氮离子辐照对钌薄膜表面性质的改性

中文摘要 AI 辅助

表面改性是为先进技术应用定制材料物理和化学性质的重要策略。在薄膜中，表面结构、粗糙度和成分的变化会强烈影响其功能行为。在本工作中，我们研究了能量为20 keV的N+离子辐照对两种不同厚度（100 Å和1000 Å）的Ru薄膜在约10^14至10^17 ions/cm2的注量范围内的效应。本研究的主要目的是探究不同厚度的Ru薄膜在离子注量增加下结构和润湿性性质的演变。总体而言，结果表明，增加离子注量促进了两种膜厚下的表面粗糙化，这与接触角的增加相关。这指示了从亲水到疏水行为的明显转变，在10^17 ions/cm2的注量下观察到最高接触角约95.54°。TRIM模拟显示，对于100 Å薄膜，投影离子射程超过膜厚，允许与底部衬底相互作用，而在1000 Å薄膜中，离子穿透主要限制在Ru层内。GIXRD证实了与注量相关的结构改性，包括峰展宽以及择优取向从Ru（101）向（002）的变化。总体而言，本研究证明N+离子辐照是调控Ru薄膜表面形貌和润湿性的有效途径，能够实现疏水性的可控增强。

英文摘要

Surface modification is an important strategy for tailoring the physical and chemical properties of materials for advanced technological applications. In thin films, changes in surface structure, roughness, and composition can strongly influence their functional behavior. In this work, we studied the effect of N+-ion irradiation at 20 keV energy on Ru thin films of two different thicknesses, 100 Å and 1000 Å, over a fluence range of ~1014 to 1017 ions/cm2. The main objective of this study is to investigate the evolution of the structural and wettability properties of Ru thin films of different thicknesses under increasing ion fluence. Overall, the results reveal that increasing ion fluence promotes surface roughening in both film thicknesses, which is correlated with an increase in contact angle. This indicates a clear transition from hydrophilic to hydrophobic behaviour, with the highest contact angle of ~95.54° observed at a fluence of 1017 ions/cm2. TRIM simulations reveal that for the 100 Å film, the projected ion range exceeds the film thickness, allowing interaction with the bottom substrate, whereas in the 1000 Å film, ion penetration remains largely confined within the Ru layer. GIXRD confirms fluence-dependent structural modification, including peak broadening with preferred orientation changes from Ru (101) to (002). Overall, this study demonstrates that N+-ion irradiation serves as an effective route for tuning both the surface morphology and wettability of Ru thin films, enabling controlled enhancement of hydrophobicity.

发表机构

• Lovely Professional University（洛维普洛弗大学）
• UPES Dehradun（德里敦 UPES 大学）
• Inter University Accelerator Centre（跨大学加速器中心）
• Amity University Noida（诺伊达阿美蒂大学）
• Samrat Ashok Rajkiya Engineering College（萨姆拉特阿肖克拉吉亚工程学院）
• DIT University（DIT 大学）

机构由 AI 辅助整理，请以论文原文为准。