduce Fast High Voltage for Ionisation Improvement (FHiVI$^{2}$), a new transient electrical regime designed to improve the ionisation rate without requiring additional elements. By applying an ad hoc very short, high-voltage pulse during plasma sputtering processes, FHiVI$^{2}$ regime is expected to induce a strongly anisotropic electric-field burst intended to enhance sputtered metallic species ionisation while limiting back-attraction losses and sputtering. To assess the ionising potential of this regime, optical emission spectroscopy together with mass spectrometry were carried out. More particularly, mass spectrometry measurements show an improvement of the ionisation rate by a factor of 2.7 compared with the HiPIMS regime, for an applied voltage of 2 kV which correspond to an additional mean power of only 1.2 W, using a 2-inch tungsten target. These findings suggest that FHiVI$^{2}$ provides a flexible route towards improved ionisation control in magnetron sputtering and opens new perspectives for plasma-assisted processes.
Comments12 pages, 12 figures
