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arXiv 1203.0645cond-mat.mtrl-scicond-mat.mes-hallcond-mat.other
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衬底温度对氮化铟氮化镓纳米柱晶体生长的影响

Effects of Substrate Temperature on Indium Gallium Nitride Nanocolumn Crystal Growth

S. Keating, M. G. Urquhart, D. V. P. McLaughlin, J. M. Pearce

摘要:

采用等离子体增强蒸发法在非晶SiO2衬底上制备了具有纳米柱状结构的铟氮化镓薄膜。FESEM和XRD的结果表明,更多的结晶纳米柱状微结构可以在较低的铟成分工程。纳米柱直径和填充因子(空隙率)被发现是高度依赖于基板温度,与更薄,更紧密地包装在较低的基板温度下观察到的纳米柱。

英文摘要:

Indium gallium nitride films with nanocolumnar microstructure were deposited with varying indium content and substrate temperatures using plasma-enhanced evaporation on amorphous SiO2 substrates. FESEM and XRD results are presented, showing that more crystalline nanocolumnar microstructures can be engineered at lower indium compositions. Nanocolumn diameter and packing factor (void fraction) was found to be highly dependent on substrate temperature, with thinner and more closely packed nanocolumns observed at lower substrate temperatures.

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