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arXiv 1111.4546cond-mat.mtrl-scicond-mat.otherphysics.optics
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纳米周期Mg/Co多层膜中Zr的引入

Introduction of Zr in nanometric periodic Mg/Co multilayers

K. Le Guen, M. -H. Hu, J. -M. André, Philippe Jonnard, S. -K. Zhou, H. -C. Li, J. -T. Zhu, Z. -S. Wang, N. Mahne, Angela Giglia, S. Nannarone

摘要:

我们研究了引入第三种材料,即Zr,在纳米周期性Mg/Co结构中设计成在极紫外(EUV)光谱范围内作为光学组件工作。设计了Mg/Co、Mg/Zr/Co、Mg/Co/Zr和Mg/Zr/Co/Zr多层膜,并分别通过X射线和EUV反射率测量对多层膜的结构质量和光学性能进行了表征。对于Mg/Co/Zr结构,在25.1 nm和45 °掠入射下的反射率值等于50%,并且在200 ℃退火时达到51.3%。测量的EUV反射率值的三层系统中讨论的材料顺序在一个时期内,并比较Larruquert的理论模型的预测。指出了可能的应用。

英文摘要:

We study the introduction of a third material, namely Zr, within a nanometric periodic Mg/Co structure designed to work as optical component in the extreme UV (EUV) spectral range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements respectively. For the Mg/Co/Zr structure, the reflectance value is equal to 50% at 25.1 nm and 45deg of grazing incidence and reaches 51.3% upon annealing at 200deg C. Measured EUV reflectivity values of tri-layered systems are discussed in terms of material order within a period and compared to the predictions of the theoretical model of Larruquert. Possible applications are pointed out.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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