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arXiv 1010.6152cond-mat.mtrl-sci
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低能He ~+辐照对SrTiO3化合物应变的剪裁

Tailoring strain in SrTiO3 compound by low energy He+ irradiation

S. Autier-Laurent, O. Plantevin, P. Lecoeur, B. Decamps, A. Gentils, C. Bachelet, O. Kaitasov, G. Baldinozzi

摘要:

本文报道了用低能He+离子注入钛酸锶,在厚度可控的近表面层中产生晶格参数变化的能力。诱导的应变如下的分布在一个典型的近表面层的200 nm,从结构分析获得。由于来自下层的夹持效应,仅观察到垂直膨胀。在1 E16 He+离子/cm 2的能量密度和10-30 keV的离子能量范围内,获得了高达5-7%的最大畸变,没有非晶化的证据。

英文摘要:

The ability to generate a change of the lattice parameter in a near-surface layer of a controllable thickness by ion implantation of strontium titanate is reported here using low energy He+ ions. The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from structural analysis. Due to clamping effect from the underlying layer, only perpendicular expansion is observed. Maximum distortions up to 5-7% are obtained with no evidence of amorphisation at fluences of 1E16 He+ ions/cm2 and ion energies in the range 10-30 keV.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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