表面活性剂介导的Ti/Ni多层膜生长
Surfactant mediated growth of Ti/Ni multilayers
摘要：
研究了表面活性剂介导的Ti/Ni多层膜的生长。它们是使用离子束溅射在不同的吸附原子的能量。结果发现，当用Ag作为表面活性剂在0.75 keV的离子能量下溅射多层膜时，界面粗糙度显着降低。另一方面，当离子能量增加到1 keV时，它导致界面处的混合增强，并且没有观察到Ag表面活性剂的明显影响。在所得结果的基础上，讨论了吸附原子能量对表面活性剂介导的生长机制的影响。
英文摘要：
The surfactant mediated growth of Ti/Ni multilayers is studied. They were prepared using ion beam sputtering at different adatom energies. It was found that the interface roughness decreased significantly when the multilayers were sputtered with Ag as surfactant at an ion energy of 0.75 keV. On the other hand, when the ion energy was increased to 1 keV, it resulted in enhanced intermixing at the interfaces and no appreciable effect of Ag surfactant could be observed. On the basis of the obtained results, the influence of adatom energy on the surfactant mediated growth mechanism is discussed.
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